Chemnitz UT: Center for Microtechnologies

Center for Microtechnologies

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Home
Profile
Organization
Staff / Telephone
Job Offers
Equipment and services
Research Topics
Microelectronics
- Low k Dielectrics
- Tungsten, Copper, Diffusion Barriers
- Carbon Nanotubes
- Circuit and System Design
- Integrated Circuits for MEMS
- Photovoltatics
- Terahertz Electronics
- Simulation
MEMS Technologies
- Bulk Micromachining
- High Aspect Ratio Micromachining
- MEMS/NEMS Packaging
- Waferbonding
- MEMS Parameter Identification
- Layer Deposition
- Lithography
MEMS Applications
- Fabry Perot Interferometer
- NIR/MIR Spectrometer
- Temperature Scanner
- Micro mirrors and micro mirror arrays
- Smart Label
- Acceleration sensors
- Inclination sensors
- Vibration Sensors
- Vacuum Sensors
- Ultrasonic Transducers
- RF-MEMS Varactor
- Lab-on-Chip Systems
Research Projects
Projects
- Current Projects
- Finished Projects
Int. Research Training Group: Materials and Concepts for Advanced Interconnects
DFG Research Unit 1713 "Sensoric Micro and Nano Systems"
Cooperation / Networks
Cooperation
Networks / Memberships

Publications
Competences
Annual Reports
- 2010
- 2008
- 2007
- 2006
- 2005
- 2004
- 2003
- 2002
Current Publications
Education
Lectures and Training
Student Jobs, Diploma Thesis, ...
ZfM Multimedia Presentation (in German only, requires Flash)
Related
Fraunhofer ENAS
Chair Microtechnology
Smart Systems Campus
Honorary Professorship Opto Electronic Systems
Honorary Professorship Nanoelectronics Technologies
Contact us

	info@zfm.tu-chemnitz.de
	+49 (0) 371 - 531 24060
Fax:	+49 (0) 371 - 531 24069
Chemnitz University of Technology Center for Microtechnologies Reichenhainer Str. 70 09126 Chemnitz Germany

Intern

Annual Reports of the Center for Microtechnologies

Please click on one of the links below to see an annual report: