Silicon nano sensors
Based on state of the art MEMS technologies nano structures will be integrated in microsystems for utilizing nano effects in transducers. The use of nano structures as transducer elements needs new pathways for interconnecting the signal processing with the sensor element, since signal to noise ratios are getting smaller. Furthermore, new concepts for the design and the packaging of nano systems have to be developed. Especially for heterogeneous systems technological flexibility and minimizing interactions between different components are essential.
Direct integration of NEMS (nano electro mechanical system)
Micro tension experiment