Annual Report 2011/12

The full PDF Version of the ZfM Annual Report 2011/12 is available for download (3.3 MB).
Please see the table of contents below:

Table of contents

• Center for Microtechnologies (5)
• Chair Microtechnology (6)
• Chair Microsystems and Precision Engineering (8)
• Chair Circuit and System Design (10)
• Chair Electronic Devices of Micro and Nano Technique (12)
• Chair Electrical Measurment and Sensor Technology (14)
• Chair Power Electronics and Electromagnetic Compatibility (16)
• Chair Materials and Reliability of Microsystems (18)
• Honorary Professor for Nanoelectronics Technologies (20)
• Honorary Professor for Opto Electronic Systems (22)


• Selected Scientific Reports of Chairs of the Center for Microtechnologies (25)


• Department Lithography/Etch/Mask (38)


• Department Layer Deposition (39)


• Equipment and Service Offers (40)


• Lectures 2011/12 (42)


• Cooperations (44)
• Smart Systems Campus Chemnitz (44)
• DFG Research Unit 1713 “Sensoric Micro and Nano Systems“ (46)
• Nanett – Nano System Integration Network of Exellence (48)
• International Research Training Group (50)
• Networks (52)