Chemnitz UT: Center for Microtechnologies: Organization
Center for Microtechnologies
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Chemnitz UT
Center for Microtechnologies
Organization
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Home
Profile
Organization
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Research Topics
Microelectronics
Low k Dielectrics
Tungsten, Copper, Diffusion Barriers
Carbon Nanotubes
Circuit and System Design
Integrated Circuits for MEMS
Photovoltatics
Terahertz Electronics
Simulation
MEMS Technologies
Bulk Micromachining
High Aspect Ratio Micromachining
MEMS/NEMS Packaging
Waferbonding
MEMS Parameter Identification
Layer Deposition
Lithography
MEMS Applications
Fabry Perot Interferometer
NIR/MIR Spectrometer
Temperature Scanner
Micro mirrors and micro mirror arrays
Smart Label
Acceleration sensors
Inclination sensors
Vibration Sensors
Vacuum Sensors
Ultrasonic Transducers
RF-MEMS Varactor
Lab-on-Chip Systems
Research Projects
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Int. Research Training Group: Materials and Concepts for Advanced Interconnects
DFG Research Unit 1713 "Sensoric Micro and Nano Systems"
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Student Jobs, Diploma Thesis, ...
ZfM Multimedia Presentation (in German only, requires Flash)
Related
Fraunhofer ENAS
Chair Microtechnology
Smart Systems Campus
Honorary Professorship Opto Electronic Systems
Honorary Professorship Nanoelectronics Technologies
Contact us
info@zfm.tu-chemnitz.de
+49 (0) 371 - 531 24060
Fax:
+49 (0) 371 - 531 24069
Chemnitz University of Technology
Center for Microtechnologies
Reichenhainer Str. 70
09126 Chemnitz
Germany
Intern
Organization of the Center for Microtechnologies
Board of Directors
Prof. Thomas Gessner
President
phone +49 (0)371 531 24060
fax +49 (0)371 531 24069
thomas.gessner [at] zfm.tu-chemnitz.de
Prof. Dr. Karla Hiller
Deputy
phone +49 (0)371 531 33276
fax +49 (0)371 531 833276
karla.hiller [at] zfm.tu-chemnitz.de
Prof. Thomas Gessner
Chair Microtechnology
phone +49 (0)371 531 24060
fax +49 (0)371 531 24069
thomas.gessner [at] zfm.tu-chemnitz.de
Prof. J. T. Horstmann
Chair Electronic Devices of Micro and Nano Systems
phone +49 (0)371 531 24440
fax +49 (0)371 531 24449
john-thomas.horstmann [at] etit.tu-chemnitz.de
Prof. Jan Mehner
Chair Microsystems and Precision Engineering
phone +49 (0)371 531 24430
fax +49 (0)371 531 24439
jan.mehner [at] etit.tu-chemnitz.de
Prof. Ulrich Heinkel
Chair Circuit and System Design
phone +49 (0)371 531 24310
fax +49 (0)371 531 24319
ulrich.heinkel [at] etit.tu-chemnitz.de
Prof. Olfa Kanoun
Chair Measurement and Sensor Technology
phone +49 (0)371 531 36931
fax +49 (0)371 531 24529
olfa.kanoun [at] etit.tu-chemnitz.de
Prof. Josef Lutz
Chair Power Electronics and Electromagnetic Compatibility
phone +49 (0)371 531 24220
fax +49 (0)371 531 24229
josef.lutz [at] etit.tu-chemnitz.de
Prof. Bernhard Wunderle
Chair Materials and Reliability of Micro Technical Systems
phone +49 (0)371 531 24450
fax +49 (0)371 531 24459
bernhard.wunderle [at] etit.tu-chemnitz.de
Dr. Andreas Bertz
Deputy:
Gunther Schwenzer
Department Lithography
phone +49 (0)371 531 33129
andreas.bertz [at] zfm.tu-chemnitz.de
Dr. Christian Kaufmann
Deputy:
Norbert Zichner
Department Layer Deposition
phone +49 (0)371 531 35096
christian.kaufmann [at] zfm.tu-chemnitz.de
Gottfried Höppner
Administration
Norbert Zichner
Technology Advisor
Dr. Reuter Danny
Project Coordination Nanett
Dr. Martina Vogel
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