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Year 2021

Papers

Saeidi,N.; Selvam,K.; Tortato,F.; Satwara,M.; Wiemer,M.: Characterization of Capacitive Micromachined Ultrasound Transducer (CMUT) for Targeted Applications in Harsh Environments. The 34th International Conference on Micro Electro Mechanical Systems. MEMS 2021, Online, 2021 Jan 25-29; Proceedings, pp 1-4
Selbmann,F.; Baum,M.; Meinecke,C.; Wiemer,M.; Otto,T.; Joseph.Y.: (Invited) Parylene C Based Adhesive Bonding on 6" and 8" Wafer Level for the Realization of Highly Reliable and Fully Biocompatible Microsystems. ; ECS Meeting Abstracts, MA2020-02 (2021) p 1616

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