Annual Report 2006

The full PDF Version of the ZfM Annual Report 2006 is available for download (22MB!).
Please see the table of contents below:

Table of contents

1. Preface, Systems Research Park Chemnitz and International Research Training Group
2. Organization
3. Memberships & connected institutes: Fraunhofer Institute, Nanotechnology Center of Excellence
4. Research activities
5. • Current research projects
   • Collaborative Research Center No. 379 (Sonderforschungsbereich) "Arrays of micromechanical sensors and actuators"
     • Design of micromechanical components: Development of accelerometer arrays for drift compensation
     • Overview of an inertial navigation system based on acceleration sensor arrays
     • Adaptive resonant low frequency vibration detection based on a micromachined force coupled sensor-actuator system
     • Experimental characterization, model adaption - reliability: Characterization technique for quality control of MEMS
     • Development of a spectral imaging technology based on microactuators with a diffraction grating
     • A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers
     • Resonator arrays with adjustable stiffness and investigations of low temperature bonded wafers
   • Special reports
     • Evaluation of the gap-fill properties of dense low-k and porous ultralow-k spin-on dielectrics
     • Thermal stability of spin-on MSQ low-k and ultralow-k dielectrics
     • Evaluation of air gap structures produced by wet etch of sacrificial dielectrics: Extraction of keff for different technology nodes and film permittivity
     • Towards atomic layer deposition processes for copper thin films
     • Impact of dielectric material and metal arrangement on thermal behaviour of interconnect systems
     • Characterization and modeling of dielectric isolation structures in a high-voltage semiconductor technology
     • Reliability of amorphous hydrogenated carbon films (a-C:H) in microelectronic applications
     • •First-principles calculations of the band gap of HfxSi1-xO2 and ZrxSi1-xO2 alloys
     • The effect of nitrogen doping on the tunneling effective mass of electrons in ultrathin SiO2 gate insulator
     • The application of Higher Order Derivatives Method for parametric component-level simulations of MEMS
     • Near infrared MOEMS spectrometer
     • Microcoils for NMR spectroscopy of biological sample material
     • A MEMS friction vacuum gauge
     • Active smart RF-ID label for transportation monitoring
     • Laser frequency trimming of micro mirror devices
     • MEMS scanners for raster scanning laser projection
     • X-ray collimators of microstructured silicon
     • Microfluidic bubble actuators based on hydrogels
     • A new technology platform for fully integrated polymer based micro optical fluidic systems
6. Cooperations with industry and universities
7. Equipment and service offer
8. Education
   
   • Lectures
   • Student exchange programmes
   • Project reports / Diploma theses / PhD
9. Colloquia / Workshops at the Institute
10. Scientific publications
11. Guests and international relations