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Center for Microtechnologies
Research topics

Research Topics

The ZfM carries out basic research, practical joint projects and direct research & development orders for the industry in the following fields:

  • Basic technologies and components for microsystems and nanosystems (sensors, actuators, arrays)
  • Design of components and systems
  • Micro and nano electronics (back-end of line, reliability)
  • Nanotechnologies, nanocomponents and ultrathin functional layers

ZfM has about 1000m2 of cleanrooms with equipment for mask and wafer processes. An e-beam lithography with minimum feature sizes lower than 0.1 μm is available. The new cleanroom (class 10 / ISO 4) has been built within the building of the Institute of Physics. It was completed in 2007. The old cleanroom facilities have been reconstructed in 2001/02 with funding by the Free State of Saxony provide a modern environment for research and development. Wafers with a diameter of 100mm, 150 mm and 200 mm can be processed.

Press Articles

  • New Appointments to the University

    Two professors appointed to Chemnitz University of Technology by the President on May 15, 2021 …

  • Construction Begins for New Campus Sports Hall

    New laboratory and gymnasium complex to be built in the next three years - study and research conditions to improve significantly …

  • Foundations Laid for Ultrafast Magnetic Memory

    International research team with participants from Chemnitz University of Technology observes ultra-fast motion in ferromagnetic thin film systems for the first time - Publication in Nature Physics …

  • The End of the United Kingdom?

    On May 6, 2021, Scotland will elect a new parliament - Prof. Dr. Klaus Stolz, Professorship of British and American Cultural/Social Studies at Chemnitz University of Technology, looks at the upcoming parliamentary election in Scotland and its possible consequences. …

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