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Center for Microtechnologies

Change of management in the Center for Microtechnologies, Department Layer Deposition

Effective July 1st 2014, Dr. Sven Zimmermann assumed the role of the head of department “Layer Deposition” at the Center for Microtechnologies of the faculty of Electrical Engineering and Information Technology of the Technische Universität Chemnitz.


The Mittweida-born Dr. Zimmermann is a so-called “University of Chemnitz-grown” talent and thus closely linked to the city of Chemnitz and the Chemnitz region. Dr. Zimmermann can look back on a twelve-years-lasting scientific activity in the field of metallization and interconnectsystems for microelectronics. During that time he worked on layer deposition by physical vapor deposition as well as plasma etching processes for metal layers and dielectrics. Now he focuses on new topics and challenges.

The deposition of thin films is a basis of many news applications and technologies which are developed on the Center for Microtechnologies. The number of available materials has instantly increased during the last years. The department Layer Deposition, headed by Dr. Zimmermann, must pay particular attention to this fact and will develop new methods for layer deposition as well as completely new material concepts.

The focus is on aluminum nitride, a material which has strong industry relevance for being a CMOS-compatible piezoelectric material. In addition, the supervision of the daily business of the Center for Microtechnologies and the support of established technologies are also in the field of Dr. Zimmermann´s responsibility.

It is very important to Dr. Zimmermann to continue and intensify research within the department layer deposition on a high level in order to be able to react to current trends in the field of MEMS- and NEMS more quickly, also in close cooperation with national and international partners. In his opinion, research at the Center for Microtechnologies is an important basis for high-quality training of students in the field of micro- and nanotechnologies.

Personal details:

After the successful completion of his studies in microsystems technology at the University of Applied Sciences in Mittweida in 1998, Sven Zimmermann did a postgraduate course in Microelectronics at the faculty of Electrical Engineering and Information Technology of the Technische Universität Chemnitz from October 1999 to January 2002. This was followed by a scientific activity at the Center for Microtechnologies, where he worked on projects with AMD Dresden (now GLOBALFOUNDRIES) and ATMEL Heilbronn. In October 2007 he obtained the doctor´s degree at Technische Universität Chemnitz. After that he worked as a scientist at the Chemnitz-branch of the Fraunhofer Institute for Reliability and Microintegration. With Fraunhofer ENAS becoming a separate institute, his deployment was transferred to Fraunhofer ENAS.

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