Annual Report 2003
You can either download the full PDF Version of the ZfM Annual Report 2003 (16MB!), or select the chapter you are interested in below:
- Preface
- Organization
- Memberships & connected institutes: Fraunhofer Institute, Nanotechnology Center of Excellence
- Research activities
- 4.1. Current research projects
- 4.2. Collaborative Research Center No. 379 (Sonderforschungsbereich)
"Arrays of micromechanical sensors and actuators"
- A1: Design of micromechanical components
- A2: Analysis and simulation MEMS in VHDL-AMS based on reduced order FE-models
- A4: Multiple band sensor arrays for vibration monitoring based on near-surface silicon bulk micromechanics
- A6: Investigation of a micro-electromechanical bandpass filter based on a tongue array
- B2: Experimental characterization, modell adaption and reliability
- B6: Force-Sensor Arrays
- C4: Microelectronic compatible scanner arrays of high frequency
- C5: Development and characterisation of a high aspect ratio vertical FET sensor for motion detection
- 4.3. Special reports
- Development and characterization of ultrathin CVD WNx diffusion barriers for Copper metallization
- Integration of SiO2 aerogel as ultra low k dielectric (ULK) into Copper
Damascene Interconnects for RF devices - Electronic compensation of fabrication tolerances demonstrated for a novel micromachined gyroscope
- Design of complex sensor-actuator-systems
- Gratings on MEMS
- Tunable Infrared Filter based on a Fabry-Perot-Interferometer
- Bonding and contacting of MEMS-structures on wafer level
- Device characterization for high-voltage circuits
- RIE-textured silicon solar cells with screen printed metallization
- Integrated optical waveguide amplifier
- Silicon gratings with different profiles: trapezoidal, triangular, rectangular, arched
- First-principle density-functional theory simulations for MOSFET devices
- Application of molecular dynamics to the simulation of deposition
- Cooperations with industry and universities
- Equipment and service offer
- Education
- 7.1. Lectures
- 7.2. Student exchange programmes
- 7.3. Project reports / Diploma theses / PhD
- Colloquia / Workshops at the Institute
- Publications
- Guests and special international relations
