Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
The Research Center
The ZfM is one of the world's leading research centers in the field of microsystems technology and nano technologies. The aim is research and development of new technologies for the micro and nanosystems of tomorrow.
The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nanosystems. Together with partners from industry and research, we bring the developments into application.
ZfM at a Glance
Research News
1st HaloFreeEtch Webinar "Plasma Etching Explained: The Revolution in Micro and Nanoengineering"
With the EU-funded project HaloFreeEtch, a new era in micro- and nanoengineering is unfolding—aiming to establish sustainable, halogen-free etching processes for the semiconductor industry. Join us to explore the future of plasma etching technology! We are pleased to invite you to the 1st HaloFreeEtch Webinar entitled: “Plasma Etching Explained: The Revolution in Micro and Nanoengineering” Date: Friday, June 6th, 2025 Time: 11:00 – 12:30 CESTRead more
TUCtag 2025 -- a great event for the entire family
Thousands of guests enjoyed the presentations at the TU Chemnitz in perfect weather. The ZfM attracted children and young people to its booths with an interactive offer. Programming Robots, testing inertial sensor, understanding fuel cells and flying drones using AR were the topics, where the ZfM shows the using of versatile sensors (made by microsystem technologies) in our daily life.Read more
TUCtag 2025
The ZfM highlights its work and research at TUC the open day – events to DISCOVER, PARTICIPATE and BE AMAZED! Read moreThere is even more. Read all the research news.