Publications
For publications of years before 2003 please see our annual reports.
Year 2021
Papers
| Saeidi,N.; Selvam,K.; Tortato,F.; Satwara,M.; Wiemer,M.: Characterization of Capacitive Micromachined Ultrasound Transducer (CMUT) for Targeted Applications in Harsh Environments. The 34th International Conference on Micro Electro Mechanical Systems. MEMS 2021, Online, 2021 Jan 25-29; Proceedings, pp 1-4 |
| Selbmann,F.; Baum,M.; Meinecke,C.; Wiemer,M.; Otto,T.; Joseph.Y.: (Invited) Parylene C Based Adhesive Bonding on 6" and 8" Wafer Level for the Realization of Highly Reliable and Fully Biocompatible Microsystems. ; ECS Meeting Abstracts, MA2020-02 (2021) p 1616 |
