MEMS inclination sensors
The sensor element of the inclination sensors / low-g acceleration sensors is based on high aspect ration micro structures, processed by air gap insulated micro structure (AIM) technology. The sensor is zero level packaged by glass fritt bonding of a silicon cap wafer to ensure hermetic sealing of the sensor cavity. A hybrid integration of ASIC, processing sensor signals, enables flexibility by selection of the IC.
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Contact
Dr. Danny Reuter
E-Mail:
danny.reuter@…
