Chemnitz UT: Center for Microtechnologies: Staff / Telephone

Center for Microtechnologies

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Microelectronics
- Low k Dielectrics
- Tungsten, Copper, Diffusion Barriers
- Carbon Nanotubes
- Circuit and System Design
- Integrated Circuits for MEMS
- Photovoltatics
- Terahertz Electronics
- Simulation
MEMS Technologies
- Bulk Micromachining
- High Aspect Ratio Micromachining
- MEMS/NEMS Packaging
- Waferbonding
- MEMS Parameter Identification
- Layer Deposition
- Lithography
MEMS Applications
- Fabry Perot Interferometer
- NIR/MIR Spectrometer
- Temperature Scanner
- Micro mirrors and micro mirror arrays
- Smart Label
- Acceleration sensors
- Inclination sensors
- Vibration Sensors
- Vacuum Sensors
- Ultrasonic Transducers
- RF-MEMS Varactor
- Lab-on-Chip Systems
Research Projects
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- Current Projects
- Finished Projects
Int. Research Training Group: Materials and Concepts for Advanced Interconnects
DFG Research Unit 1713 "Sensoric Micro and Nano Systems"
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Student Jobs, Diploma Thesis, ...
ZfM Multimedia Presentation (in German only, requires Flash)
Related
Fraunhofer ENAS
Chair Microtechnology
Smart Systems Campus
Contact us

	info@zfm.tu-chemnitz.de
	+49 (0) 371 - 531 24060
Fax:	+49 (0) 371 - 531 24069
Chemnitz University of Technology Center for Microtechnologies Reichenhainer Str. 70 09126 Chemnitz Germany

Intern

Staff

Prof. Dr. Thomas Gessner

President - Center for Microtechnologies

phone: +49 (0)371 531-33130

email: thomas.gessner [at] zfm.tu-chemnitz.de

Prof. Dr. Karla Hiller

Deputy

phone: +49 (0)371 531-33276

email: karla.hiller [at] zfm.tu-chemnitz.de
Mrs. Sylvia Langos

Secretary office

phone: +49 (0)371 531-38038

email: sylvia.langos [at] zfm.tu-chemnitz.de

Department Lithography

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Dr. Bertz Department Manager	Andreas	33129	andreas.bertz@zfm
Schwenzer Deputy	Gunther	33682	gunther.schwenzer@zfm
Ahner	Nicole	35020	nicole.ahner@zfm
Bankwitz	Jörn	37718	joern.bankwitz@zfm
Bruder	Mandy	37746	mandy.bruder@zfm
Dr. Erben	Jens-Wolfram	35048	jens-wolfram.erben@zfm
Grunert	Jürgen	35094	juergen.grunert@zfm
Hempel	Ingrid	35082	ingrid.hempel@zfm
Klimmt	Ingo	33640	ingo.klimmt@zfm
Küchler	Matthias	35836	matthias.kuechler@zfm
Nowack	Markus	36462	markus.nowack@zfm
Dr. Reuter	Danny	35041	danny.reuter@zfm
Streiter	Isa	35084	isa.streiter@zfm
Werner	Thomas	35515	thomas.werner@zfm

Department Layer Deposition

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Dr. Kaufmann Department Manager	Christian	35096	christian.kaufmann@zfm
Zichner Deputy	Norbert	33650	norbert.zichner@zfm
Bonitz	Jens	33608	jens.bonitz@zfm
Groth	Birgit	33683	birgit.groth@zfm
Hahn	Ramon	35160	ramon.hahn@zfm
Höbelt	Iris	33670	iris.hoebelt@zfm
Kowol	Cornelia	33202	cornelia.kowol@zfm
Müller	Reinhard	35154	reinhard.mueller@zfm
Plänitz	Matthias	33651	matthias.plaenitz@zfm
Reich	Rene	35834	rene.reich@zfm
Rennau	Michael	35810	michael.rennau@zfm
Schwarz	Patrick	35142	patrick.schwarz@zfm
Seifert	Mario	35185	mario.seifert@zfm

MEMS/NEMS

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Prof. Dr. Hiller Group Leader	Karla	33276	karla.hiller@zfm
Enderlein	Tom	38223	tom.enderlein@zfm
Gebauer	Christian	39545	christian.gebauer@zfm
Gratias	André	38996	-
Dr. Jia	Chenping	35087	chenping.jia@zfm
Morschhauser	Andreas	36482	andreas.morschhauser@zfm
Möbius	Martin	39461	martin.moebius@zfm
Nestler	Jörg	35642	joerg.nestler@zfm
Richter	Knut	37999	knut.richter@zfm
Streit	Petra	37962	petra.streit@zfm
Schulze	Robert	38675	robert.schulze@zfm
Uhlig	Sven	35518	sven.uhlig@zfm
Voigt	Sven	37254	sven.voigt@zfm
Wen	Quan	37751	quan.wen@etit
Wünsch	Dirk	37283	dirk.wuensch@zfm

Project Coordination Nanett

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Dr. Reuter	Danny	35041	danny.reuter@zfm
Schindler	Romy	38375	romy.schindler@zfm

DFG-Research Unit 1713

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Wagner	Christian	38699	-
Haas	Sven	39626	sven.haas@zfm

IRTG

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Belsky	Petr	36827	petr.belsky@zfm
Fiedler	Holger	38572	holger.fiedler@zfm
Fischer	Tobias	38226	tobias.fischer@zfm
Hahn	Susann	37988	susann.hahn@zfm
Hartwig	Ines	37217	ines.hartwig@zfm
Dr. Hermann	Sascha	35675	sascha.hermann@zfm
Hofmann	Lutz	36548	lutz.hofmann@zfm
Loschek	Sergei	38487	-
Mohammadzadeh	Saeideh	36816	saeideh.mohammadzadeh@zfm
Markert	Matthias	38626	matthias.markert@zfm
Martinka	Ronny	38182	ronny.martinka@zfm
Müller	Steve	38571	steve.mueller@zfm
Dr. Schulze	Knut	35635	knut.schulze@zfm
Streit	Petra	37962	petra.streit@zfm
Zienert	Andreas	37937	-

Education

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Dr. Streiter	Reinhard	35842	reinhard.streiter@zfm
Dr. Raschke	Thomas	33080	thomas.raschke@zfm

Public Relations

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Dr. Vogel	Martina	36458	martina.vogel@zfm
Messig-Wetzel	Andrea	37238	andrea.messig@etit

Administration

Surname	First Name	Phone +49 (0)371 531-...	eMail ... .tu-chemnitz.de
Hommel	Jörg	35089	joerg.hommel@zfm
Höppner	Gottfried	33132	gottfried.hoeppner@zfm
Krumbiegel	Frank	33674	frank.krumbiegel@zfm
Salokat	Jörg	35171	joerg.salokat@zfm
Träber	Katrin	35841	katrin.traeber@zfm

See also

Staff of the Fraunhofer ENAS, Dept. Multi Device Integration (MDI)
Staff of the Fraunhofer ENAS, Dept. Micro Materials Center Chemnitz (MMCC)
Staff of the Fraunhofer ENAS, Dept. Printed Functionalities (PF)
Staff of the Fraunhofer ENAS, Dept. Back End of Line (BEOL)
Staff of the Fraunhofer ENAS, Dept. System Packaging (SP)
Staff of the Fraunhofer ENAS, Dept. Advanced Systems Engineering (ASE)