MEMS friction vacuum gauge
The functional principle of the sensors is based on the pressure dependent damping of an oscillating plate in rarefied air. The sensor consists of an oscillating plate which is fixed in the chipframe by two opposite torsional springs and two electrodes below the oscillator, parallel to its rotation axis. By applying a voltage between the oscillating electrodes, the oscillator tilts. The deflection of the plate is measured via a capacitive carrier frequency measurement bridge. After switching off the voltage, the decay constant is measured. The pressure is derived from it by means of a calibration function.
Contact
Dr. Steffen Kurth
E-Mail:
steffen.kurth@…
