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International Research Training Group
Publications

Scientific Publications by Members of the IRTG

2015

S.S.P.K. Arekapudi, D. Mitin, M. Albrecht, "Role of antiferromagnetic spin configuration in dual exchange biased structure in [Pt/Co]6/CoO/[Co/Pd]8 system", Talk, DPG Frühjahrstagung 2015, Berlin (Germany), 15-20 March 2015

V. Bellido-Gonzalez, A. Azzopardi, H. Li, J. Brindley, A. Vetushka, F.Papa, I. Fernandez, A. Wennberg, K. Kroehnert, O. Ehrmann, K-D. Lang, P. Mackowiak, H. D. Ngo, "HIPIMS in Full Face Erosion Circular Cathode for Semiconductor Applications", Poster (accepted), IEEE 17th Electronics Packaging Technology Conference, Singapore, 2-4 December 2015

M.V. Daniel, C. Brombacher, G. Beddies, N. Jöhrmann, M. Hietschold, D.C. Johnson, Z. Aabdin, N. Peranio, O. Eibl, M. Albrecht, "Structural properties of thermoelectric CoSb3 skutterudite thin films prepared by molecular beam deposition", J. Alloys Comp. 624, pp 216-225 (2015), DOI: 10.1016/j.jallcom.2014.11.057

M.V. Daniel, L. Hammerschmidt, C. Schmidt, F. Timmermann, J. Franke, N. Jöhrmann, M. Hietschold, D.C. Johnson, B. Paulus, M. Albrecht, "Structural and thermoelectric properties of FeSb3 skutterudite thin films", Phys. Rev. B 91, pp 085410 (2015), DOI: 10.1103/PhysRevB.91.085410

X. Hu, J. Schuster, S.E. Schulz, T. Gessner, "Simulation of ALD chemistry of (nBu3P)2Cu(acac) and Cu(acac)2 precursors on Ta(110) surface", Microelectron. Eng. 137 (2), pp 23-31 (2015), DOI: 10.1016/j.mee.2015.02.017

S.M. Jafarpour, M. Kini, S. Hermann, S.E. Schulz, "Towards type-selective SWCNTs growth: Comparative study on characterization techniques for an effective CVD process development", Poster, The 16th International Conference on the Science and Application of Nanotubes (NT15), Nagoya (Japan), 29 June - 3 July 2015

N. Jöhrmann, M. Hietschold, "Monte Carlo simulations for Transmission Kikuchi Diffraction", Talk, DPG Frühjahrstagung 2015, Berlin (Germany), 15-20 March 2015

M. Kaspar, T. Waechtler, R. Ecke, C. Georgi, S.E. Schulz, H. Lang, T. Gessner, "A Novel Dicobaltatetrahedrane Precursor Studied for the MOCVD of Cobalt Metal Layers", Poster, International Interconnect Technology Conference / Materials for Advanced Metallization Conference, Grenoble (France), 18-21 May 2015

G.L. Katona, N.Y. Safonova, F. Ganss, D. Mitin, I.A. Vladymyrskyi, S.I. Sidorenko, Iu.N. Makogon, G. Beddies, M. Albrecht and D.L. Beke, "Diffusion and solid state reactions in Fe/Ag/Pt and FePt/Ag thin-film systems", J. Phys. D: Appl. Phys. 48 (17), pp 175001 (2015), DOI: 10.1088/0022-3727/48/17/175001

X. Liu, J. Zhang, W. Si, L. Xi, B. Eichler, C. Yan, O.G. Schmidt, "Sandwich nanoarchitecture of Si/reduced graphene oxide bilayer nanomembranes for Li-ion batteries with long cycle life", ACS Nano 9 (5), pp 1198-1205 (2015), DOI: 10.1021/nn5048052

X. Liu, J. Zhang, W. Si, S. Oswald, C. Yan, O.G. Schmidt, "High-rate amorphous SnO2 nanomembrane anodes for Li-ion batteries with a long cycling life", Nanoscale 7, pp 282-288 (2015), DOI: 10.1039/C4NR04903A

X. Lu, J. Deng, W. Si, X. Sun, X. Liu, B. Liu, O.G. Schmidt, "High-Performance Li-O2 Batteries with Trilayered Pd/MnOx/Pd Nanomembranes", Advanced Science 2015 (5), pp 1500113 (2015), DOI: 10.1002/advs.201500113

P. Mackowiak, F. Meinecke, B. Mukhopadhyay, T.H. Hoang, Q.-C. Dao, O. Ehrmann, K.-D. Lang, H.-D. Ngo, "Investigation of DRIE etching performance on signal quality of a SOI based pressure sensors for harsh environments", Talk, IEEE Sensors 2015, Nürnberg (Germany), 1-4 November 2015

P. Matthes, S.S.P.K. Arekapudi, F. Timmermann, M. Albrecht, "Magnetotransport Properties of Perpendicular [Co/Pt]/Cu/[Co/Pt] Pseudo-Spin-Valves", IEEE Trans. Magn. 51, pp 4400104 (2015), DOI: 10.1109/TMAG.2014.2359871

M. Monecke, P. Richter, P. Robaschik, S. Banerjee, G. Salvan, D.R.T. Zahn, "Annealing Effects on Sputtered La0.66Sr0.34MnO3 Thin Films on Silicon", Talk, DPG Frühjahrstagung 2015, Berlin (Germany), 15-20 March 2015

D. Solonenko, P. Vogt, O.D. Gordan, D.R.T. Zahn, "In Situ Raman Investigation of Silence", Poster, DPG Frühjahrstagung 2015, Berlin (Germany), 15-20 March 2015

X. Sun, W. Si, L. Xi, B. Liu, X. Liu, C. Yan, O.G. Schmidt, "In Situ-Formed, Amorphous, Oxygen-Enabled Germanium Anode with Robust Cycle Life for Reversible Lithium Storage", ChemElectroChem 2 (5), pp 737-742 (2015), DOI: 10.1002/celc.201402404

M. Woehrmann, M. Toepper, H. Walter, K.-D. Lang, "Next Generation Thin Film Polymers for WLP Applications and their Mechanical Characterization", Talk, IMAPS 11th International Conference on Device Packaging, Scottsdale (AZ, USA), 17-19 March 2015

A. Zienert, J. Schuster, T. Gessner, "Electronic Transport in Metallic Carbon Nanotubes with Metal Contacts", Talk, AIMR International Symposium 2015 (AMIS2015), Sendai (Japan), 16-19 February 2015

 

2014

A. Chkanov, A. Khadiev, N. Jöhrmann, D. Pashin, M. Hietschold, "Transmission Kikuchi Diffraction and Selected Area Electron Diffraction studies of WS2 nanotubes", Poster, DPG Frühjahrstagung, Dresden (Germany), 30 March - 4 April 2014

D. Dhakal, T. Waechtler, R. Mothes, S.E. Schulz, H. Lang, T. Gessner, "In-situ XPS investigation of the surface chemistry of a Cu(I) beta-diketonate precursor and the ALD of Cu2O", Poster, Materials for Advanced Metallization Conference (MAM 2014) , Chemnitz (Germany), 2-5 March 2014

D. Dhakal, T. Waechtler, S.E. Schulz, T. Gessner, H. Lang, R. Mothes, A. Tuchscherer, "Surface chemistry of a Cu(I) beta-diketonate precursor and the atomic layer deposition of Cu2O on SiO2 studied by x-ray photoelectron spectroscopy", J. Vac. Sci. Technol. A 32 (4), pp 041505 (2014), DOI: 10.1116/1.4878815

D. Dhakal, T. Waechtler, S.E. Schulz, S. Moeckel, H. Lang, T. Gessner, "In-situ growth monitoring of ultrathin films of ALD Cu2O and Cu after successive reduction", Talk, 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai (China), 16-17 October 2014

D. Dhakal, T. Waechtler, S.E. Schulz, R. Mothes, S. Moeckel, H. Lang, T. Gessner, "In-situ XPS Investigation of ALD Cu2O and Cu Thin Films after Successive Reduction", Talk, 14th International Conference on Atomic Layer Deposition (ALD 2014), Kyoto (Japan), 15-18 June 2014

N. Du, N. Manjunath, Y. Shuai, D. Bürger, I. Skorupa, R. Schüffny, C. Mayr, D.N. Basov, M. Di Ventra, O.G. Schmidt, H. Schmidt, "Novel implementation of memristive systems for data encryption and obfuscation", J. Appl. Phys. 115 (12), pp 124501 (2014), DOI: 10.1063/1.4869262

S. Döring, S. Schmidt, D. Reifert, M. Feltz, M. Monecke, N. Hasan, V. Tympel, F. Schmidl, J. Engelmann, F. Kurth, K. Iida, I. Mönch, B. Holzapfel, P. Seidel, "Hybrid Josephson Junctions with Iron-based and Conventional Superconductor Electrodes", J. Supercond. Nov. Magn. 28 (3), pp 1117-1121 (2014), DOI: 10.1007/s10948-014-2719-5

S. Döring, M. Monecke, S. Schmidt, F. Schmidl, V. Tympel, J. Engelmann, F. Kurth, K. Iida, S. Haindl, I. Mönch, B. Holzapfel, P. Seidel, "Investigation of TiO x barriers for their use in hybrid Josephson and tunneling junctions based on pnictide thin films", J. Appl. Phys. 115 (8), pp 083901 (2014), DOI: 10.1063/1.4863172

V. Dzhagan, M. Ya Valakh, C. Himcinschi, A.G. Milekhin, D. Solonenko, A. Yeryukov, O.E. Raevskaya, O.L. Stroyuk, D.R.T. Zahn, "Raman and Infrared Phonon Spectra of Ultrasmall Colloidal CdS Nanoparticles", J. Phys. Chem. C 118 (33), pp 19492 (2014), DOI: 10.1021/jp506307q

H. Fiedler, S. Hermann, M. Rennau, S.E. Schulz, T. Gessner, "Localization length of integrated multi-walled carbon nanotubes", 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), San Jose, CA (USA), 20-23 May 2014, Proceedings, pp 159-162, DOI: 10.1109/IITC.2014.6831852

H. Fiedler, M. Toader, S. Hermann, R.D. Rodriguez, E. Sheremet, M. Rennau, S. Schulze, T. Waechtler, D.R.T. Zahn, M. Hietschold, S.E. Schulz, T. Gessner, "Carbon nanotube based via interconnects: Performance estimation based on the resistance of individual carbon nanotubes", Microelectron. Eng. 120, pp 210-215 (2014), DOI: 10.1016/j.mee.2013.07.007

F. Fuchs, A. Zienert, C. Wagner, J. Schuster, S.E. Schulz, "Interaction Between Carbon Nanotubes and Metals: Electronic Properties, Stability, and Sensing", Talk, Materials for Advanced Metallization (MAM 2014), Chemnitz (Germany), 2-5 March 2014

F. Fuchs, C. Wagner, A. Zienert, J. Schuster, "Adjustment of Carbon Nanotube Properties for Sensor Applications using Pd Adatoms: An Ab-Initio Study", Talk, DPG Frühjahrstagung, Dresden (Germany), 30 March - 4 April 2014

X. Gao, P. Mackowiak, B. Mukhopadhyay, O. Ehrmann, K.-D. Lang, H.-D. Ngo, "Wireless Pressure Sensor System", Applied Mechanics and Materials 530-531, pp 75-78 (2014)

X. Gao, P. Mackowiak, B. Mukhopadhyay, O. Ehrmann, K.-D. Lang, H.-D. Ngo, "Evaluation and Signal Conditioning of piezoresistive Silicon Pressure Sensor", Appl. Mech. Mater. 530-531, pp 28-32 (2014)

C. Georgi, A. Hildebrandt, T. Waechtler, S.E. Schulz, T. Gessner, H. Lang, "A cobalt layer deposition study: Dicobaltatetrahedranes as convenient MOCVD precursor systems", J. Mater. Chem. C 2 (23), pp 4676-4682 (2014), DOI: 10.1039/c4tc00288a

N. Grabbert, A. Avnon, B. Wang, V. Datsyuk, S. Trotsenko, P. Mackowiak, H.-D. Ngo, K. Kaletta, S. Zhuo, K.-D. Lang, "Mechanical Properties of Individual Composite Poly(methyl-methacrylate) -Multiwalled Carbon Nanotubes Nanofibers", Talk, NANOSTRUC 2014: International Conference on Structural Nano Composites, Madrid (Spain), 20-21 May 2014

X. Hu, J. Schuster, S.E. Schulz, T. Gessner, "Simulation of ALD chemistry of copper metalorganic precursors on Ta(110) Surface", Poster, Materials for Advanced Metallization (MAM 2014), Chemnitz (Germany), 2-5 March 2014

X. Hu, J. Schuster, S.E. Schulz, T. Gessner, "Mechanism for the atomic layer deposition (ALD) of copper oxide from (nBu3P)2Cu(acac) and wet O2: a theoretical study", Poster, 14th International Conference on Atomic Layer Deposition, Kyoto (Japan), 15-18 June 2014

X. Hu, J. Schuster, S.E. Schulz, T. Gessner, "Thermodynamics and Kinetics of Cu2O ALD from Cu(I) Acetylacetonate", Talk, 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai (China), 16-17 October 2014

X. Hu, J. Schuster, S.E. Schulz, T. Gessner, "Surface Chemistry of Cu(II) Acetylacetonate on Cu(110) Surface from Reactive Molecular Dynamics and First-principles", Poster, 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai (China), 16-17 October 2014

G. Lin, D. Makarov, M. Melzer, W. Si, C. Yan, O.G. Schmidt, "A highly flexible and compact magnetoresistive analytic device", Lab chip 14, pp 4050-4058 (2014), DOI: 10.1039/C4LC00751D

X. Liu, W. Si, X. Sun, J. Deng, J. Zhang, S. Baunack, S. Oswald, L. Liu, C. Yan, O.G. Schmidt, "Free-standing Fe2O3 nanomembranes as anodes for Li-ion batteries with long cycling life and high rate capability", Sci. Rep. 4, pp 7452 (2014), DOI: 10.1038/srep07452

J. Luo, D. Billep, T. Blaudeck, E. Sheremet, R.D. Rodriguez, D.R.T. Zahn, M. Toader, M. Hietschold, T. Otto, T. Gessner, "Chemical post-treatment and thermoelectric properties of poly(3,4-ethylenedioxylthiophene):poly(styrenesulfonate) thin films", J. Appl. Phys. 115 (5), pp 054908 (2014), DOI: 10.1063/1.4864749

M. Maret, F. Liscio, D. Makarov, B. Doisneau-Cottignies, F. Ganss, J.-M. Missiaen, M. Albrecht, "Growth temperature effect on the structure of CoPt islands on NaCl(001) studied by grazing-incidence small-angle X-ray scattering", J. Appl. Cryst. 47 (1), pp 102-109 (2014), DOI: 10.1107/S1600576713028112

D. Mitin, D. Nissen, P. Schädlich, S.S.P.K. Arekapudi, M. Albrecht, "Single vortex core recording in a magnetic vortex lattice", J. Appl. Phys. 115, pp 063906 (2014), DOI: 10.1063/1.4865746

M. Monecke, P. Robaschik, P. Richter, S. Banerjee, G. Salvan, D.R.T. Zahn, "Structural, Magnetic, and Magneto-optical Properties of Sputtered and Annealed La0.66Sr0.34MnO3 Thin Films on Silicon", Poster, EMRS Fall Meeting 2014, Warsaw (Poland), 15-18 September 2014

B. Mukhopadhyay, P. Mackowiak, M. Fritz, T. Cong Vu, O. Ehrmann, K.-D. Lang, H.-D. Ngo, "Neues Drucksensorkonzept mit Glasdurchführung (TGV) und Druckbeaufschlagung auf der Rückseite der Si-Membran für den Einsatz in aggressiven Umgebungen", Poster, IEEE Sensors 2014, Nürnberg (Germany), 2-5 November 2014

A.E. Raevskaya, O.L. Stroyuk, D.I. Solonenko, V.M. Dzhagan, D. Lehmann, S. Ya Kuchmiy, V.F. Plyusnin, D.R.T. Zahn, "Synthesis and luminescent properties of ultrasmall colloidal CdS nanoparticles stabilized by Cd(II) complexes with ammonia and mercaptoacetate", J. Nanopart. Res. 16, pp 2625 (2014), DOI: 10.1007/s11051-014-2650-5

D. Reifert, N. Hasan, S. Döring, S. Schmidt, M. Monecke, M. Feltz, F. Schmidl, V. Tympel, W. Wisniewski, I. Mönch, T. Wolf, P. Seidel, "Preparation of hybrid Josephson junctions on Co-doped Ba-122 single crystals", Supercond. Sci. Tech. 27 (8), pp 085003 (2014), DOI: 10.1088/0953-2048/27/8/085003

P. Robaschik, P. F. Siles, D. Bülz, P. Richter, M. Monecke, M. Fronk, S. Klyatskaya, D. Grimm, O.G. Schmidt, M. Ruben, D.R.T. Zahn, G. Salvan, "Optical Properties and Electrical Transport of Thin Films of Terbium(III)bis(phthalocyanine) on Cobalt", Beilstein J. Nanotechnol. 5, pp 2070-2078 (2014), DOI: 10.3762/bjnano.5.215

O. Schmitt, D. Steil, S. Alebrand, F. Ganss, M. Hehn, S. Mangin, M. Albrecht, S. Mathias, M. Cinchetti, and M. Aeschlimann, "Kerr- and Faraday microscope for space- and time-resolved studies", Eur. Phys. J. B 87 (9), pp 219 (2014), DOI: 10.1140/epjb/e2014-50257-3

W. Si, X. Sun, X. Liu, L. Xi, Y. Jia, C. Yan, O.G. Schmidt, "High areal capacity, micrometer-scale amorphous Si film anode based on nanostructured Cu foil for Li-ion batteries", J. Power Sources 267, pp 629-634 (2014), DOI: 10.1016/j.jpowsour.2014.05.136

W. Si, I. J. Mönch, C. Yan, J. Deng, S. Li, G. Lin, L. Han, Y. Mei, O.G. Schmidt, "A single rolled-up Si tube battery for study of electrochemical kinetics, electrical conductivity and structural integrity", Adv. Mater. 26, pp 7973-7978 (2014), DOI: 10.1002/adma.201402484

D. Solonenko, V. Dzhagan, O. Rayevskaya, O. Stroyuk, O.D. Gordan, D.R.T. Zahn, "Raman and AFM Characterization of Ultrasmall CdS Nanoparticles Incorporated in Polymeric Matrix", Poster, DPG Frühjahrstagung 2014, Dresden (Germany), 30 March - 4 April 2014

D. Solonenko, E. Poppitz, H. Lang, V. Dzhagan, O. Raevskaya, O. Stroyuk, D. Lehmann, O.D. Gordan, D.R.T. Zahn, "Mechanism of Stabilization in Ultrasmall CdS Nanoparticles Studied by FT-IR and Raman Spectroscopy", Poster, International Conference on Quantum Dots-2014, Pisa (Italy), 11-16 May 2014

D. Solonenko, O.D. Gordan, A.G. Milekhin, M. Panholzer, K. Hingerl, D.R.T. Zahn, "Interference-Enhanced Raman Spectroscopy of CuPc and F16CuPc Thin Films", Talk, Summer School Epioptics-13 and Silicene-1, Erice (Italy), 26 July - 1 August 2014

D. Solonenko, O.D. Gordan, D.R.T. Zahn, "Interference-Enhanced Raman Scattering of Ultrathin CuPc Film", Poster, Surface-Enhanced Spectroscopies 2014 (SES 2014), Chemnitz (Germany), 7-10 August 2014

D. Solonenko, O.D. Gordan, A.G. Milekhin, M. Panholzer, K. Hingerl, D.R.T. Zahn, "Mode-Selective Interference-Enhanced Raman Scattering of F16CuPc Thin Film", Poster, 24th International Conference on Raman Spectroscopy (ICORS 2014), Jena (Germany), 10-15 August 2014

E. Song, W. Si, R. Cao, P. Feng, I. Mönch, G. Huang, Z. Di, O.G. Schmidt, Y. Mei, "Schottky contact on ultra-thin silicon nanomembranes under light illumination", Nanotechnology 25, pp 485201 (2014), DOI: 10.1088/0957-4484/25/48/485201

X. Sun, W. Si, X. Liu, J. Deng, L. Xi, L. Liu, C. Yan, O.G. Schmidt, "Multifunctional Ni/NiO hybridized nanomembranes as anode materials for high-rate Li-ion batteries", Nano Energy 9, pp 168-175 (2014), DOI: 10.1016/j.nanoen.2014.06.022

F. Teichert, A. Zienert, J. Schuster, "Electronic transport through defective carbon nanotubes", Talk, DPG Frühjahrstagung, Dresden (Germany), 30 March - 4 April 2014

F. Teichert, A. Zienert, J. Schuster, "Electronic transport through defective carbon nanotubes", Poster, International Winterschool on Electronic Properties of Novel Materials (IWEPNM 2013), Kirchberg in Tirol (Austria), 8-15 March 2014

I.A. Vladymyrskyi, M.V. Karpets, G.L. Katona, D.L. Beke, S.I. Sidorenko, T. Nagata, T. Nabatame, F. Ganss, G. Beddies, T. Chikyow, M. Albrecht, I.M. Makogon, "Influence of the substrate choice on the L10 phase formation of post-annealed Pt/Fe and Pt/Ag/Fe thin films", J. Appl. Phys. 116 (4), pp 044310 (2014), DOI: 10.1063/1.4891477

T. Waechtler, A. Sharma, N. Ahner, M. Melzer, S. Mueller, D. Lehmann, P. Schaefer, S. Schulze, S.E. Schulz, D.R.T. Zahn, M. Hietschold, T. Gessner, "ALD of Nickel Oxide and its Reduction to Nickel for Potential Applications in Interconnects and Spintronics", Talk, Materials for Advanced Metallization Conference (MAM 2014), Chemnitz (Germany), 2-5 March 2014

M. Woehrmann, T. Fischer, H. Walter, M. Toepper, K.-D. Lang, "Characterization of thin polymer films with the focus on lateral stress and mechanical properties and their relevance to microelectronics", 2014 IEEE 64th Electronic Components and Technology Conference (ECTC), Orlando (FL, USA), 27-30 May 2014, Proceedings, pp 1421-1426, DOI: 10.1109/ECTC.2014.6897480

L. Zhang, J. Deng, L. Liu, W. Si, S. Oswald, L. Xi, M. Kundu, G. Ma, T. Gemming, S. Baunack, F. Ding, C. Yan, O.G. Schmidt, "Hierarchically designed SiOx/SiOy bilayer nanomembranes as stable anodes for lithium ion batteries", Adv. Mater. 26, pp 4527-4532 (2014), DOI: 10.1002/adma.201401194

A. Zienert, J. Schuster, T. Gessner, "Metallic carbon nanotubes with metal contacts: electronic structure and transport", Nanotechnology 25 (42), pp 425203 (2014), DOI: 10.1088/0957-4484/25/42/425203

A. Zienert, J. Schuster, T. Gessner, "Electronic transport properties of metallic carbon nanotubes with metal contacts: size effects and contact resistance", Talk, QuantumHagen: Workshop on Modeling of Electronic Devices and Materials at the Nanoscale, Copenhagen (Denmark), 1-3 July 2014

A. Zienert, J. Schuster, T. Gessner, "Electronic Transport Properties of Metallic Carbon Nanotubes with Metal Contacts", Poster, International CECAM-Workshop-Tutorial "High performance models of charge transport in large scale systems", Bremen (Germany), 5-10 October 2014

A. Zienert, J. Schuster, T. Gessner, "Electronic Transport Properties of Metallic Carbon Nanotubes with Metal Contacts", Poster, First Annual DCCMS Workshop, Dresden (Germany), 20 October 2014

 

2013

D. Adner, S. Möckel, M. Korb, R. Buschbeck, T. Rüffer, S. Schulze, L. Mertens, M. Hietschold, M. Mehring, H. Lang, "Copper(II) and triphenylphosphine copper(I) ethylene glycol carboxylates: Synthesis, characterisation and copper nanoparticle generation", Dalton Trans. 42 (44), pp 15599-15609 (2013), DOI: 10.1039/c3dt51913a

M. Baum, L. Hofmann, M. Wiemer, S.E. Schulz, T. Gessner, "Development and characterisation of 3D integration technologies for MEMS based on copper filled TSVs and copper-to-copper metal thermo compression bonding", Semiconductor Conference Dresden-Grenoble (ISCDG), Dresden (Germany), 26-27 September 2013, Proceedings, Online via DOI: 10.1109/ISCDG.2013.6656329

J. von Berg, C. Cavalloni, B. Mukhopadhyay, P. Mackowiak, O. Ehrmann, K.-D. Lang, H.-D. Ngo, "An Advanced MEMS Sensor Packaging Concept for Use in Harsh Environments", Talk, IEEE 15th Electronics Packaging Technology Conference, Singapore, 11-13 December 2013

R. Brandt, R. Rückriem, D.A. Gilbert, F. Ganss, T. Senn, K. Liu, M. Albrecht, H. Schmidt, "Size-dependent magnetization switching characteristics and spin wave modes of FePt nanostructures", J. Appl. Phys. 113 (20), pp 203910 (2013), DOI: 10.1063/1.4807930

M. Daniel, M. Friedemann, N. Jöhrmann, A. Liebig, J. Donges, M. Hietschold, G. Beddies, M. Albrecht, "Influence of the substrate thermal expansion coefficient on the morphology and elastic stress of CoSb3 thin films", Phys. Stat. Sol. A 210 (1), pp 140-146 (2013), DOI: 10.1002/pssa.201228388

J. Deng, H. Ji, C. Yan, J. Zhang, W. Si, S. Baunack, S. Oswald, Y. Mei, O.G. Schmidt, "Naturally Rolled-up C/Si/C Trilayer Nanomembranes as Stable Anodes for Lithium Ion Batteries with Remarkable Cycling Performance", Angew. Chem. Int. Ed. 52 (8), pp 2326-2330 (2013), DOI: 10.1002/anie.201208357

J. Deng, C. Yan, L. Yang, S. Baunack, S. Oswald, H. Wendrock, Y. Mei, O.G. Schmidt, "Sandwich-stacked SnO2/Cu hybrid nanosheets as multichannel anodes for lithium ion batteries", ACS Nano 7 (8), pp 6948-6954 (2013), DOI: 10.1021/nn402164q

D. Dhakal, T. Waechtler, M. Melzer, R. Mothes, S.E. Schulz, H. Lang, T. Gessner, "In-situ XPS investigation of the surface chemistry of a Cu(I) Beta-Diketonate precursor with reference to the ALD of Cu2O", Poster, 17. Tagung Festkörperanalytik (FKA 17), Chemnitz (Germany), 1-3 July 2013

N. Du, Y. Shuai, W. Luo, C. Mayr, R. Schüffny, O.G. Schmidt, H. Schmidt, "Practical guide for validated memristance measurements", Rev. Sci. Instrum. 84 (2), pp 023903 (2013), DOI: 10.1063/1.4775718

H. Fiedler, M. Toader, S. Hermann, R.D. Rodriguez, E. Sheremet, M. Rennau, S. Schulze, T. Waechtler, D.R.T. Zahn, M. Hietschold, S.E. Schulz, T. Gessner, "Electrical properties of Carbon Nanotube Interconnects", Poster, Materials for Advanced Metallization (MAM), Leuven (Belgium), 10-13 March 2013

H. Fiedler, M. Toader, S. Hermann, R.D. Rodriguez, E. Sheremet, M. Rennau, S. Schulze, T. Waechtler, D.R.T. Zahn, M. Hietschold, S.E. Schulz, T. Gessner, "Preparation and Characterization of Carbon Nanotubes based Via Interconnects", Poster, Ninth International Nanotechnology Conference on Communication and Cooperation (INC 9), Berlin (Germany), 14-17 May 2013

H. Fiedler, M. Toader, S. Hermann, R.D. Rodriguez, E. Sheremet, M. Rennau, S. Schulze, T. Waechtler, D.R.T. Zahn, M. Hietschold, S.E. Schulz, T. Gessner, "Low resistance carbon nanotube - metal contact for interconnect applications", Poster, The Fourteenth International Conference on the Science and Application of Nanotubes (NT13), Espoo (Finland), 24-28 June 2013

C. Georgi, A. Hildebrandt, A. Tuchscherer, S. Oswald, H. Lang, "Hexacarbonyl (trimethylsilyl ethyne) dicobalt as MOCVD precursor for thin cobalt layer formation", Z. Anorg. Allg. Chem. 639 (14), pp 2532-2535 (2013), DOI: 10.1002/zaac.201300292

S. Gilles, A. Tuchscherer, H. Lang, U. Simon, "Dip-pen-based direct writing of conducting silver dots", J. Colloid Interface Sci. 406, pp 256-262 (2013), DOI: 10.1016/j.jcis.2013.05.047

I. Hartwig, B. Braemer, M. Hecker, S.E. Schulz, "Effects of sandwich thickness asymmetry on interface toughness measurement in the 4-point bending test",Poster, MAM - Materials for Advanced Metallization, Leuven(Belgium), 10-13 March 2013

L. Hofmann, M. Baum, S.E. Schulz, M. Wiemer, T. Gessner, "3D Integration Technologies for MEMS based on Copper TSVs and Copper-to-Copper Metal Thermo Compression Bonding", Talk, Advanced Metallization Conference 2013 (AMC 2013), Albany, NY (USA), 21-23 October 2013

L. Hofmann, M. Baum, K. Gottfried, S.E. Schulz, M. Wiemer, T. Gessner, "TSVs mit hohem Aspektverhältnis und Kupfer-Bonden für MEMS", Talk, Mikrosystemtechnik-Kongress, Aachen (Germany), 14-16 October 2013, Proceedings, ISBN: 978-3-8007-3555-6

L. Hofmann, M. Baum, S.E. Schulz, M. Wiemer, T. Gessner, "3D technologies for integration of MEMS", Talk, SEMICON Europa, Dresden (Germany), 8-10 October 2013

L. Hofmann, I. Schubert, R. Ecke, K. Gottfried, S.E. Schulz, T. Gessner, "Vertical Integration techniques for MEMS using HAR TSV", Talk, Smarts Systems Integration (SSI), Amsterdam (The Netherlands), 13-14 March 2013, Proceedings, ISBN: 978-3-8007-3490-0

L. Hofmann, I. Schubert, K. Gottfried, S.E. Schulz, T. Gessner, "Investigations on partially filled HAR TSVs for MEMS applications", Talk, 2013 IEEE International Interconnect Technology Conference (IITC), Kyoto (Japan), 13-15 June 2013, Proceedings, ISBN: 978-1-4799-0438-9, DOI: 10.1109/IITC.2013.6615585

N. Jöhrmann, H. Schletter, C. Brombacher, M. Albrecht, M. Hietschold, "EBSD on thin FePtCu films to investigate the influence of copper content and annealing temperature on (001) texture formation and grain size", Talk, DPG Frühjahrstagung, Regensburg (Germany), 10-15 March 2013

N. Jöhrmann, C. Brombacher, M. Albrecht, M. Hietschold, "Texturuntersuchungen an 5 nm dünnen (FePt)1-xCux-Filmen", Talk, 17. Tagung Festkörperanalytik (FKA 17), Chemnitz (Germany), 01-03 July 2013

N. Jöhrmann, C. Brombacher, M. Albrecht, M. Hietschold , "Optimizing EBSD setup for high lateral resolution to investigate thin (FePt)1-xCux films", Poster, Microscopy Conference 2013, Regensburg (Germany), 25-30 August 2013, Proceedings, pp 629-630 (2013), Online: urn:nbn:de:bvb:355-epub-287343

H. Lang, S. Dietrich, "Metals – Gas-Phase Deposition and Applications", in: P. O'Brien (ed.), Comprehensive Inorganic Chemistry II: From Elements to Applications. Volume 4: Solid-State Materials, Including Ceramics and Minerals, pp 211-269, Elsevier (2013)

C. Leonhardt, S. Brumm, A. Seifert, G. Cox, A. Lange, T. Rüffer, D. Schaarschmidt, H. Lang, N. Jöhrmann, M. Hietschold, F. Simon, M. Mehring, "Tin oxide nanoparticles and SnO2/SiO2 hybrid materials by twin polymerization using tin(IV) alkoxides", ChemPlusChem 78 (11), pp 1400-1412 (2013), DOI: 10.1002/cplu.201200242

J. Luo, P. Streit, D. Billep, T. Otto, T. Gessner, "Influence of DMSO and MWCNTs addition on the thermoelectric properties of PEDOT:PSS thin films", Smart Systems Integration - SSI 2013, Amsterdam (The Netherlands), 13-14 March 2013

J. Luo, D. Billep, T. Waechtler, T. Otto, M. Toader, O. Gordan, E. Sheremet, J. Martin, M. Hietschold, D.R.T. Zahn, T. Gessner, "Enhancement of the thermoelectric properties of PEDOT:PSS thin films by post-treatment", J. Mater. Chem. A 1 (26), pp 7576-7583 (2013), DOI: 10.1039/c3ta11209h

C. Meinecke, L. Hofmann, A. Bertz, K. Gottfried, T. Gessner, "Technologieentwicklung für optimiertes MEMS Packaging durch Si-TSV-Rückseitenkontaktierung", Mikrosystemtechnik-Kongress, Aachen (Germany), 14-16 October 2013

M. Melzer, T. Waechtler, S. Müller, H. Fiedler, S. Hermann, R.D. Rodriguez, A. Villabona, A. Sendzik, R. Mothes, S.E. Schulz, D.R.T. Zahn, M. Hietschold, H. Lang, T. Gessner, "Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications", Microelectron. Eng. 107, pp 223-228 (2013), DOI: 10.1016/j.mee.2012.10.026

A.G. Milekhin, N.A. Yeryukov, L.L. Sveshnikova, T.A. Duda, E.E. Rodyakina, E.S. Sheremet, M. Ludemann, O.D. Gordan, A.V. Latyshev, D.R.T. Zahn, "Surface enhanced Raman scattering by organic and inorganic semiconductors formed on laterally ordered arrays of Au nanoclusters", Thin Solid Films 543, pp 35-40 (2013), DOI: 10.1016/j.tsf.2013.03.070

R. Rückriem, R. Brandt, F. Ganss, T. Senn, D.A. Gilbert, K. Liu, C. Brombacher, P. Krone, H. Schmidt, T. Schrefl, M. Albrecht, "Investigation of Spin Waves in Magnetic Nanocaps", Poster, 526th WE Heraeus Seminar on Functional Magnetic Nanomembranes, Bad Honnef (Germany), 04-06 March 2013

G. Salvan, P. Robaschik, M. Fronk, S. Müller, T. Waechtler, S.E. Schulz, R. Mothes, H. Lang, C. Schubert, S. Thomas, M. Albrecht, D.R.T. Zahn, "Magneto-optical Kerr effect studies of Cu2O/nickel heterostructures", Microelectron. Eng. 107, pp 130-133 (2013), DOI: 10.1016/j.mee.2012.10.023

C. Schoner, A. Tuchscherer, T. Blaudeck, S.F. Jahn, R.R. Baumann, H. Lang, "Particle-free gold metal-organic decomposition ink for inkjet printing of gold structures", Thin Solid Films 531, pp 147-151 (2013), DOI: 10.1016/j.tsf.2013.01.027

W. Si, C. Yan, Y. Chen, S. Oswald, L. Han, O.G. Schmidt, "On chip, all solid-state and flexible micro-supercapacitors with high performance based on MnOx/Au multilayers", Energy Environ. Sci. 6 (11), pp 3218-3223 (2013), DOI: 10.1039/c3ee41286e

X. Sun, C. Yan, Y. Chen, W. Si, J. Deng, S. Oswald, L. Liu, O.G. Schmidt, "Three-dimensionally curved NiO nanomembranes as ultrahigh rate capability anodes for li-ion batteries with long cycle lifetimes", Adv. Energy Mater. 4 (4), pp 1300912 (2013), DOI: 10.1002/aenm.201300912

F. Teichert, A. Zienert, J. Schuster, "Electronic structure and transport properties of crossed carbon nanotubes", Poster, DPG Frühjahrstagung, Regensburg (Germany), 10-15 March 2013

J. Tittmann, S. Hermann, H. Fiedler, S.E. Schulz, T. Gessner, "Manipulation of Ni catalyst particle size, shape and areal density on TiN support layer for growth of vertical aligned CNTs", NT13 - The Fourteenth International Conference on the Science and Application of Nanotubes, Helsinki (Finland), 24-28 June 2013

M. Toader, H. Fiedler, S. Hermann, S.E. Schulz, T. Gessner, M. Hietschold, "Conductive AFM for CNT characterization", Nanoscale Res. Lett. 8, pp 24 (2013), DOI: 10.1186/1556-276X-8-24

I.A. Vladymyrski, M.V. Karpets, F. Ganss, G.L. Katona, D.L. Beke, S.I. Sidorenko, T. Nagata, T. Nabatame, T. Chikyow, G. Beddies, M. Albrecht, I.M. Makogon, "Influence of the annealing atmosphere on the structural properties of FePt thin films", J. Appl. Phys. 114 (16), pp 164314 (2013), DOI: 10.1063/1.4827202

T. Waechtler, D. Dhakal, M. Melzer, A. Sharma, A. Gummenscheimer, N. Ahner, S. Hermann, H. Fiedler, S.E. Schulz, T. Gessner, "ALD of Transition Metals and Metal Oxides for Applications in Electronics and Sensor Devices", Symposium of the ALD Lab Dresden @ SEMICON Europa 2013, Dresden (Germany), 8 October 2013

T. Waechtler, A. Sharman, N. Ahner, M. Melzer, S. Mueller, A. Gummenscheimer, D. Lehmann, P. Schaefer, S. Schulze, S.E. Schulz, D.R.T. Zahn, M. Hietschold, T. Gessner, "ALD of Nickel Oxide and Its Reduction to Nickel for Potential Applications in Interconnects and Spintronics", AVS 13th International Conference on Atomic Layer Deposition (ALD 2013), San Diego, CA (USA), 29-31 July 2013

T. Waechtler, S. Schulz, T. Gessner, S. Mueller, A. Tuchscherer, H. Lang, "Method for the Production of a Substrate Having a Coating Comprising Copper, and Coated Substrate and Device Prepared by this Method", Patent Application, US 20130062768 A1 (2013)

M. Woehrmann, M. Töpper, K.-D. Lang, "Strain energy driven adhesion test for adherence characterization of thin polymer films for microelectronic applications", Talk, Thermoset 2013 - From Monomers to Components, Berlin (Germany), 18-20 September 2013

M. Woehrmann, H. Walter, M. Töpper, K.-D. Lang, "Mechanical properties of polymers and their relevance to reliability of microelectronics", Poster, Thermoset 2013 - From Monomers to Components, Berlin (Germany), 18-20 September 2013

L. Yang, S. Wang, J. Mao, J. Deng, Q. Gao, Y. Tang, O.G. Schmidt, "Hierarchical MoS2/polyaniline nanowires with excellent electrochemical performance for lithium-ion batteries", Adv. Mater. 25 (8), pp 1180-1184 (2013), DOI: 10.1002/adma.201203999

C. Yan, W. Xi, W. Si, J. Deng, O.G. Schmidt, "Highly conductive and strain-released hybrid multilayer Ge/Ti nanomembranes with enhanced lithium-ion-storage capability", Adv. Mater. 25 (4), pp 539-544 (2013), DOI: 10.1002/adma.201203458

A. Zienert, J. Schuster, T. Gessner, "Comparison of quantum mechanical methods for the simulation of electronic transport through carbon nanotubes", Microelectron. Eng. 106, pp 100-105 (2013), DOI: 10.1016/j.mee.2012.12.018

A. Zienert, J. Schuster, T. Gessner, "Extended Hückel Theory for Carbon Nanotubes: Band Structure and Transport Properties", J. Phys. Chem. A 117 (17), pp 3650-3654 (2013), DOI: 10.1021/jp312586j

A. Zienert, J. Schuster, T. Gessner, "Electronic transport properties of metallic carbon nanotubes with metal contacts", Poster, International Winterschool on Electronic Properties of Novel Materials (IWEPNM 2013), Kirchberg in Tirol (Austria), 2-9 March 2013

A. Zienert, J. Schuster, T. Gessner, "Electron transport properties of metallic carbon nanotubes with metal contacts", Talk, DPG Frühjahrstagung, Regensburg (Germany), 10-15 March 2013

 

2012

N. Ahner, S. Zimmermann, M. Schaller, S.E. Schulz, "Optimized wetting behavior of water-based cleaning solutions for plasma etch residue removal by application of surfactants", Sol. St. Phen. 187, pp 201-205 (2012), DOI: 10.4028/www.scientific.net/SSP.187.201

R. Brandt, F. Ganss, R. Rückriem, T. Senn, C. Brombacher, P. Krone, M. Albrecht, H. Schmidt, "Three-dimensional shape dependence of spin-wave modes in single FePt nanomagnets", Phys. Rev. B 86 (9), pp 094426 (2012), DOI: 10.1103/PhysRevB.86.094426

R. Brandt, F. Ganss, T. Senn, M. Daniel, M. Albrecht, H. Schmidt, "Frequency tuning the ultrafast magnetization dynamics of FexPt100-x alloys", J. Appl. Phys. 111 (5), pp 053918 (2012), DOI: 10.1063/1.3691954

E.T. Breyer, D. Lehmann, D.R.T. Zahn, "Molecular Orientation of Copper Phthalocyanine Molecules on Crystalline and Silicon Substrates", Poster, International Conference on Solid Films and Surfaces 16, Genoa (Italy), 1-6 July 2012

E.T. Breyer, D. Lehmann, D.R.T. Zahn, "Molecular Orientatin of Copper Phthalocyanine Molecules on Crystalline and Silicon Substrates", e-J. Surf. Sci. Nanotechnol. 10, pp 553-557 (2012), DOI: 10.1380/ejssnt.2012.553

C. Brombacher, H. Schletter, M. Daniel, P. Matthes, N. Jöhrmann, M. Maret, D. Makarov, M. Hietschold, M. Albrecht, "FePtCu alloy thin films: Morphology, L1 0 chemical ordering, and perpendicular magnetic anisotropy", J. Appl. Phys. 112 (7), pp 073912 (2012), DOI: 10.1063/1.4757038

L. Ding, M. Friedrich, O. Gordan, D.R.T. Zahn, "Surface Modification Effect on Optical Anisotropy and Molecular Orientation of CuPc Thin Films", DPG Frühjahrstagung, Berlin (Germany), 25-30 March 2012

L. Ding, L. Chen, M. Friedrich, O.D. Gordan, C. Cobet, D.W. Zhang, N. Esser, D.R.T. Zahn, "Optical Gap and Aging Effect of Ultra-thin High-k Films Grown by Atomic Layer Deposition", 7th Workshop Ellipsometry, Leipzig (Germany), 5-7 March 2012

I. Hartwig, R. Ecke, B. Brämer, E. Auerswald, S.E. Schulz, "Evaluating the adhesion of ultra-thin layers", Poster, Materials Science and Engineering (MSE) 2012, Darmstadt (Germany), 25-27 September 2012

H. Fiedler, R. Ecke, S. Hermann, S.E. Schulz, T. Gessner, "Back-end-of the line compatible homogeneous coating of vertical aligned carbon nanotubes with a conductive diffusion barrier for interconnect applications", Talk, 3rd International Conference on Nanotechnology: Fundamentals and Applications (ICNFA 2012), Montreal (Canada), 7-9 August 2012

H. Fiedler, M. Melzer, T. Waechtler, S. Hermann, S.E. Schulz, T. Gessner, "Nanomaterials for Interconnects", 8th Interregional Workshop on Advanced Nanomaterials (IWAN 2012), Frankfurt (Oder) (Germany), 12-13 November 2012

H. Fiedler, M. Toader, S. Hermann, M. Rennau, S.E. Schulz, M. Hietschold, T. Gessner, "Fabrication and characterization of CNT via interconnects for application in integrated circuits", Talk, DPG Frühjahrstagung, Berlin (Germany), 25-30 March 2012

H. Fiedler, M. Toader, S. Hermann, R.D. Rodriguez, E. Sheremet, M. Rennau, S. Schulze, T. Waechtler, M. Hietschold, D.R.T. Zahn, S.E. Schulz, T. Gessner, "Distinguishing between Individual Contributions to the Via Resistance in Carbon Nanotubes Based Interconnects", ECS J. Solid State Sci. Technol. 1 (6), pp M47-M51 (2012), DOI: 10.1149/2.027206jss

M. Fronk, F. Haidu, M. Ludemann, A. Kopylov, C. Schubert, M. Albrecht, D.R.T. Zahn, G. Salvan, "Spectroscopic Ellipsometry and Magnetooptical Kerr Effect Spectroscopy Characterization of Phthalocyanine Thin Films on Ferromagnetic Substrates", Poster, DPG Frühjahrstagung, Berlin (Germany), 25-30 March 2012

M. Fronk, S. Mueller, T. Waechtler, S.E. Schulz, R. Mothes, H. Lang, D.R.T. Zahn, G. Salvan, "Magneto-optical Kerr-effect studies on copper oxide thin films produced by atomic layer deposition on SiO2", Thin Solid Films 520, pp 4741-4744 (2012), DOI: 10.1016/j.tsf.2011.10.204

F. Ganss, B. Hebler, A. Cattoni, A.-M. Haghiri-Gosnet, M. Albrecht, "Co/Pd multilayers on SiOx pillar arrays at ultra-high density", Talk, DPG Frühjahrstagung, Berlin (Germany), 25-30 March 2012

O.D. Gordan, D. Lehmann, F. Haidu, S. Mueller, T. Waechtler, S.E. Schulz, H. Lang, W. Braun, T. Gessner, D.R.T. Zahn, "Copper Oxidation and Reduction: A Combined Ellipsometry and Photoemission Study", poster presentation, Materials for Advanced Metallization Conference (MAM), Grenoble (France), 11-14 March 2012

F. Haidu, D. Lehmann, M. Fronk, B. Mahns, M. Ludemann, C. Schubert, O.D. Gordan, P. Schäfer, M. Knupfer, M. Albrecht, W. Braun, D.R.T. Zahn, "The Influence of Substrate Magnetisation on the Molecular Orientation of CoPc", Vth International Conference on Molecular Materials (MolMat 2012), Barcelona (Spain), 3-6 July 2012

I. Hartwig, "Akustische Oberflächenwellen zur Bestimmung der Haftfestigkeit dünner Schichten", Talk, 16. Deutsche Physikerinnentagung (DPT), Freiburg i. Br. (Germany), 25-28 October 2012

S. Hermann, S. Schulze, R. Ecke, A. Liebig, P. Schaefer, D.R.T. Zahn, M. Albrecht, M. Hietschold, S.E. Schulz, T. Gessner, "Growth of carbon nanotube forests between a bi-metallic catalyst layer and a SiO2 substrate to form a self-assembled carbon-metal heterostructure", Carbon 50 (13), pp 4765-4770 (2012), DOI: 10.1016/j.carbon.2012.05.034

S. Hermann, H. Fiedler, S. Loschek, S.E. Schulz, T. Gessner, "Processes for wafer level integration of carbon nanotubes in electronic and sensor applications", 11. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz (Germany), 23-24 October 2012

S. Hermann, H. Fiedler, H. Yu, S. Loschek, J. Bonitz, S.E. Schulz, T. Gessner, "Wafer level approaches for the integration of carbon nanotubes in electronic and sensor applications", IEEE 9th International Multi-Conference on Systems, Signals & Devices (SSD-SCI), Chemnitz (Germany), 20-23 March 2012

S. Hermann, S.E. Schulz, T. Gessner, "Novel form of carbon nanotube films with a self-assembled carbon-metal heterostructure", Vth International Conference on Molecular Materials (MolMat 2012), Barcelona (Spain), 3-6 July 2012

S. Hermann, S. Schulze, R. Ecke, A. Liebig, S.E. Schulz, T. Gessner, "Novel carbon nanotube film with a self-assembled carbon-metal heterostructure", International Conference on the Physics of Semiconductors, Dresden (Germany), 22-27 July 2012

M. Ludemann, B. Mahns, F. Haidu, R. Friedrich, T. Hahn, D. Lehmann, O.D. Gordan, J. Kortus, M. Knupfer, D.R.T. Zahn, "A Raman Study of Potassium Doped Manganese Phthalocyanine: Only Charge Transfer?", Talk, International Conference on Solid Films and Surfaces 16, Genoa (Italy), 1-6 July 2012

M. Ludemann, B. Mahns, O.D. Gordan, M. Knupfer, D.R.T. Zahn, "Raman Spectroscopy on Potassium Doped Manganese Phthalocyanine Thin Films", poster presentation, DPG Frühjahrstagung, Berlin (Germany), 25-30 March 2012

B. Mahns, M. Ludemann, F. Roth, R. Kraus, M. Grobosch, C. Loose, R. Friedrich, O.D. Gordan, M. Knupfer, J. Kortus, D.R.T. Zahn, "Electronic and Vibrational Properties of Potassium Doped Manganese Phthalocyanine", Vth International Conference on Molecular Materials (MolMat 2012), Barcelona (Spain), 3-6 July 2012

M. Melzer, T. Waechtler, S. Mueller, H. Fiedler, S. Hermann, R.D. Rodriguez, A. Villabona, A. Sendzik, R. Mothes, S.E. Schulz, T. Gessner, D.R.T. Zahn, M. Hietschold, H. Lang, "Copper oxide ALD on thermally pretreated CNTs for interconnect applications", Talk, Materials for Advanced Metallization Conference (MAM), Grenoble (France), 11-14 March 2012

M. Melzer, T. Waechtler, S. Mueller, H. Fiedler, S. Hermann, R.D. Rodriguez, A. Villabona, A. Sendzik, R. Mothes, S.E. Schulz, T. Gessner, D.R.T. Zahn, M. Hietschold, H. Lang, "Variation of the growth behavior of copper oxide deposited via ALD on thermally pretreated CNTs",poster presentation, DPG Frühjahrstagung, Berlin (Germany), 25-30 March 2012

M. Melzer, A. Foerster, T. Waechtler, C. Wagner, H. Fiedler, J. Schuster, S. Hermann, S.E. Schulz, T. Gessner, "Controlling the growth morphology of ALD copper oxide on CNTs by thermal oxidation prior to the ALD", Talk, AVS 12th International Conference on Atomic Layer Deposition (ALD 2012 & BALD 2012), Dresden (Germany), 17-20 June 2012

M. Melzer, D. Karnaushenko, D. Makarov, L. Baraban, A. Calvimontes, I. Moench, R. Kaltofen, Y.F. Mei, O.G. Schmidt, "Elastic magnetic sensor with isotropic sensitivity for in-flow detection of magnetic objects", RSC Advances 2(6), pp 2284-2288 (2012), DOI: 10.1039/c2ra01062c

S. Mueller, T. Waechtler, A. Tuchscherer, R. Mothes, O. Gordan, D. Lehmann, F. Haidu, S.E. Schulz, H. Lang, D.R.T. Zahn, T. Gessner, "An Approach for Cu ALD on Co/Ni as Liners for ULSI Interconnects and Magnetic Film Systems for Spintronic Applications", Talk, Materials for Advanced Metallization Conference (MAM), Grenoble (France), 11-14 March 2012

G. Salvan, M. Fronk, S. Mueller, T. Waechtler, S.E. Schulz, R. Mothes, H. Lang, C. Schubert, M. Albrecht, D.R.T. Zahn, "Magneto-optical Kerr Effect Studies of Heterostructures of Ferromagnetic and Copper Oxide Layers Produced by Atomic Layer Deposition", poster presentation, Materials for Advanced Metallization Conference (MAM), Grenoble (France), 11-14 March 2012

G. Salvan, M. Fronk, P. Robaschik, D.R.T. Zahn, M. Albrecht, S. Mueller, T. Waechtler, S.E. Schulz, R. Mothes, H. Lang, "Heterostructures of Copper Oxide Layers Produced by ALD with Ferromagnetic Layers Studied by Magneto-Optical Kerr Effect Spectroscopy", poster presentation, AVS 12th International Conference on Atomic Layer Deposition (ALD 2012 & BALD 2012), Dresden (Germany), 17-20 June 2012

E. Sheremet, R.D. Rodriguez, A. Milekhin, O.D. Gordan, S. Müller, S. Villabona, M. Ludemann, E. Rodyakina, A. Latyshev, D.R.T. Zahn, "Size and Gap Dependent SERS and TERS Measurements of Phthalocyanine Molecules on Specially Designed Substrates", 4th International Conference on Nano-structures Self-Assembly (NanoSEA 2012), S. Margherita di Pula, Sardinia, (Italy), 25-29 June 2012

E. Sheremet, R.D. Rodriguez, O.D. Gordan, S. Müller, A. Villabona, S. Moras, M. Ludemann, D.R.T. Zahn, "Towards maximum enhancement in Raman spectroscopy", International Conference on Nanoscience + Technology (ICN+T 2012), Paris (France), 23-27 July 2012

J. Sommer, A. Zienert, S. Gemming, J. Schuster, S.E. Schulz, T. Gessner, "Band gap tuning of carbon nanotubes for sensor and interconnect applications - a quantum simulation study", poster presentation, IEEE 9th International Multi-Conference on Systems, Signals & Devices (SSD-SCI), Chemnitz (Germany), 20-23 March 2012

J. Sommer, A. Zienert, J. Schuster, "Band structure und electronic transport properties of cobalt decorated carbon nanotubes", poster presentation, DPG Frühjahrstagung, Berlin (Germany), 25-30 March 2012

P. Streit, R. Schulze, D. Billep, T. Otto, T. Gessner, "Comparison of lumped and finite element modeling for thermoelectric devices", poster presentation, Smart System Integration (SSI), Zurich (Switzerland), 21-22 March 2012

A. Tuchscherer, D. Schaarschmidt, S. Schulze, M. Hietschold, H. Lang, "Gold Nanoparticles Generated by Thermolysis of "All-in-One" Gold(I) Carboxylate Complexes", Dalton Trans. 41 pp 2738-2746 (2012), DOI: 10.1039/C2DT11748G

A. Tuchscherer, R. Packheiser, T. Rüffer, H. Schletter, M. Hietschold, H. Lang, "Rhodium Nanoparticles from Dirhodium(II) Ethylene Glycol tetracarboxylates", Eur. J. Inorg. Chem. 13, pp 02251-2258 (2012), DOI: 10.1002/ejic.201101424

T. Waechtler, S. Mueller, H. Fiedler, M. Melzer, S.E. Schulz, T. Gessner, "ALD of Metal and Metal Oxide Thin Films for Applications in ULSI Metallization Systems and Spintronic Layer Stacks", Talk, EFDS Workshop on Atomic Layer Deposition, Dresden (Germany), 7 March 2012

M. Woehrmann, M.Toepper, "A Critical Review: Adhesion Measurement of Thin Polymer Films for Microelectronic Applications", Talk, The Fifteenth Meeting of the Symposium on Polymers for Microelectronics, Wilmington, Delaware (USA), 8-10 May 2012

M. Woehrmann, M. Toepper, "Polymerization of Thin Film Polymers", in: A. De Souza Gomes (Ed.), New Polymers for Special Applications, pp 113-138, InTech (2012), DOI: 10.5772/48205

N.A. Yeryukov, A.G. Milekhin, L.L. Sveshnikova, T.A. Duda, E.E. Rodyakina, E.S. Sheremet, M. Ludemann, A.V. Latyshev, D.R.T. Zahn, "Surface enhanced Raman Scattering by Organic and Inorganic Analytes on Laterally Ordered Arrays of Au Nanoclusters", 4th International Conference on Nano-structures Self-Assembly (NanoSEA 2012), S. Margherita di Pula, Sardinia (Italy), 25-29 June 2012

H.-X. Zhang, S.-H. Wang, K. Jiang, A. Tuchscherer, W.-B. Cai, "In situ spectroscopic investigation of CO accumulation and poisoning on Pd black surfaces in concentrated HCOOH", J. Power Sources 199, pp 165-169 (2012), DOI: 10.1016/j.jpowsour.2011.10.033

A. Zienert, C. Wagner, S. Mohammadzadeh, J. Schuster, R. Streiter, S.E. Schulz, T. Gessner, "Simulation of Nanostructures for Sensor and Circuit Applications", Talk, IEEE 9th International Multi-Conference on Systems, Signals & Devices (SSD-SCI), Chemnitz (Germany), 20-23 March 2012,

A. Zienert, J. Schuster, T. Gessner, "Quantum transport simulations in metallic carbon nanotubes with metal contacts", Talk, DPG Frühjahrstagung, Berlin (Germany), 25-30 March 2012

 

2011

F.-F. Cao, J.-W. Deng, S. Xin, H.-X. Ji, O.G. Schmidt, L.-J. Wan, Y.-G. Guo, "Cu-Si nanocable arrays as high-rate anode materials for lithium-ion batteries", Adv. Mater. 23 (38), pp 4415-4420 (2011), DOI: 10.1002/adma.201102062

L. Ding, L. Chen, M. Friedrich, O. Gordan, W. Zhang, D.R.T. Zahn, "Dielectric Function of Ultra-thin High-k Films Grown by Atomic Layer Deposition", poster presentation, DPG Frühjahrstagung Dresden (Germany), 13-18 March 2011

L. Ding, M. Friedrich, O. Gordan, D.R.T. Zahn, "Molecular Orientation of CuPc Thin Films Grown on Vicinal H-Si(111) by in situ Investigation", 6th Workshop of Spectroscopic Ellipsometry, Berlin (Germany), 21-24 February 2011

S.-F. Ding, Q. Xie, S. Mueller, T. Waechtler, H.-S. Lu, S.E. Schulz, C. Detavernier, X.-P. Qu, T. Gessner, "The Inhibition of Enhanced Cu Oxidation on Ruthenium/Diffusion Barrier Layers for Cu Interconnects by Carbon Alloying into Ru", J. Electrochem. Soc. 158 (12), pp H1228-H1232 (2011), Online via DOI: 10.1149/2.041112jes

H. Fiedler, S. Hermann, S.E. Schulz, T. Gessner, "Influence of copper on catalytic carbon nanotube growth process", poster presentation, IEEE International Interconnect Technology Conference (IITC) & Materials for Advanced Metallization (MAM), Dresden (Germany), 9-12 May 2011, IEEE Proceedings, online via DOI: 10.1109/IITC.2011.5940346

M. Fronk, S. Mueller, T. Waechtler, S.E. Schulz, D.R.T. Zahn, G. Salvan, "Magneto-optical Kerr effect studies of copper oxide and cobalt thin films", poster presentation, DPG Frühjahrstagung, Dresden (Germany), 13-18 March 2011

N.T.N. Ha, T.G. Gopakumar, M. Hietschold, "Polymorphism Driven by Concentration at the Solid-Liquid Interface", J. Phys. Chem. C 115 (44), pp 21743-21749 (2011), Online via DOI: 10.1021/jp111640t

N.T.N. Ha, T.G. Gopakumar, M. Hietschold, "Co-operative adsorption of TMA-alcohol mixture controlled by sonication time", Talk, DPG Frühjahrstagung, Dresden (Germany), 22-27 March 2011

F. Haidu, D. Lehmann, M. Fronk, B. Mahns, M. Ludemann, O.D. Gordan, P. Schäfer, M. Knupfer, W. Braun, D.R.T. Zahn, "Determining the Molecular Orientation of CoPc on in- and out-of-plane Magnetised Substrates by NEXAFS Spectroscopy", poster presentation, BESSY User Meeting, Berlin (Germany), 1-2 December 2011

L. Hofmann, R. Ecke, S.E. Schulz, T. Gessner, "Investigations regarding Through Silicon Via filling for 3D integration by Periodic Pulse Reverse plating with and without additives", Microelectron. Eng. 88, pp 705-708 (2011), Online via DOI: 10.1016/j.mee.2010.06.040

K. Jiang, H.-X. Zhang, Y.-Y. Yang, R. Mothes, H. Lang, W.-B. Cai, "Facile Synthesis of Ag@Pd Satellites - Fe3O4 Core Nanocomposite as Efficient and Reusable Hydrogenation Catalysts", Chem. Commun. 47, pp 11924-11926 (2011), DOI: 10.1039/C1CC14675K

M. Ludemann, I.E. Brumboiu, O.D. Gordan, D.R.T. Zahn, "Surface-enhanced Raman effect in ultra-thin CuPc films employing periodic silver nanostructures", J. Nanoparticle Research 13 (11), pp 5855-5861 (2011), DOI: 10.1007/s11051-011-0564-z

M. Ludemann, O.D. Gordan, D.R.T. Zahn, "In Situ Surface Enhanced Raman Spectroscopy of Ultra-Thin CuPc Films", Talk, DPG Frühjahrstagung, Dresden (Germany), 13-18 March 2011

M. Ludemann, I.E. Brumboiu, O.D. Gordan, D.R.T. Zahn, "Vibrational Properties of Metal Phthalocyanine Thin Films", poster presentation, DPG Frühjahrstagung, Dresden (Germany), 13-18 March 2011

M. Ludemann, O.D. Gordan, D.R.T. Zahn, "Ultra-thin CuPc Films Investigated by a Combination of Surface Enhanced, Interference Enhanced, and Resonance Raman Spectroscopy", Talk, Optics of Surfaces and Interfaces 9 (OSI9), Akumal (Mexico), 19-23 September 2011

Y.F. Mei, A.A. Solovev, S. Sanchez, O.G. Schmidt, "Rolled-up nanotech on polymers: from basic perception to self-propelled catalytic microengines", Chem. Soc. Rev. 40(5), pp 2109-2119 (2011), DOI: 10.1039/c0cs00078g

M. Melzer, D. Makarov, A. Calvimontes, D. Karnaushenko, S. Baunack, R. Kaltofen, Y.F. Mei, O.G. Schmidt, "Stretchable Magnetoelectronics", ACS Nano 11(6), pp 2522-2526 (2011), DOI: 10.1021/nl201108b

R. Mothes, H. Lang, "New Phosphine Copper(I) and Silver(I) Dithiocarbamates as Suitable Precursors for the Deposition of Copper and Silver Sulfide", poster presentation, EuroCVD 18, Kinsale, Co. Cork (Ireland), 4-9 September 2011

S. Mueller, T. Waechtler, A. Tuchscherer, R. Mothes, O. Gordan, D. Lehmann, F. Haidu, S.E. Schulz, T. Gessner, H. Lang, D.R.T. Zahn, "An Approach for Cu ALD via Reduction of Ruthenium-Containing CuxO Films for the Metallization in Spintronic and ULSI Interconnect Systems", Talk, 11th International Conference on Atomic Layer Deposition (AVS ALD 2011), Cambridge, MA (USA), 26-29 June 2011

S. Mueller, T. Waechtler, L. Hofmann, A. Tuchscherer, R. Mothes, O. Gordan, D. Lehmann, F. Haidu, M. Ogiewa, L. Gerlich, S.-F. Ding, S.E. Schulz, T. Gessner, H. Lang, D.R.T. Zahn, X.-P. Qu, "Thermal ALD of Cu via Reduction of CuxO films for the Advanced Metallization in Spintronic and ULSI Interconnect Systems", Talk, IEEE 2011 Semiconductor Conference Dresden, Dresden (Germany), 27-28 September 2011, Proceedings, Online via DOI: 10.1109/SCD.2011.6068736

M. de Pauli, A. Malachias, H. Westfahl, J. Bettini, A. Ramirez, G.S. Huang, Y.F. Mei, O.G. Schmidt, "Study of roughness evolution and layer stacking faults in short-period atomic layer deposited HfO2/Al2O3 multilayers", J. Appl. Phys. 109(6), pp 063524 (2011), DOI: 10.1063/1.3555624

M. Toader, M. Hietschold, "Tuning the Energy Level Alignment at the SnPc/Ag(111) Interface Using an STM Tip", J. Phys. Chem. C 115, pp 3099-3105 (2011), Online via DOI: 10.1021/jp111478v

M. Toader, M. Knupfer, D.R.T. Zahn, M. Hietschold, "Initial Growth of Lutetium(III) Bis-phthalocyanine on Ag(111) Surface", J. Am. Chem. Soc. 133, pp 5538-5544 (2011), Online via DOI: 10.1021/ja200168a

M. Toader, M. Knupfer, D.R.T. Zahn, M. Hietschold, "Initial growth at the F16CoPc/Ag(111) interface", Surf. Sci. 605, pp 1510-1515 (2011), Online via DOI: 10.1016/j.susc.2011.05.024

M. Toader, M. Hietschold, "SnPc on Ag (111): a Scanning Tunneling Microscopy Study at the Sub-molecular Level", J. Phys. Chem. C 115, pp 12494-12500 (2011), Online via DOI: 10.1021/jp201933s

M. Toader, M. Hietschold, "Tuning the Energy Level Alignment at the SnPc/Ag(111) Interface Using an STM Tip", poster presentation, DPG Frühjahrstagung, Dresden (Germany), 13-18 March 2011

A. Tuchscherer, Y. Shen, A. Jakob, R. Mothes, M. Al-Anber, B. Walfort, T. Rüffer, S. Frühauf, R. Ecke, S.E. Schulz, T. Gessner, H. Lang, "Lewis-base Copper(I) Formates: Synthesis, Reaction Chemistry, Structural Characterization and Their Use as Spin-Coating Precursors for Copper Deposition", Inorg. Chim. Acta 365 (1), pp 10-19 (2011), Online via DOI: 10.1016/j.ica.2010.05.048

A. Tuchscherer, D. Schaarschmidt, S. Schulze, M. Hietschold, H. Lang, "Simple and Efficient: Gold Nanoparticles from Triphenylphosphane Gold(I) Carboxylates Without Addition of any Further Stabilising and Reducing Reagent", Inorg. Chem. Commun. 14 (5), pp 676-678 (2011), Online via DOI: 10.1016/j.inoche.2011.02.003

A. Tuchscherer, D. Schaarschmidt, S. Schulze, M. Hietschold, H. Lang, "Simple and Efficient: Ethylene Glycol Isonitrile Gold(I) Chlorides for the Formation and Stabilization of Gold Nanoparticles", Eur. J. Inorg. Chem. 28, pp 4421-4428 (2011)

A. Tuchscherer, H. Lang, "Precursor Synthesis and Thermal Studies for Ruthenium and Ruthenium Oxide Deposition", poster presentation, EuroCVD 18, Kinsale, Co. Cork (Ireland), 4-9 September 2011

M. Woehrmann, M. Toepper, H. Walter, K.D. Lang, "Low Temperature Cure of BCB and the Influence on the Mechanical Stress", Talk, Electronic Components and Technology Conference (ECTC 2011), Lake Buena Vista, FL (USA), 31 May - 3 June 2011, Proceedings, pp 392-400

T. Waechtler, S.-F. Ding, L. Hofmann, R. Mothes, Q. Xie, S. Oswald, C. Detavernier, S.E. Schulz, X.-P. Qu, H. Lang, T. Gessner, "ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems", Microelectron. Eng. 88, pp 684-689 (2011), Online via DOI: 10.1016/j.mee.2010.07.004

T. Waechtler, S. Mueller, L. Hofmann, R. Mothes, S.-F. Ding, S.E. Schulz, H. Lang, X.-P. Qu, T. Gessner, "Copper Films Grown via Copper Oxide ALD Integrated with Different Liner Materials for Interconnect Applications", Talk, 11th International Conference on Atomic Layer Deposition (AVS ALD 2011), Cambridge, MA (USA), 26-29 June 2011

T. Waechtler, S. Mueller, S.E. Schulz, T. Gessner, "Process Development for the ALD of Thin Copper Films for ULSI Metallization Systems and Magnetosensors", Talk, SENTECH Plasma Process Technology Seminar, 22 November 2011

T. Waechtler, S. Mueller, R. Mothes, A. Tuchscherer, C. Schubert, D. Lehmann, F. Haidu, P. Schaefer, S.E. Schulz, H. Lang, M. Albrecht, D.R.T. Zahn, T. Gessner, "Copper ALD for Applications in ULSI Metallization Systems and Spintronic Layer Stacks", poster presentation, IMEC Workshop on Atomic Layer Deposition for Applications in Nanotechnology, Leuven (Belgium), 28-29 November 2011

D.R.T. Zahn, M. Ludemann, O.D. Gordan, P. Schäfer, G. Salvan, "The incorporation of metal nanostructures at organic/inorganic semiconductor interfaces", Talk, DPG Frühjahrstagung, Dresden (Germany), 13-18 March 2011

S. Zimmermann, N. Ahner, T. Fischer, M. Schaller, S.E. Schulz, T. Gessner, "A less damage patterning regime for a successful integration of ultra low-k materials in modern nanoelectronic devices", Talk, MRS Spring Meeting 2011, San Francisco, CA (USA), 25-29 April 2011

A. Zienert, J. Schuster, R. Streiter, T. Gessner, "Quantum mechanical methods for the simulation of electronic transport through carbon nanotubes", poster presentation, Materials for Advanced Metallization (MAM) & International Interconnect Technology Conference (IITC), Dresden (Germany), 8-12 May 2011, IEEE Proceedings, Online via DOI: 10.1109/IITC.2011.5940363

 

2010

N. Ahner, S. Zimmermann, M. Schaller, S.E. Schulz, "Optimized wetting behavior of water-based cleaning solutions for plasma etch residue removal by application of surfactants", 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (ICPSS), Ostende (Belgium), 20-22 September 2010

L. Ding, M. Friedrich, O. Gordan, D. R. T Zahn, "In situ investigation of CuPc thin films grown on vicinal Si(111)", Talk, 37th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-37), Santa Fe, NM (USA), 10-14 January 2010

L. Ding, C. Himcinschi, M. Friedrich, D. R. T Zahn, "Optical investigation of CuPc thin films on vicinal Si(111)", Phys. Stat. Sol. C 7, pp 312-315 (2010), Online via DOI: 10.1002/pssc.200982455

L. Ding, M. Friedrich, O. Gordan, D. R. T Zahn, "In situ investigation of CuPc thin films grown on vicinal Si(111)", J. Vac. Sci. Technol. B 28, pp C5F17 (2010), Online via DOI: 10.1116/1.3442797

L. Ding, M. Friedrich, O. Gordan, D.R.T. Zahn, "In situ investigation of CuPc thin films grown on vicinal Si(111)", poster presentation, 3rd NanoCharm School on Ellipsometry, Salzburg (Austria), 27 February - 5 March 2010

L. Ding, M. Friedrich, O. Gordan, D.R.T. Zahn, "In situ investigation of CuPc thin films grown on vicinal Si(111)", Talk, DPG Frühjahrstagung, Regensburg (Germany), 21-26 March 2010

S.-F. Ding, T. Waechtler, Q. Xie, H.-S. Lu, S.E. Schulz, X.-P. Qu, "Inhibition of enhanced Cu oxidation on ruthenium", Poster, 2010 International Interconnect Technology Conference (IITC), Burlingame, CA (USA), 6-9 June 2010, Proceedings, Online via DOI: 10.1109/IITC.2010.5510315

M. Falke, R. Terborg, A. Käppel, M. Rohde, M. Gass, B. Andrew, S. Hermann, "Coated Multiwall-Carbon-Nanotubes: EELS in Cs-corrected STEM and Liquid Nitrogen free EDS", poster presentation, 17th International Microscopy Congress (IMC17), Rio de Janeiro (Brasil), 19-24 September 2010

P. Feng, I. Moench, G.S. Huang, S. Harazim, E.J. Smith, Y.F. Mei, O.G. Schmidt, "Local-Illuminated Ultrathin Silicon Nanomembranes with Photovoltaic Effect and Negative Transconductance", Adv. Mater. 22(33), pp 3667-3671 (2010), DOI: 10.1002/adma.201000583

T. Fischer, N. Ahner, S. Zimmermann, M. Schaller, S.E. Schulz, "Influence of thermal cycles on the silylation process for recovering k-value and chemical structure of plasma damaged ultra-low-k materials", Talk, Advanced Metallization Conference 2010 (AMC 2010), Albany, NY (USA), 5-7 October 2010

N.T.N. Ha, M. Dieblich, M. Mehring, M. Hietschold, "Self-Assembly Structure of 3D-Molecule Benzene 1,3,5 Triphosphonic Acid (BTP) studied by Scanning Tunneling Microscopy (STM) at the Liquid- Solid Interface", poster presentation, DPG Frühjahrstagung, Regensburg (Germany), 22-27 March 2010

N.T.N. Ha, T.G. Gopakumar, M. Hietschold, "Control of molecular self-assembly at the liquid- solid interface (LSI) studied by scanning tunneling microscopy (STM)", Talk, 27th European Conference on Surface Sciences (ECOSS 27), Groningen (The Netherlands), 28 August - 3 September 2010

N.T.N. Ha, T.G. Gopakumar, R. Gutzler, M. Lackinger, H. Tang, M. Hietschold, "Influence of Solvophobic Effects on Self-Assembly of Trimesic Acid at the Liquid-Solid Interface", J. Phys. Chem. C 114 (8), pp 3531-3536 (2010), Online via DOI: 10.1021/jp907781a

S. Hermann, H. Fiedler, T. Waechtler, M. Falke, R. Ecke, S.E. Schulz, T. Gessner, "Approaches for Fabrication of Carbon Nanotube Vias", poster presentation, Nanoelectronic Days 2010, Aachen (Germany), 4-7 October 2010

S. Hermann, B. Pahl, R. Ecke, S.E. Schulz, T. Gessner, "Carbon Nanotubes for Nanoscale Low Temperature Flip Chip Connections", Microelectron. Eng. 87, pp 438-442 (2010), Online via DOI: 10.1016/j.mee.2009.05.027

S. Hermann, S. Loschek, Y. Haibo, J. Bonitz, S.E. Schulz, T. Gessner, "Integration von Kohlenstoffnanoröhren für MEMS/NEMS Anwendungen", Talk, 10. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Chemnitz (Germany), 20-21 October 2010

M. Hietschold, N.T.N. Ha, T.G. Gopakumar, "Control of self-assembled pattern at the solid-liquid interface: Trimesic Acid (TMA) on HOPG(0001)", poster presentation, International Conference on Molecular Materials (MOLMAT), Montpellier (France), 5-8 July 2010

L. Hofmann, R. Ecke, S.E. Schulz, T. Gessner, "Metallisierungsverfahren für die 3D Integration in der Mikroelektronik und Mikrosystemtechnik", Galvanotechnik 101 (8), pp 1880-1884 (2010)

L. Hofmann, R. Ecke, S.E. Schulz, T. Gessner, "Investigations Regarding Through Silicon Via Filling for 3D Integration by Periodic Pulse Reverse Plating with and without Additives", poster presentation, Materials for Advanced Metallization - MAM, Mechelen (Belgium), 8-10 March 2010

L. Hofmann, R. Ecke, S.E. Schulz, T. Gessner, "Pulse Reverse Electroplating for TSV Filling in 3D Integration", poster presentation, Smart Systems Integration, Como (Italy), 23-24 April 2010, Proceedings, VDE Verlag GmbH, ISBN: 978-3-8007-3081-0

G.S. Huang, V.A.B. Quinones, F. Ding, S. Kiravittaya, Y.F. Mei, O.G. Schmidt, "Rolled-Up Optical Microcavities with Subwavelength Wall Thicknesses for Enhanced Liquid Sensing Applications", ACS Nano 4(6), pp 3132-3130 (2010), DOI: 10.1021/nn100456r

A. Jakob, T. Rueffer, H. Schmidt, P. Djiele, K. Koerbitz, P. Ecorchard, T. Haase, K. Kohse-Hoeinghaus, S. Fruehauf, T. Waechtler, S.E. Schulz, T. Gessner, H. Lang, "Disilver(I) Coordination Complexes: Synthesis, Reaction Chemistry, and Their Potential Use in CVD and Spin-Coating Processes for Silver Deposition", Eur. J. Inorg. Chem. 2010, pp 2975-2986 (2010), Online via DOI: 10.1002/ejic.201000159

A. Jakob, A. Tuchscherer, S. Dietrich, R. Mothes, H. Lang, "Metal and Metal Oxid Nanoparticles", poster presentation, 6. Thüringer Grenz- und Oberflächentage (ThGOT) 2010, Gera (Germany), 7-9 September 2010

H.X. Ji, X.L. Wu, L.Z. Fan, C. Krien, I. Fiering, Y.G. Guo, Y.F. Mei, O.G. Schmidt, "Self-Wound Composite Nanomembranes as Electrode Materials for Lithium Ion Batteries", Adv. Mater. 22(41), pp 4591-4595 (2010), DOI: 10.1002/adma.201001422

M. Kuechler, L. Hofmann, R. Hahn, A. Bertz, T. Gessner, "Fortschritte in der Anwendung des tiefen Siliziumätzens (DRIE)", 10. Chemnitzer Fachtagung Mikrosystemtechnik - Mikromechanik & Mikroelektronik, Chemnitz (Germany), 20-21 October 2010

M. Ludemann, O.D. Gordan, C. Brombacher, M. Albrecht, D.R.T. Zahn, "Surface Enhanced Raman Effect of CuPc Employing Silver Nanostructures Prepared by Nanosphere Lithography", poster presentation, DPG Frühjahrstagung, Regensburg (Germany), 21-26 March 2010

M. Ludemann, O.D. Gordan, D.R.T. Zahn, "Surface Enhanced Raman Effect of Ultra-Thin CuPc Films Employing Silver Nanostructures Prepared by Nanosphere Lithography", Talk, X International Conferece on Nanostructured Materials (NANO2010), Rome (Italy), 13-17 September 2010

M. Ludemann, O.D. Gordan, D.R.T. Zahn, "Surface Enhanced Raman Effect of CuPc Employing Silver Nanostructures", poster presentation, Symposium - Confocal Raman Imaging, Ulm (Germany), 5-6 October 2010

Y.F. Mei, S. Kiravittaya, S. Harazim, O.G. Schmidt, "Principles and applications of micro and nanoscale wrinkles", Mat. Sci. Eng. R 70(3-6), pp 209-224 (2010), DOI: 10.1016/j.mser.2010.06.009

R. Mothes, H. Lang, "New Materials and Chemistry: Small Molecules - Great Progress", poster presentation, Global Challenges for Sustainable Development, (GCSD'2010), Sustainable Chemistry and Related Areas, Rennes (France), 25-26 February 2010

R. Mothes, T. Rüffer, Y. Shen, A. Jakob, B. Walfort, H. Petzold, S.E. Schulz, R. Ecke, T. Gessner, H. Lang, "Phosphite Copper(I) Trifluoroacetates [((RO)3P)mCuO2CCF3] (m = 1, 2, 3): Synthesis, Solid State Structures and Their Use as CVD Precursors", Dalton Trans. 39 (46), pp 11235-11247 (2010), Online via DOI: 10.1039/C0DT00347F

S. Mueller, T. Waechtler, A. Tuchscherer, R. Mothes, S.E. Schulz, T. Gessner, H. Lang, "Investigation of Formic Acid Reduction of Ruthenium-Containing Copper Oxide Layers Prepared by ALD ", Talk, Baltic ALD 2010 & GerALD 2, Hamburg (Germany), 16-17 September 2010

T. Oszinda, M. Schaller, D. Fischer, C. Walsh, S.E. Schulz, "Investigation of physical and chemical property changes of ultra low-k SioCH in aspect of cleaning and chemical repair processes", Microelectron. Eng. 87, pp 457-461 (2010), online via DOI: 10.1016/j.mee.2009.06.028

T. Oszinda, M. Schaller, K. Dittmar, Le Jinag, S.E. Schulz, "How to Evaluate Surface Free Energies of Dense and Ultra Low-k Dielectrics in Pattern Structure", Talk, Materials for Advanced Metalization Conference (MAM), Mechelen (Belgium), 07-10 March 2010

T. Oszinda, M. Schaller, K. Dittmar, Le Jinag and S.E. Schulz, "How to Evaluate Surface Free Energies of Dense and Ultra Low-k Dielectrics in Pattern Structure", Talk, Electrochemical Society Meeting (217th ECS), Vancouver (Canada), 25-30 April 2010

T. Oszinda, M. Schaller, K. Dittmar, Le Jinag, S.E. Schulz, "How to Evaluate Surface Free Energies of Dense and Ultra Low-k Dielectrics in Pattern Structure", ECS Trans. 28 (2), pp 355-360 (2010), Online via DOI: 10.1149/1.3372590

T. Oszinda, M. Schaller, S.E. Schulz, "Chemical Repair of Plasma Damaged Porous Ultra Low-k SiOCH Film using a Vapor Phase Process", ECS Trans. 25 (38), pp 19-30 (2010), Online via DOI: 10.1149/1.3390654

S. Sanchez, A.A. Solovev, Y.F. Mei, O.G. Schmidt, "Dynamics of Biocatalytic Microengines Mediated by Variable Friction Control", J. Am. Chem. Soc. 132(38), pp 13144-13145 (2010), DOI: 10.1021/ja104362r

P. Shukrynau, M. Toader, M. Hietschold, "Adsorption of cobalt phthalocyanine on rutile TiO2 (110) surfaces: interface formation", Talk, DPG Frühjahrstagung, Regensburg (Germany), 21-26 March 2010

P. Singh, S. Zimmermann, S. Schulze, S. Schulz, M. Hietschold, "TEM/EELS analysis of ultra low-k inter-metal dielectric", 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), Shanghai (China), 1-4 November 2010, Proceedings, pp 1015-1017 (2010), Online via DOI: 10.1109/ICSICT.2010.5667524

U. Siegert, H. Hahn, H. Lang, "Investigation of the solution behavior of tri-n-butylphosphine copper(I) and silver(I) acetates using 31P{1H} NMR spectroscopy", Inorg. Chim. Acta 363 (5), pp 944-948 (2010), Online via DOI: 10.1016/j.ica.2009.12.027

L. Smykalla, M. Toader, P. Shukrynau, M. Hietschold, "Exploring the CoPc@HOPG interface: STM and STS study", poster presentation, DPG Frühjahrstagung, Regensburg (Germany), 21-26 March 2010

M. Toader, T. G. Gopakumar, M. Abdel-Hafiez, M. Hietschold, "Exploring the F16CoPc/Ag(110) Interface Using Scanning Tunneling Microscopy and Spectroscopy. Part 1: Template-Guided Adlayer Structure Formation", J. Phys. Chem. C 114, pp 3537-3543 (2010), Online via DOI: 10.1021/jp9078019

M. Toader, T. G. Gopakumar, P. Shukrynau, M. Hietschold, "Exploring the F16CoPc/Ag(110) Interface Using Scanning Tunneling Microscopy and Spectroscopy. Part 2: Adsorption-Induced Charge Transfer Effect", J. Phys. Chem. C 114, pp 21548-21554 (2010), Online via DOI: 10.1021/jp1078295

M. Toader, P. Shukrynau, M. Hietschold, "In-situ growth and electronic structure monitoring at the F16CoPc/Ag(111) interface", poster presentation, IVth International Conference on Molecular Materials, Montpellier (France), 5-8 July 2010

M. Toader, P. Shukrynau, M. Hietschold, "STM and STS study at the organic-metal interface: Adsorption of CoPc on Ag(111) surface", Talk, DPG Frühjahrstagung, Regensburg (Germany), 21-26 March 2010

A. Tuchscherer, H. Lang, "Gold Nanoparticles Generated by Thermolysis of Gold(I) Carboxylates", poster presentation, 3rd EuCheMS Chemistry Congress, Nürnberg (Germany), 29 August - 2 September 2010

T. Waechtler, "Thin Films of Copper Oxide and Copper Grown by Atomic Layer Deposition for Applications in Metallization Systems of Microelectronic Devices", PhD Thesis, Chemnitz University of Technology, published by Universitätsverlag Chemnitz, ISBN: 978-3-941003-17-0. Online: http://archiv.tu-chemnitz.de/pub/2010/0072

T. Waechtler, S.-F. Ding, L. Hofmann, R. Mothes, Q. Xie, S. Oswald, C. Detavernier, S.E. Schulz, X.-P. Qu, H. Lang, T. Gessner, "ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems", Talk, Materials for Advanced Metallization (MAM), Mechelen (Belgium), 7-10 March 2010

H. Wolf, R. Streiter, M. Friedemann, P. Belsky, O. Bakaeva, T. Letz, T. Gessner, "Simulation of TaNx deposition by Reactive PVD", Microelectron. Eng. 87, pp 1907-1913 (2010), online via DOI: 10.1016/j.mee.2009.11.044

S. Zimmermann, N. Ahner, F. Blaschta, M. Schaller, H. Zimmermann, H. Ruelke, N. Lang, J. Roepcke, S.E. Schulz, T. Gessner, "Etch processes for dense and porous SiCOH materials: plasma states and process results", 3rd International Workshop Plasma Etch and Strip in Microelectronics (PESM 2010), Grenoble (France), 4-5 March 2010

S. Zimmermann, N. Ahner, F. Blaschta, M. Schaller, H. Ruelke, S.E. Schulz, T. Gessner, "Analysis of the impact of different additives during etch processes of dense and porous low-k with OES and QMS", Microelectron. Eng. 87, pp 337-342 (2010), online via DOI: 10.1016/10.1016/j.mee.2009.08.004

A. Zienert, J. Schuster, R. Streiter, T. Gessner, "Transport in carbon nanotubes: Contact models and size effects", Phys. Stat. Sol. B, 247, pp 3002-3005 (2010), Online via DOI: 10.1002/pssb.201000178

A. Zienert, J. Schuster, R. Streiter, T. Gessner, "Electronic Transport through Carbon Nanotubes with Metal Contacts", poster presentation, IWEPNM, Kirchberg (Austria), 6-13 March 2010

A. Zienert, J. Schuster, R. Streiter, T. Gessner, "Electronic Transport in Carbon Nanotubes with Copper Contacts", poster presentation, Psi-k Conference, Berlin (Germany), 12-16 September 2010

S. Zimmermann, N. Ahner, T. Fischer, S.E. Schulz, T. Gessner, "A combined Etch, Cleaning and k-restore Process for less damage integration of ultra low-k materials", Talk, SEMICON 2010, Dresden (Germany), 19-21 October 2010

 

2009

M. Abdel-Hafiez, M. Toader, T.G. Gopakumar, A. Abbasi, M. Hietschold, "Adsorption Geometry and Molecular Orbital Structure of Fluorinated Cobalt Phthalocyanine (F16CoPc) Layers on HOPG Substrate", AKF Frühjahrstagung Dresden 2009, Abstract, ISSN: 0420-0195

N. Ahner, M. Schaller, C. Bartsch, E. Baryschpolec, S.E. Schulz, "Surface energy and wetting behaviour of plasma etched porous SiCOH surfaces and plasma etch residue cleaning solutions", Sol. St. Phen. 145-146, pp 319-322 (2009), Online via DOI: 10.4028/www.scientific.net/SSP.145-146.319

N. Ahner, T. Fischer, S. Zimmermann, M. Schaller, L. Prager, S.E. Schulz, "UV assisted curing of plasma damaged porous ultralow-k materials for a k-recovery process: influence of curing-cycle modifications", poster presentation, Advanced Metallization Conference 2009 (AMC 2009), Baltimore, MD (USA), 13-15 October 2009

N. Ahner, S.E. Schulz, M. Zacher, "Surfactants as an Additive to Wet Cleaning Solutions for Plasma Etch Residue Removal: Compatibility to a Porous CVD-SiCOH Ultra Low-k Dielectric Material", 216th ECS Meeting, Vienna (Austria), 4-9 October 2009, ECS Trans. 25 (5), pp 87-94 (2009), Online via DOI: 10.1149/1.3202639

M. Baum, L. Hofmann, M. Wiemer, T. Gessner, "Solid-Liquid-Interdiffusion Bonding für 3D-Integration und Wafer-Level-Packaging", Talk, MST-Kongress 2009, Berlin (Deutschland), 12-14 October 2009, Proceedings

J. Bonitz, S. Hermann, S. Loschek, P. Liu, S.E. Schulz, "Selective deposition of aligned carbon nanotubes for NEMS applications", poster presentation, GMM-Workshop Mikro-Nano-Integration, Seeheim (Germany), 12-13 March 2009

J. Bräuer, L. Hofmann, T. Werner, M. Wiemer, T. Gessner, "Herstellung und Evaluierung nanoskaliger reaktiver Strukturen für den Einsatz von Niedertemperatur-Bondverfahren in der Mikrosystemtechnik", Poster, MST-Kongress 2009, Berlin (Deutschland), 12-14 Oktober 2009, Proceedings

A. Clausner, F. Richter, "Research into the parallel determination of Young's modulus E and Poisson's ration via normal and lateral nanoindentation experiments", Talk, DPG Frühjahrstagung, Dresden (Germany), 22-27 March 2009

L. Ding, F. Seidel, C. Himcinschi, M. Friedrich and D.R.T. Zahn, "In Situ Investigation of Phthalocyanine Thin Films Grown on H-Si(111)", Poster, 5th Workshop of Spectroscopic Ellipsometry, Zweibrücken (Germany), 2-4 March 2009

L. Ding, F. Seidel, S. Pop, C. Himcinschi, M. Friedrich and D.R.T. Zahn, "Optical Properties and Morphology of CuPc Films on Vicinal Si(111)", Talk, DPG Frühjahrstagung, Dresden (Germany), 22-27 March 2009

L. Ding, C. Himcinschi, M. Friedrich, D. R. T Zahn, "Optical investigation of CuPc thin films on vicinal Si(111)", Poster presentation, 12th International Conference on the Formation of Semiconductor Interfaces, Weimar (Germany), 05-12 July 2009

I. Eidner, B. Wunderle, K.L. Pan, M.J. Wolf, O. Ehrmann, H. Reichl, "Design Study of the Bump on Flexible Lead by FEA for Wafer Level Packaging", 10th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE), Delft (The Nederlands), 27-29 April 2009, Proceedings, pp 348-354, ISBN: 978-1-4244-4159-4

T. Gessner, S. Leidich, M. Nowack, J. Froemel, L. Hofmann, S. Kurth, A. Bertz, "Micro Devices for RF Applications", Talk, ISMOT 2009, New Delhi (India), 16-19 December 2009, Proceedings

M. Guttmann, K. Kaiser, S. Muth,H. M. Moritz, R. Schmidt, M. Zwanzig, L. Hofmann, I. Schubert, "Modular aufgebaute „process-unit“ – neues Anlagenkonzept für nasschemische Ätzprozesse und die Wafergalvanoformung, Galvanotechnik", Talk, ZVO-Oberflächentage, Bremen (Germany), September 2009, Proceedings

S. Hermann, R. Ecke, B. Pahl, S.E. Schulz, "Growth of carbon nanotubes on different support/catalyst systems for interconnect and sensor applications", Talk, DPG Frühjahrstagung, Dresden (Germany), 22-27 March 2009

S. Hermann, S. Loschek, J. Bonitz, L. Ping, S.E. Schulz, "Low temperature aligned deposition of carbon nanotubes for nanoscale interconnects and NEMS applications", poster presentation, DPG Frühjahrstagung, Dresden (Germany), 22-27 March 2009

S. Hermann, B. Pahl, R. Ecke, T. Waechtler, S.E. Schulz, "Carbon Nanotubes for Low Temperature Flip Chip Connections", poster presentation, Tenth International Conference on the Science and Application of Nanotubes - NT09, Beijing (China), 21-26 June 2009

S. Hermann, R. Ecke, B. Pahl, S.E. Schulz, "Growth of carbon nanotubes on different support/catalyst systems for interconnect and sensor applications", Talk, China International Micro-Nano Expo (CIMNE), Shanghai (China), 1-3 April 2009

L. Hofmann, R. Ecke, S.E. Schulz, T. Gessner, "Metallisierungsverfahren für die 3D Integration in der Mikroelektronik und Mikrosystemtechnik", Talk, 12. Werkstofftechnisches Kolloquium und 8. Industriefachtagung Oberflächen- und Wärmebehandlungstechnik 2009, Chemnitz (Germany), 1-2 Oktober 2009, Tagungsband zum 12. Werkstofftechnisches Kolloquium WTK, pp 120-125, ISBN: 978-3-00-029007-7

L. Hofmann, J. Braeuer, M. Baum, S.E. Schulz, T. Gessner, "Electrochemical deposition of reactive nanoscale metallization systems for low temperature bonding in 3D integration", Talk, Advanced Metallization Conference 2009 (AMC 2009), Baltimore, Md (USA), 13-15 October 2009, Proceedings, pp 241-252, ISBN: 978-1-605-11218-3

Y.-C. Lin, J. Bräuer, L. Hofmann, M. Baum, J. Froemel, M. Wiemer, M. Esashi, T. Gessner, "Nanofabrication of Reactive Structure for Low Temperature Bonding", Talk, IEEE Nanomed Conference, 18-21 October 2009, Proceedings, pp 313-317, DOI: 10.1109/NANOMED.2009.5559063

D. Makarov, P. Krone, D. Lantiat, C. Schulze, A. Liebig, C. Brombacher, M. Hietschold, S. Hermann, C. Laberty, D. Grosso, M. Albrecht, "Magnetization Reversal in Arrays of Magnetic Nanoperforations", IEEE Trans. Magn. 45 (10), pp 3515-3518 (2009), Online via DOI: 10.1109/TMAG.2009.2025181

P. Moeck, M. Toader, M. Abdel-Hafiez, M. Hietschold, "Quantifying and enforcing two-dimensional symmetries in scanning probe microscopy images", Frontiers of Characterization and Metrology for Nanoelectronics: 2009, AIP Conference Proceedings 1173, pp 294-298 (2009), Online via DOI: 10.1063/1.3251237

S. Mohammadzadeh, R. Streiter, T. Gessner, "Theoretical study of geometry dependent I-V characteristics of copper and gold quantum point contacts", Talk, DPG Frühjahrstagung, Dresden (Germany), 22-27 March 2009

S. Mohammadzadeh, R. Streiter, T. Gessner, "Geometry dependent of I-V characteristics of gold atomic-sized contacts", Talk, 9th Nanotechnology Conference, Genoa (Italy), 26-30 July 2009, Proceedings, pp 884-886, ISSN: 1944-9399

S. Mohammadzadeh, R. Streiter, T. Gessner, "Electronic transport properties of copper atomic wires", Poster, Advanced Metallization Conference 2009 (AMC 2009), Baltimore (USA), 13-15 October 2009, MRS Proceeding of the AMC 2009, pp 127-131, ISBN: 978-1-605-11218-3

T. Oszinda, M. Schaller, D. Fischer, S. Leppack, S.E. Schulz, "Investigation of physical and chemical properties of ultra low-k SiCOH layers with respect to cleaning and repair processes", Talk, Materials for Advanced Metallization Conference (MAM), Grenoble (France), 8-11 March 2009

T. Oszinda, M. Schaller, D. Fischer, S. Leppack, S.E. Schulz, "Characterization of plasma damaged porous ULK SiCOH layers in aspect of changes in the diffusion behavior of solvents and repair-chemicals", Poster, IEEE International Interconnect Technology Conference (IITC), Sapporo (Japan), June 2009

T. Oszinda, V. Beyer, M. Schaller, D. Fischer, C. Bartsch, S.E. Schulz, "Improved characterization of Fourier transform infrared spectra analysis for post-etched ultra-low-k SiOCH dielectric using chemometric methods", J. Vac. Sci. Technol. B 27 (1), pp 521-526 (2009), online via DOI: 10.1116/1.3043466

T. Oszinda, M. Schaller, D. Fischer, S. Leppack, S.E. Schulz, "Characterization of plasma damaged porous ULK SiCOH layers in aspect of changes in the diffusion behavior of solvents and repair-chemicals", Proceedings of the 12th IEEE International Interconnect Technology Conference (IITC), Sapporo (Japan), June 2009

T. Oszinda, M. Schaller, S.E. Schulz, "Chemical Repair of Plasma Damaged Porous Ultra Low-k SiOCH Film using a Vapor Phase Process", Talk, Electrochemical Society Meeting (216th ECS), Vienna (Austria), 4-9 October 2009

T. Oszinda, M. Schaller, S.E. Schulz, "Restoration of Plasma Damaged Porous Ultra Low-k SiOCH Films: A Coating Process with UV Activation Versus a Vapor Phase Process with Thermal Activation", Talk, Advanced Metallization Conference 2009 (AMC 2009), Baltimore (USA), 13-15 October 2009, MRS Proceeding of the AMC 2009, pp 55-64, ISBN: 978-1-605-11218-3

H. Schletter, M. Falke, S. Schulze, M. Hietschold, G. Beddies, M. Albrecht, K. de Kayser, C. Detavenier, A. Bleloch, "Texturuntersuchungen mittels EBSD: Betrachtung dünner Silicidschichten auf Si(001)", 15. Tagung Festkörperanalytik, Chemnitz (Germany), 12-16 Juli 2009

H. Schletter, S. Schulze, M. Hietschold, K. de Keyser, C. Detavenier, G. Beddies, M. Falke, "Texture analysis on the systemMn4Si7 @ Si(001): Combining statistical and microscopical information", AKF Frühjahrstagung Dresden 2009, Dresden (Germany), 2009, Abstract ISSN 0420-0195

S.E. Schulz, T. Waechtler, L. Hofmann, "Copper Films Grown via Copper Oxide ALD: Routes and Challenges for Integration with Next-Generation Interconnect Materials", Talk, Advanced Metallization Conference 2009 (AMC 2009), 19th Asian Session (ADMETA 2009), Tokyo (Japan), 19-21 October 2009

K. Schulze, S.E. Schulz, H. Koerner, T. Gessner, "Airgap structures by using sacrificial wet etch: Fabrication, thermal and mechanical behavior, reliability", Advanced Metallization Conference 2008 (AMC 2008), San Diego, CA (USA), 23-25 September 2008, MRS Conf. Proc. AMC XXIV, pp 41-52 (2009), ISSN: 978-1-60511-125-4

T. Toader, G. Gavrila, W. Braun, J. Ivanco, D.R.T. Zahn, "Valence Band Fine Structure of Copper Phthalocyanine Thin Films: Effect of Molecular Orientation", Phys. Stat. Sol. B 246, pp 1510-1518 (2009), DOI: 10.1002/pssb.200945141

T. Toader, G. Gavrila, J. Ivanco, W. Braun, D.R.T. Zahn, "Controlling Geometric and Electronic Properties of Highly-Ordered CuPc Thin Films", Appl. Surf. Sci. 255, pp 6806-6808 (2009), DOI: 10.1016/j.apsusc.2009.02.078

M. Toader, T. G. Gopakamur, M. Abdel-Hafiez, M. Hietschold, "STM and STS study of the F16CoPc / Ag(110) interface", Talk, 15. Tagung Festkörperanalytik, Chemnitz (Germany), 12-16 July 2009

M. Toader, T. G. Gopakamur, M. Abdel-Hafiez, M. Hietschold, "Template-guided self-assembly mechanism at F16CoPc / Ag(110) interface, revealed by STM", Poster, 15. Tagung Festkörperanalytik, Chemnitz (Germany), 12-16 July 2009

M. Toader, T. G. Gopakamur, M. Abdel-Hafiez, M. Hietschold, "Adsorption induce charge transfer effect at the F16CoPc / Ag(110) interface, revealed by STM / STS", Poster, 15. Tagung Festkörperanalytik, Chemnitz (Germany), 12-16 July 2009

M. Toader, T. G. Gopakamur, M. Abdel-Hafiez, M. Hietschold, "STM and STS study of F16CoPc adsorbed onto Ag(110) surface", Talk, DPG Frühjahrstagung, Dresden (Germany), 22-27 March 2009

T. Waechtler, T. Gessner, S. Schulz, H. Lang, A. Jakob, "Substrate having a coating comprising copper and method for the production thereof by means of atomic layer deposition", Patent Application Publication, WO 2009/071076 A1 (2009)

T. Waechtler, S.E. Schulz, L. Hofmann, "Copper Films Grown via Copper Oxide ALD: Routes and Challenges for Integration with Next-Generation Interconnect Materials", Talk, Advanced Metallization Conference 2009 (AMC 2009), Baltimore, Md (USA), 13-15 October 2009, MRS Proceeding of the AMC 2009, ISSN: 1048-0854

T. Waechtler, S. Oswald, N. Roth, A. Jakob, H. Lang, R. Ecke, S.E. Schulz, T. Gessner, A. Moskvinova, S. Schulze, M. Hietschold, "Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2", J. Electrochem. Soc. 156 (6), pp H453-H459 (2009), ISSN: 0013-4651, DOI: 10.1149/1.3110842

T. Waechtler, S. Schulze, L. Hofmann, S. Hermann, N. Roth, S.E. Schulz, T. Gessner, H. Lang, M. Hietschold, "Detailed Study of Copper Oxide ALD on SiO2, TaN, and Ru", Talk, AVS 9th International Conference on Atomic Layer Deposition (ALD 2009), Monterey, CA (USA), 19-22 July 2009

T. Waechtler, L. Hofmann, R. Mothes, S. Schulze, S.E. Schulz, T. Gessner, H. Lang, M. Hietschold, "Copper Oxide ALD from a Cu(I) beta-Diketonate: Growth Studies and Application as Seed Layers for Electrochemical Copper Deposition", 216th ECS Meeting, Vienna (Austria), 4-9 October 2009

T. Waechtler, L. Hofmann, S.E. Schulz, "Copper Films Grown via Copper Oxide ALD: Routes and Challenges for Integration with Next-Generation Interconnect Materials", Talk, Advanced Metallization Conference 2009 (AMC 2009), Baltimore, MD (USA), 13-15 October 2009

T. Waechtler, N. Roth, R. Mothes, S. Schulze, S.E. Schulz, T. Gessner, H. Lang, M. Hietschold, "Copper Oxide ALD from a Cu(I) beta-Diketonate: Detailed Growth Studies on SiO2 and TaN", ECS Trans. 25, pp 277-287 (2009), DOI: 10.1149/1.3205062

T. Waechtler, S. Schulze, L. Hofmann, S. Hermann, N. Roth, S.E. Schulz, T. Gessner, H. Lang, M. Hietschold, "Detailed Study of Copper Oxide ALD on SiO2, TaN, and Ru", AVS 9th International Conference on Atomic Layer Deposition (ALD 2009), Monterey, CA (USA), 19-22 July 2009, Online: http://archiv.tu-chemnitz.de/pub/2009/0129

S. Zimmermann, N. Ahner, F. Blaschta, M. Schaller, H. Zimmermann, H. Ruelke, N. Lang, J. Roepcke, S.E. Schulz, T. Gessner, "Improvement of etch processes for SiCOH materials with novel in situ diagnostic and evaluation methods", Talk, Advanced Metallization Conference 2009 (AMC 2009), Baltimore, MD (USA), 13-15 October 2009, Proceedings, pp 101-110, ISBN: 978-1-605-11218-3

S. Zimmermann, N. Ahner, F. Blaschta, M. Schaller, H. Ruelke, S.E. Schulz, T. Gessner, "Analysis of the impact of different additives during etch processes of dense and porous low-k with OES and QMS", Materials for Advanced Metallization Conference (MAM), Grenoble (France), 9-11 March 2009

H.-X. Zhang, U. Siegert, R. Liu, W.-B. Cai, "Facile Fabrication of Ultrafine Copper Nanoparticles in Organic Solvent", Nanoscale Res. Lett. 4, pp 705-708 (2009), DOI: 10.1007/s11671-009-9301-2

Zh. Zong, S. Mohammadzadeh, Y. Cao, Zh. Qiu, R. Liu, R. Streiter, T. Gessner , "Electrical resistivity calculations for copper nanointerconnect", Poster, Materials for Advanced Metallization Conference (MAM), Grenoble (France), 8-11 March 2009

Zh. Zong, S. Mohammadzadeh, Y. Cao, Zh. Qiu, R. Liu, R. Streiter, T. Gessner , "Electrical resistivity calculations for copper nanointerconnect", Materials for Advanced Metallization Conference (MAM), Grenoble (France), 8-11 March 2009, Microelectron. Eng. 87, pp 402-405 (2009), online via DOI: 10.1016/j.mee.2009.07.012

 

2008

M. Abdel-Hafiez, M. Toader, T. Gopakumar, M. Hietschold, "STM and STS on Ultrathin Organic Layers of Fluorinated Cobalt Phthalocyanine (F16CoPc) on Crystalline Substrates", Talk, DPG Frühjahrstagung Berlin (Germany), 25-29 February 2008

M. Abdel-Hafiez, M. Toader, T. Gopakumar, A. Abbasi, M. Hietschold, "Adsorption Structure of Fluorinated Cobalt Phthalocyanine (F16CoPc) Layers on Crystalline Substrates", Poster, Materials for Advanced Metallization Conference (MAM), Dresden (Germany), 2-5 March 2008

N. Ahner, M. Schaller, C. Bartsch, E. Baryschpolec, S.E. Schulz, "Surface energy and wetting behaviour of plasma etched porous SiCOH surfaces and plasma etch residue cleaning solutions", 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, Bruges (Belgium), 21-24 September 2008, Proceedings, pp 119-120

N. Ahner, S.E. Schulz, F. Blaschta, M. Rennau, "Optical, electrical and structural properties of spin-on MSQ low-k dielectrics over a wide temperature range", Materials for Advanced Metallization -- MAM, Dresden (Germany), 2-5 March 2008, Microelectron. Eng. 85, pp 2111-2113 (2008), online via DOI: 10.1016/j.mee.2008.05.029

N. Ahner, S.E. Schulz, L. Prager, M. Schaller, "UV assisted curing of plasma damaged porous ultralow-k material after a k-restore process: influence of UV-wavelength and curing ambient", Advanced Metallization Conference 2008 (AMC 2008), San Diego, CA (USA), 23-25 September 2008

I. Eidner, K. Buschick, L. Dietrich, K. L. Pan, M. Minkus, M. J. Wolf, O. Ehrmann, H. Reichl, "Bump on Flexible Lead for Wafer Level Packaging", 41st Annual International Symposium on Microelectronics (IMAPS), Providence, Rhode Island (USA), 2-6 November 2008

S. Hermann, S.E. Schulz, T. Gessner, "Controlling the formation of Nanoparticles for definite growth of Carbon Nanotubes", poster presentation, DPG Frühjahrstagung, Berlin (Germany), 25-29 February 2008

S. Hermann, R. Ecke, S.E. Schulz, T. Gessner, "Controlling the formation of nanoparticles for definite growth of carbon nanotubes for interconnect applications", MAM 2008 -- Materials for Advanced Metallization Conference, Dresden (Germany), 2-5 March 2008, Microelectron. Eng. 85 (10), pp 1979-1983 (2008), online via DOI: 10.1016/j.mee.2008.06.019

S. Hermann, S.E. Schulz, T. Gessner, "Growth of Multi-Walled Carbon Nanotubes on different Support/Catalyst Systems for Interconnect Applications", Ninth International Conference on the Science and Application of Nanotubes -- NT08, Montpellier (France), 29 June - 4 July 2008

L. Hofmann, M. Kuechler, T. Gumprecht, R. Ecke, S.E. Schulz, T. Gessner, "Investigations on via geometry and wetting behavior for the filling of Through Silicon Vias by copper electro depostition", Talk, Advanced Metallization Conference 2007 (AMC 2007), Albany, NY (USA), 9-11 October 2007, MRS Conf. Proc. AMC XXIV, pp 623-630 (2008), ISBN: 978-1-55899-992-3, ISSN: 1048-0854

A. Jakob, Y. Shen, T. Waechtler, S.E. Schulz, T. Gessner, R. Riedel, C. Fasel, H. Lang, "Copper(I) Carboxylates of Type [(nBu3P)mCuO2CR] (m = 1, 2, 3) -- Synthesis, Properties, and their Use as CVD Precursors", Z. Anorg. Allg. Chem. 634, pp 2226-2234 (2008), online via DOI: 10.1002/zaac.200800189

X.M. Jing, G. Engelmann, D. Chen, J. Wolf, O. Ehrmann, H. Reichl, "Profile of the wafer level ECD gold bumps under variable parameters", J. Mater. Sci.: Mater. Electron. 19 (6), pp 563-568 (2008), online via DOI: 10.1007/s10854-007-9387-1

S. Mohammadzadeh, D. Pouladsaz, R. Streiter, T. Gessner, "Quantum conductance of copper nanowires", DPG Frühjahrstagung, Berlin (Germany), 25-29 February 2008

S. Mohammadzadeh, D. Pouladsaz, R. Streiter, T. Gessner, "Electronic transport properties in copper nanowire", MAM 2008 -- Materials for Advanced Metallization Conference, Dresden (Germany), 2-5 March 2008, Microelectron. Eng. 85, pp 1992-1994 (2008), online via DOI: 10.1016/j.mee.2008.06.005

S. Mohammadzadeh, D. Pouladsaz, R. Streiter, T. Gessner, "Theoretical study of electron transfer through copper and gold nanowires", Nanoelectronics Day, Aachen (Germany), 13-16 May 2008

S. Mohammadzadeh, D. Pouladsaz, R. Streiter, T. Gessner, "Theoretical study of electronic transfer through gold and copper quantum point contacts", Advanced Metallization Conference 2008 (AMC 2008), San Diego, California (USA), 23-25 September 2008

A. Moskvinova, S. Schulze, M. Hietschold, I. Schubert, R. Ecke, S.E. Schulz, "Analysis of damascene-fabricated Cu lines by electron backscatter diffraction and X-ray diffraction", DPG Frühjahrstagung, Berlin (Germany), 25-29 February 2008

A. Moskvinova, S. Schulze, M. Hietschold, I. Schubert, R. Ecke, S.E. Schulz, "Effects of annealing on the microstructural evolution of copper films using texture analysis", EMC 2008 -- 14th European Microscopy Congress, Aachen (Germany), 1-5 September 2008

J.A.T. Norman, M. Perez, S.E. Schulz, T. Waechtler, "New precursors for CVD copper metallization", MAM 2008 -- Materials for Advanced Metallization Conference, Dresden (Germany), 2-5 March 2008, Microelectron. Eng. 85, pp 2159-2163 (2008), DOI: 10.1016/j.mee.2008.05.036

T. Oszinda, M. Schaller, S. Schulz, "Enhanced FTIR spectrum characterization of post etched ultra low-k SioCH with PCA and PLS", Workshop on Dielectrics in Microelectronics, Bad Saarow, Berlin (Germany), 23-25 June 2008

D. Pouladsaz, S. Mohammadzadeh, T. Gessner, M. Schreiber, R. Streiter, "Theoretical study of electron transfer through polyacetylene nanowires in different contact structures", DPG Frühjahrstagung, Berlin (Germany), 25-29 February 2008

N. Roth, A. Jakob, W. Wächtler, S.E. Schulz, T. Gessner, H. Lang, "Silver, Copper and Ruthenium Precursors for ALD and CVD - An Overview", Poster, GerALD 2008 -- German Workshop on Atomic Layer Deposition, Halle (Saale) (Germany), Max Planck Institute of Microstructure Physics, 22-23 September 2008

N. Roth, "Copper Complexes as Precursors for CVD Processes", 1. LUC-MitarbeiterInnen Workshop, Graz (Austria), TU Graz, Institute of Inorganic Chemistry, 27 September 2008

S. Rudra, T. Wächtler, M. Friedrich, S.J. Louis, C. Himcinschi, S. Zimmermann, S.E. Schulz, S. Silaghi, C. Cobet, N. Esser, T. Gessner, D.R.T. Zahn, "Spectroscopic ellipsometry study of thin diffusion barriers of TaN and Ta for Cu interconnects in integrated circuits", Phys. Stat. Sol. A 205 (4), pp 922-926 (2008), online via DOI: 10.1002/pssa.200777831

J. Sindu, S. Rudra, D. Lehmann, M. Friedrich, D.R.T. Zahn, "Vacuum ultraviolet ellipsometry investigation of ultrathin organic films and their heterostructures", Appl. Surf. Sci. 255 (3), pp 694-697 (2008), online via DOI: 10.1016/j.apsusc.2008.07.055

T. Toader, J. Ivanco, G. Gavrila, W. Braun, D.R.T. Zahn, "Growth of CuPc thin films and metal contact formation: A photoemission study", Poster, DPG Frühjahrstagung, Berlin (Germany), 25-29 February 2008

T. Toader, J. Ivanco, G. Gavrila, A. Firsov, W. Braun, D.R.T. Zahn, "Growth of CuPc Thin Films and Metal Top Contact Formation: A Photoemission Study", 14th International Conference on Solid Films and Surface, Dublin (Ireland), 29 June - 4 July 2008

T. Waechtler, S. Oswald, A. Pohlers, S. Schulze, S.E. Schulz, T. Gessner, "Copper and Copper Oxide Composite Films Deposited by ALD on Tantalum-Based Diffusion Barriers", Poster, Advanced Metallization Conference 2007 (AMC 2007), Albany, NY (USA), 9-11 October 2007, MRS Conf. Proc. AMC XXIII, pp 23-29 (2008), ISBN: 978-1-55899-992-3

T. Waechtler, S. Oswald, N. Roth, H. Lang, R. Ecke, S.E. Schulz, T. Gessner, "Atomic Layer Deposition of Ultra-Thin Copper and Copper Oxide Films for ULSI Metallization Purposes", Advanced Metallization Conference 2008 (AMC 2008), San Diego, CA (USA), 23-25 September 2008

T. Waechtler, S. Oswald, N. Roth, H. Lang, S.E. Schulz, T. Gessner, "ALD of Copper and Copper Oxide Thin Films for Applications in Metallization Systems of ULSI Devices", 8th International Conference on Atomic Layer Deposition -- ALD 2008, Bruges (Belgium), 29 June - 2 July 2008, Online: http://archiv.tu-chemnitz.de/pub/2008/0091

T. Waechtler, N. Roth, S. Oswald, H. Lang, S.E. Schulz, T. Gessner, "Atomic layer deposition of copper and copper oxide thin films for applications in microelectronic metallization systems", GerALD 2008 -- German Workshop on Atomic Layer Deposition, Halle (Saale) (Germany), 22-23 September 2008

T. Waechtler, S.E. Schulz, "Copper Oxide and Copper Thin Films Grown by ALD for Seed Layer Applications", Talk, Twenty Fifth International VLSI Multilevel Interconnection Conference -- VMIC, Fremont, California (USA), 28-30 October 2008

 

2007

N. Ahner, S.E. Schulz, F. Blaschta, M. Rennau, "Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics", Microelectron. Eng. 84 (11), pp 2606-2609 (2007), online via DOI: 10.1016/j.mee.2007.06.007

N. Ahner, S.E. Schulz, F. Blaschta, M. Rennau, "Thermal stability of spin-on MSQ low-k dielectrics", Poster, European Congress on Advanced Materials and Processes - EUROMAT, Nürnberg (Germany), 10-13 September 2007

O. Chukhrai, N. Schwarzer, F. Richter, "Determination of intrinsic stresses in thin films by nanoindentation", DPG Frühjahrstagung, Regensburg (Germany), 26-30 March 2007

O. Chukhrai, N. Schwarzer, F. Richter, "Concept for determination of intrinsic stresses by nanoindentation", 8th European Symposium on nano-mechanical Testing, Hückelhoven (Germany), 3-5 September 2007

S. Frühauf, T. Gessner, T. Haase, A. Jakob, K. Kohse-Hoeinghaus, H. Lang, S.E. Schulz, T. Wächtler, "Novel Copper(I) and Silver(I) Complexes as Precursors for Chemical Vapor Deposition and Spin-Coating of Copper and Silver", Smart Systems Integration 2007, Paris (France), 27-28 March 2007, Proceedings, pp 531-533

B. Graffel, F. Müller, A.-D. Müller, M. Hietschold, "Feedforward correction of nonlinearities in piezoelectric scanner constructions and its experimental verification", Rev. Sci. Instrum. 78, pp 053706 (2007), online via DOI: 10.1063/1.2736786

S. Leidich, L. Hofmann, T. Riemer, S. Kurth, I. Schubert, C. Kaufmann, T. Gessner, "Mikrospulen und RF-MEMS Varaktoren für die kernmagnetische Resonanzspektroskopie - Applikationen und Technologie", 8. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz (Germany), 14-15 November 2007

S. Leidich, L. Hofmann, T. Riemer, S. Kurth, T. Gessner, "Integrated Micro Resonators for Nuclear Magnetic Resonance Spectroscopy", Smart Systems Integration - SSI, Paris (France), 27-28 March 2007

A. Moskvinova, S. Schulze, M. Hietschold, "EBSD and EDX characterisation of copper films", Poster, E-MRS Fall Meeting 2007, Warsaw (Poland), 17-21 September 2007

N. Roth, A. Jakob, T. Waechtler, S.E. Schulz, T. Gessner, H. Lang, "Phosphane copper(I) complexes as CVD precursors", Surf. Coat. Technol. 201 (22-23), pp 9089-9094 (2007), online via DOI: 10.1016/j.surfcoat.2007.05.004

N. Roth, "Copper(I) Precursors for CVD and Spin-Coating", Talk, The 4th International Copper Interconnect Technology Symposium, Shanghai (China), 31 May 2007

N. Roth, A. Jakob, T. Waechtler, S.E. Schulz, T. Gessner, H. Lang, "Phosphane copper(I) complexes as CVD precursors", Poster, 16th EuroCVD, Den Haag (The Netherlands), September 2007

N. Roth, A. Jakob, T. Waechtler, S.E. Schulz, T. Gessner, H. Lang, "Phosphane copper(I) complexes as CVD precursors", Poster, Symposium "Molekulare Systeme", Chemnitz (Germany), November 2007

S. Rudra, M. Friedrich, S. Louis, O. Gordan, T. Wächtler, D. Zahn, "Spectroscopic ellipsometry study of thin diffusion barriers of TaN and Ta for Cu interconnects in integrated circuits", Poster, DPG Frühjahrstagung, Regensburg (Germany), 26-30 March 2007

S. Rudra, M. Friedrich, S.J. Louis, T. Wächtler, C. Himcinschi, D.R.T. Zahn, "Spectroscopic ellipsometry study of thin diffusion barriers of TaN and Ta for Cu interconnects in integrated circuits", Poster, 4th International Conference on Spectroscopic Ellipsometry, Stockholm (Sweden), 11-15 June 2007

S.E. Schulz, N. Ahner, "Deposition and properties of porous ultra-low-k dielectric films", Talk, 8th Seminar Porous Glasses - Special Glasses, Wroclaw (Poland), 4-8 September 2007

T. Toader, et al., "Controlling of the molecular orientation in ordered CuPc films via different passivations of vicinal Si(111) surfaces", Poster, European Conference on Molecular Electronics (ECME), Metz (France), 5-8 September 2007

T. Waechtler, N. Roth, S. Oswald, S.E. Schulz, H. Lang, T. Gessner, "Composite films of copper and copper oxide deposited by ALD", Poster, AVS 7th International Conference on Atomic Layer Deposition - ALD 2007, San Diego, California (USA), 24-27 June 2007

T. Waechtler, A. Jakob, N. Roth, S. Oswald, S.E. Schulz, H. Lang, T. Gessner, "Copper thin films grown via ALD of copper oxide", Talk, European Congress on Advanced Materials and Processes - EUROMAT, Nürnberg (Germany), 10-13 September 2007

 

2006

T. Waechtler, B. Gruska, S. Zimmermann, S.E. Schulz, T. Gessner, "Characterization of Sputtered Ta and TaN Films by Spectroscopic Ellipsometry", Talk, 8th International Conference on Solid-State and Integrated Circuit Technology (ICSICT-2006), Shanghai (China), 23-26 October 2006, Proceedings, pp 2184-2186, DOI: 10.1109/ICSICT.2006.306675

T. Waechtler, Y. Shen, A. Jakob, R. Ecke, S.E. Schulz, L. Wittenbecher, H.-J. Sterzel, K. Tiefensee, S. Oswald, S. Schulze, H. Lang, M. Hietschold, T Gessner, "Evaluation of Phosphite and Phosphane Stabilized Copper(I) Trifluoroacetates as Precursors for the Metal-Organic Chemical Vapor Deposition of Copper", Poster, Materials for Advanced Metallization Conference - MAM, Grenoble (France), 6-8 March 2006, Online: http://archiv.tu-chemnitz.de/pub/2006/0031

T. Waechtler, B. Gruska, S. Zimmermann, S.E. Schulz, T. Gessner, "Optical Properties of Sputtered Tantalum Nitride Films Determined by Spectroscopic Ellipsometry", Talk, 4th Workshop Ellipsometry, Berlin (Germany), 20-22 February 2006, Online: http://archiv.tu-chemnitz.de/pub/2006/0032

 

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