Annual Report 2013/14
The full PDF Version of the ZfM Annual Report 2013/14 is available for download (3.3 MB).
Please see the table of contents below:
Table of contents
- Preface (2)
- Center for Microtechnologies (3)
- Profile (4)
- Professorship of Microtechnology (6)
- Professorship of Microsystems and Biomedical Engineering (8)
- Professorship Circuit and System Design (10)
- Professorship of Electronical Devices of Micro and Nano Technique (12)
- Professorship of Electrical Measurement and Sensor Technology (14)
- Professorship of Power Electronics and Electromagnetic Compatibility (16)
- Professorship of Materials and Reliability of Microsystems (18)
- Honorary Professor of Nanoelectronic Technologies (20)
- Honorary Professor of Optoelectronic Systems (22)
- Department Lithography / Etch / Mask (24)
- Department Layer Deposition (25)
- Selected Scientific Reports (27)
- In-situ growth monitoring of ultra-thin films of Cu2O and Cu deposited by atomic layer deposition (28)
- Alternative integration of low k-materials (30)
- Influence of contamination on the hysteresis in carbon nanotube based field effect transistors (32)
- Electron Transport in Metallic Carbon Nanotubes with Metal Contacts (34)
- An intravesical measurement system for catheterless long-term urodynamics (36)
- New technology approach for tunable IR filters (38)
- Aluminium nitride integration for piezoelectric MEMS/NEMS (40)
- Improvement of BDRIE technology for high precision MEMS (42)
- Combining 2.4 GHz beacon enabled network and ultra low-power wake-up receiver protocol (44)
- Simulation of press-pack IGBTs under power cycling conditions (48)
- Selected Scientific Events (53)
- Cooperations (59)
- nanett – Nano System Integration Network of Excellence (64)
