Annual Report 2010

The full PDF Version of the ZfM Annual Report 2010 is available for download (3.9 MB).
Please see the table of contents below:

Table of contents

• Center for Microtechnologies (5)
• Highlights of the last 20 years (6)

• Chair Microtechnology (10)
• Chair Microsystems and Precision Engineering (12)
• Chair Circuit and System Design (14)
• Chair Electronic Devices of Micro and Nano Technique (16)
• Chair Electrical Measurements and Sensor Technology (18)
• Chair Power Electronics and Electromagnetic Compatibility (20)
• Chair Materials and Reliability of Microsystems (22)
• Honorary Professor for Nanoelectronics Technologies (24)
• Honorary Professor for Opto Electronic Systems (26)

• Scientific Reports of Chairs of the Center for Microtechnologies (29)

• Department Lithography/Etch/Mask (60)
• Department Layer Deposition (61)
• Equipment and Service Offers (62)

• Lectures 2010 (64)

• Interdisciplinary Cooperation (66)
• Networks (67)
• DFG Research Unit 1713 "Sensoric Micro and Nano Systems (68)
• Nanett - Nano System Integration Network of Exellence (70)
• International Research Training Group (72)