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Center for Microtechnologies
Modeling and integration of nanotubes
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Modeling and integration of nanotubes

This technological route covers the whole bandwidth from atomistic modeling of carbon nanotubes (CNTs), over process development for deposition and integration of nanotubes, characterization up to the application in sensor systems. Until now nanotubes, especially CNTs, were considered as ideal elements. For application-oriented and technology driven simulations structural defects, contact properties as well as contaminations by subsequent processes have to be taken into account. The requirements on the integration processes will be investigated for the planed applications of nanotubes in microfluidic systems and resonators.


Functionalized single-wall carbon nanotube (SWCNT)
Functionalized single-wall carbon nanotube (SWCNT)

Rolled up nanotubes
Rolled up nanotubes