Autumn School
The first Autumn School of the International Research Training Group "Materials and Concepts for Advanced Interconnects"
will be held from 20 to 24 November 2006 at Chemnitz University of Technology, bringing together professors, senior
scientists and PhD students of the Chinese and German partner institutions. During the Autumn School, both Chinese
and German PhD students of the IRTG are going to give topical presentations about their work. Invited talks by renowned international
scientists complete the sessions. In addition, a visit to the labs of Fraunhofer IZM Berlin and social activities both
in Chemnitz and Berlin are planned.
Program of the Autumn School
Monday, 20 November 2006
Talks will be given in room N113,
Central Lecture Building of Chemnitz University of Technology, Reichenhainer Strasse 70.
A management meeting of the IRTG will be held prior to the technical sessions from 09:00 to 10:00 h on Monday, 20 November.
| Time | Speaker | Title |
| 10:15-10:30 | Prof. Dr. Thomas GESSNER TU Chemnitz, German Coodinator of the IRTG |
Welcoming address and official opening of the Autumn School |
| 10:30-10:50 | Ms. Ines EIDNER TU Berlin, Project G4 |
Development of an elastic bump structure for wafer level packaging |
| 10:50-11:10 | Mr. Xiangmeng JING Shanghai Jiaotong University |
Thick photoresist fabrication technique for complex microstructures |
| 11:10-11:30 | Mr. Sascha HERMANN TU Chemnitz, Project G1 |
Specific growth of carbon nanotubes for integrated circuit interconnect applications |
| 11:30-11:50 | Ms. Ping LIU Shanghai Jiaotong University |
Carbon nanotube interconnections |
| Lunch |
||
| 13:00-14:00 | Dr. Albrecht LEONHARDT Leibniz Institute for Solid State and Materials Research, Dresden, Germany |
Invited Talk Synthesis, properties and applications of carbon nanotubes |
| 14:10-15:10 | Prof. Dr. Margit ZACHARIAS Univ. Paderborn, Germany |
Invited Talk Nanowires - from self organisation to controlled growth |
| 15:20-16:20 | Mr. Naoufal BAHLAWANE, Prof. Dr. Katharina KOHSE-HÖINGHAUS Univ. Bielefeld, Germany |
Invited Talk Silver CVD - precursor analysis and deposition strategies |
| Break |
||
| 16:40-17:00 | Mrs. Nina ROTH TU Chemnitz, Project G5 |
Transition metal complexes as precursors for CVD, Spin-On and ALD processes |
| 17:00-17:20 | Mr. Uwe SIEGERT TU Chemnitz, Project G5 |
Metal formiates and carboxylates as precursors for CVD, Spin-On and ALD processes |
| 17:20-17:40 | Ms. Nicole AHNER TU Chemnitz, Project G1 |
Development and methods for cleaning of sub-100 nm structures |
Tuesday, 21 November 2006
Talks will be given in room N113, Central Lecture Building of Chemnitz University of Technology, Reichenhainer Strasse 90:
| Time | Speaker | Title |
| 09:00-09:20 | Mr. Nuno SANTOS TU Chemnitz, Project G1 |
Patterning of porous ultra low-k materials for 45 nm technology |
| 09:20-09:40 | Mr. Jinyi WANG Fudan University |
Patterned metal deposition based on self-assembly and inkjet printing |
| 09:40-10:00 | Mr. Thomas WAECHTLER TU Chemnitz, Project G1 |
Towards atomic layer deposition of copper thin films |
| 10:00-10:20 | Mr. Wei CHEN Fudan University |
Atomic layer deposition of high-k gate dielectrics and growth of ruthenium nanocrystals for nonvolatile memory |
| Break |
||
| 10:40-11:00 | Mr. Sukumar RUDRA TU Chemnitz, Project G7 |
Optical spectroscopy of ultra thin films |
| 11:00-11:20 | Mr. Zhigang ZENG Fudan University |
Micro characterization on oxidation of copper thin films |
| 11:20-11:40 | Ms. Zhaoxiang ZONG Fudan University |
Theoretical study of electrical properties of Cu interconnect |
| 11:40-12:00 | Mr. Teodor TOADER TU Chemnitz, Project G7 |
Electron spectroscopy studies of advanced interconnects |
| Lunch |
||
| 13:00-13:20 | Mr. Benjamin GRAFFEL TU Chemnitz, Project G8 |
SEM investigations of semiconductor-metal interfaces |
| 13:20-13:40 | Ms. Anastasia MOSKVINOVA TU Chemnitz, Project G8 |
Structural and morphological characterization of nanoscaled interconnect systems by means of TEM and SEM |
| Break |
||
| 13:50-14:50 | Mr. Knut SCHULZE TU Chemnitz, Center for Microtechnologies |
Invited Talk Air gap structures for nanoelectronic interconnect systems |
| 15:00-16:00 | Dr. Mikhail BAKLANOV IMEC, Leuven, Belgium |
Invited Talk Characterization of porous low-k materials |
| 16:10-17:10 | Dr. Lucile ARNAUD CEA-Leti, Grenoble, France |
Invited Talk Reliability characterization of Cu and low-k interconnects |
| Evening |
Dinner |
Wednesday, 22 November 2006
| Time | Event |
| 10:30-12:00 | Museum of Industry, Chemnitz guided tour |
| 12:30 | Lunch Restaurant "Ratskeller" |
| 14:45-15:45 | Guided City Tour meeting point: Roter Turm |
Thursday, 23 November 2006
| Time | Event |
| 09:00 | Introduction to the history of Fudan University, Shanghai Jiaotong University, and Chemnitz University of Technology |
| 11:00 | Visit of laboratories of the Institutes of Physics and Chemistry, Visit of clean room labs of the Center for Microtechnologies |
Friday, 24 November 2006
| Time | Event |
| 06:34 | Departure to Berlin by train from Chemnitz Hauptbahnhof |
| 10:00 | IZM Berlin Talks about current activities Visit of IZM labs |
| 15:00 | Berlin sightseeing tour |
| 17:53 or 18:52 | Return to Chemnitz by train |
Notice: The schedule on Thursday, 23 November and Friday, 24 November is subject to changes.
