Chemnitz UT: Center for Microtechnologies
Center for Microtechnologies
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Chemnitz UT
Center for Microtechnologies
Institute
Home
Profile
Organization
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Equipment and services
Research Topics
Microelectronics
Low k Dielectrics
Tungsten, Copper, Diffusion Barriers
Carbon Nanotubes
Circuit and System Design
Integrated Circuits for MEMS
Photovoltatics
Terahertz Electronics
Simulation
MEMS Technologies
Bulk Micromachining
High Aspect Ratio Micromachining
MEMS/NEMS Packaging
Waferbonding
MEMS Parameter Identification
Layer Deposition
Lithography
MEMS Applications
Fabry Perot Interferometer
NIR/MIR Spectrometer
Temperature Scanner
Micro mirrors and micro mirror arrays
Smart Label
Acceleration sensors
Inclination sensors
Vibration Sensors
Vacuum Sensors
Ultrasonic Transducers
RF-MEMS Varactor
Lab-on-Chip Systems
Research Projects
Projects
Current Projects
Finished Projects
Int. Research Training Group: Materials and Concepts for Advanced Interconnects
DFG Research Unit 1713 "Sensoric Micro and Nano Systems"
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Cooperation
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Annual Reports
2010
2008
2007
2006
2005
2004
2003
2002
Current Publications
Education
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Student Jobs, Diploma Thesis, ...
ZfM Multimedia Presentation (in German only, requires Flash)
Related
Fraunhofer ENAS
Chair Microtechnology
Smart Systems Campus
Honorary Professorship Opto Electronic Systems
Honorary Professorship Nanoelectronics Technologies
Contact us
info@zfm.tu-chemnitz.de
+49 (0) 371 - 531 24060
Fax:
+49 (0) 371 - 531 24069
Chemnitz University of Technology
Center for Microtechnologies
Reichenhainer Str. 70
09126 Chemnitz
Germany
Intern
Annual Reports of the Center for Microtechnologies
Please click on one of the links below to see an annual report:
Annual Report 2010
Annual Report 2008
Annual Report 2007
Annual Report 2006
Annual Report 2005
Annual Report 2004
Annual Report 2003
Annual Report 2002
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