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Center for Microtechnologies
Ultrasonic transducers

Ultrasonic transducers

Ultrasonic transducers

Silicon-based ultrasonic transducers possess excellent impedance matching properties to liquid media. In such environments, they emit and detect ultrasound more efficiently then other functional principles. Micromachining can provide large transducer arrays with accurate dimension control and reliable interconnects. With these advantages new imaging modes and precision scanning instruments could be realized. The ultrasonic transducers are electrostatically driven and can be used even as arrays. They are suitable for both in-air and underwater applications, provide a high energy transform efficiency and are cheap, robust and reliable.

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Dr. Maik Wiemer
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