Carbon nanotubes for interconnect and sensor applications
Since the discovery of carbon nanotubes (CNT) in the year 1991 big efforts have been made to profit of their outstanding structural, electronic and mechanical properties in various applications. For electronic applications the capability of carrying extreme current densities, the insensitivity to electromigration and the excellent thermal conductance protrude. This makes CNTs an ideal candidate as a via-material in future interconnect systems of IC devices, which is our major interest.
Beyond that we are working together with research groups at TU Chemnitz on the implementation of CNTs as basic elements in NEMS and as sensors with high sensitivity and selectivity. The aim of our work on CNTs for interconnects is to achieve selective growth of high quality and dense CNT films at temperatures lower than 450degC. Furthermore, good electrical contacts at the CNT-metal interface and the alignment of MWNTs as well as SWNTs are essential for our purposes.
More information (PDFs)
- Carbon Nanotubes for Interconnect and Sensor Applications
- Excellence Cluster "Center for Advancing Electronics Dresden"
Prof. Dr. Stefan E. Schulz