MEMS parameter identification

MEMS parameter identification is a test procedure providing fast, contactless and non-destructive determination of structural and material parameters of micromechanical mass-spring-damper systems. It is particularly suitable for wafer-level testing of large quantities, process and quality controlling applications. The method is based on an inverse identification algorithm using measured frequency response function (FRF) data and FEM analysis results.

Robust probe cards for electrostatic excitation of the structures are available. The fringing electrostatic field is generated by transparent indium tin oxide electrodes. The probe cards include precise optical or mechanical electrode to wafer distance measurement. A Laser Doppler Vibrometer determines the FRF optically. The test procedure is implemented in an easy to use software application suitable for manual or automatic testing of MEMS.