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Center for Microtechnologies
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For publications of years before 2003 please see our annual reports.

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Year 2022

Books

Blaudeck,T.; Meinecke,C.; Reuter,D.; Steenhusen,S.; Jain,A.; Hermann,S.; Schulz,S.E.; Zenkevich,E.I.; Korten,T.; Linke,H.: Chapter Biocomputation Using Molecular Agents Moving in Microfluidic Channel Networks: An Alternative Platform for Information Technology. in the book: Cyber-Physical Systems: Intelligent Models and Algorithms Part of the Studies in Systems, Decision and Control book series; 417, ed. by Alla G. Kravets , Alexander A. Bolshakov , Maxim Shcherbakov (2022) pp 15-27 (ISBN 978-3-030-95115-3, 978-3-030-95116-0)

Papers

Dill,P.; Ren,X.; Hintersatz,H.; Franz,M.; Dentel,D.; Tegenkamp,C.; Ebert,S.: Atomic layer deposition of titanium phosphate onto reinforcing fibers using titanium tetrachloride, water, and tris(trimethylsilyl) phosphate as precursors. Journal of Vacuum Science & Technology A, 2, 40 (2022) p 022403
Hu,X.; Schuster,J.: Chemical Mechanism of AlF3 Etching during AlMe3 Exposure: A Thermodynamic and DFT Study. The Journal of Physical Chemistry C, 126, 17 (2022) pp 7410-7420
Mutschall,D.; Kaiser,A.; Lehmkau,R.; Ebermann,M.; Neumann,N.; Mart,C.; Esslinger,S.; Neuber,M.; Weinreich,W.; Hiller,K.; Seiler,J.; Grossmann,T.D.; Shaporin,A.: Mikromechanisch strukturierter, CMOS-kompatibler pyroelektrischer Detektor auf der Basis von dotiertem HfO2 in Trenchzellen. MikroSystemTechnik Kongress, Stuttgart-Ludwigsburg (Deutschland), 2021 Nov 08.-10. (ISSN 1742-6596)
Reuther,C.; Santos-Otte,P.; Grover,R.; Heldt,G.; Woeehlke,G.; Diez,S.: Multiplication of Motor-driven Microtubules for Nanotechnological Applications. Nano Lett. 22(3), pp 926-934
Stoeckel,C.; Meinel,K.; Melzer,M.; Žukauskaitė,A.; Zimmermann,S.; Forke,R.; Hiller,K.; Kuhn,H.: Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors . Micromachines, 13, 4 (2022) p 625

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