Chemnitz UT: Center for Microtechnologies: Organization

Center for Microtechnologies

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Organization
Staff / Telephone
Job Offers
Equipment and services
Research Topics
Microelectronics
- Low k Dielectrics
- Tungsten, Copper, Diffusion Barriers
- Carbon Nanotubes
- Circuit and System Design
- Integrated Circuits for MEMS
- Photovoltatics
- Terahertz Electronics
- Simulation
MEMS Technologies
- Bulk Micromachining
- High Aspect Ratio Micromachining
- MEMS/NEMS Packaging
- Waferbonding
- MEMS Parameter Identification
- Layer Deposition
- Lithography
MEMS Applications
- Fabry Perot Interferometer
- NIR/MIR Spectrometer
- Temperature Scanner
- Micro mirrors and micro mirror arrays
- Smart Label
- Acceleration sensors
- Inclination sensors
- Vibration Sensors
- Vacuum Sensors
- Ultrasonic Transducers
- RF-MEMS Varactor
- Lab-on-Chip Systems
Research Projects
Projects
- Current Projects
- Finished Projects
Int. Research Training Group: Materials and Concepts for Advanced Interconnects
DFG Research Unit 1713 "Sensoric Micro and Nano Systems"
Cooperation / Networks
Cooperation
Networks / Memberships

Publications
Competences
Annual Reports
Current Publications
Education
Lectures and Training
Student Jobs, Diploma Thesis, ...
ZfM Multimedia Presentation (in German only, requires Flash)
Related
Fraunhofer ENAS
Chair Microtechnology
Smart Systems Campus
Honorary Professorship Opto Electronic Systems
Honorary Professorship Nanoelectronics Technologies
Contact us

	info@zfm.tu-chemnitz.de
	+49 (0) 371 - 531 24060
Fax:	+49 (0) 371 - 531 24069
Chemnitz University of Technology Center for Microtechnologies Reichenhainer Str. 70 09126 Chemnitz Germany

Intern

Organization of the Center for Microtechnologies

Board of Directors

Prof. Thomas Gessner

President

phone +49 (0)371 531 24060
fax +49 (0)371 531 24069
thomas.gessner [at] zfm.tu-chemnitz.de
Prof. Dr. Karla Hiller

Deputy

phone +49 (0)371 531 33276
fax +49 (0)371 531 833276
karla.hiller [at] zfm.tu-chemnitz.de

Prof. Thomas Gessner

Chair Microtechnology

phone +49 (0)371 531 24060
fax +49 (0)371 531 24069
thomas.gessner [at] zfm.tu-chemnitz.de
Prof. J. T. Horstmann

Chair Electronic Devices of Micro and Nano Systems

phone +49 (0)371 531 24440
fax +49 (0)371 531 24449
john-thomas.horstmann [at] etit.tu-chemnitz.de
Prof. Jan Mehner

Chair Microsystems and Precision Engineering

phone +49 (0)371 531 24430
fax +49 (0)371 531 24439
jan.mehner [at] etit.tu-chemnitz.de
Prof. Ulrich Heinkel

Chair Circuit and System Design

phone +49 (0)371 531 24310
fax +49 (0)371 531 24319
ulrich.heinkel [at] etit.tu-chemnitz.de
Prof. Olfa Kanoun

Chair Measurement and Sensor Technology

phone +49 (0)371 531 36931
fax +49 (0)371 531 24529
olfa.kanoun [at] etit.tu-chemnitz.de
Prof. Josef Lutz

Chair Power Electronics and Electromagnetic Compatibility

phone +49 (0)371 531 24220
fax +49 (0)371 531 24229
josef.lutz [at] etit.tu-chemnitz.de
Prof. Bernhard Wunderle

Chair Materials and Reliability of Micro Technical Systems

phone +49 (0)371 531 24450
fax +49 (0)371 531 24459
bernhard.wunderle [at] etit.tu-chemnitz.de

Dr. Andreas Bertz
Deputy: Gunther Schwenzer

Department Lithography

phone +49 (0)371 531 33129
andreas.bertz [at] zfm.tu-chemnitz.de
Dr. Christian Kaufmann
Deputy: Norbert Zichner

Department Layer Deposition

phone +49 (0)371 531 35096
christian.kaufmann [at] zfm.tu-chemnitz.de

Gottfried Höppner

Administration
Norbert Zichner

Technology Advisor
Dr. Reuter Danny

Project Coordination Nanett
Dr. Martina Vogel

Public Relations