Within the International Research Training Group,
One (1) PhD position (m/f)
at Chemnitz University of Technology
is available from 1st April 2012 in the subproject
G1 - Advanced processes, materials and their integration into nanoelectronics interconnect systems.
This experimental project focuses on the integration of different processes for atomic layer deposition (ALD) of metals and metal nitrides as well as oxides for applications in ULSI interconnects and magnetic thin film systems.
For these applications, also the integration of the ALD films for the controlled coating of three-dimensional nanostructures like patterned ultralow-k dielectrics or nanomaterials such as carbon nanotubes (CNTs) is of interest. Depending on the materials systems and ALD precursors chosen, the surface chemistry may vary and may need to be altered by in-situ or ex-situ pre-treatments. Therefore, this PhD project will particularly comprise studying surface and gas-phase processes occurring during thermal and plasma-enhanced ALD of metallic and non-metallic thin films by a variety of in-situ and ex-situ methods, such as mass spectrometry, Raman spectroscopy, and X-ray photoelectron spectroscopy (XPS). Ideally, the PhD candidate has already some experience in some of the following fields:
These activities are carried out in close relation to theoretical work in the field of simulation and modeling of ALD processes and equipment. Consequently, a communicative candidate is sought who is willing to interact with the theorists on a regular basis.
For further details concerning the scientific topics please contact Dr. Thomas Waechtler.
We welcome applications of highly qualified graduates with a Diploma, a Master's degree or comparable qualification in Physics, Chemistry, Materials Science, Electrical Engineering or related fields. A strong interest for multidisciplinary research is required. Good knowledge of the English and German languages, both spoken and written, is essential. Successful participation in the study program of the IRTG as well as the participation in the exchange program with the Chinese partner universities is required.
PhD candidates will receive a regular salary for scientific staff according to the tariff EG 13 TV-L. The PhD position is limited until 31st December 2012, subject to extension up to a maximum total duration of 36 months. Within this time, the PhD thesis must be completed.
Please send your documents until 29th February 2012 to:
Dr.-Ing. Thomas Waechtler
Chemnitz University of Technology
Center for Microtechnologies
Reichenhainer Strasse 70
D-09107 Chemnitz
Germany
E-Mail: thomas.waechtler@zfm.tu-chemnitz.de
Chemnitz University of Technology is seeking to increase the fraction of female staff in academia. Qualified women are therefore especially encouraged to apply. Applications of equally qualified handicapped people will be considered preferentially.