Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
The Research Center
The ZfM is one of the world's leading research centers in the field of microsystems technology and nano technologies. The aim is research and development of new technologies for the micro and nanosystems of tomorrow.
The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nanosystems. Together with partners from industry and research, we bring the developments into application.
ZfM at a Glance
Research News
Cattle Observer - Development of an animal monitoring system for dairy cows
The aim of the project was to develop a system (hardware, software, communication interfaces and antennas) for animal monitoring on dairy cows. For the Center for Microtechnologies, the main focus was on system integration and packaging and thus on the encapsulation or housing of the electronics and the implementation of the antenna directly into the housing using 3D-capable additive manufacturing processes.Read more
Innovative and sustainable semiconductor fabrication processes are the common goal
The center for micro- and nanotechnologies (ZfM) at Chemnitz university of technology takes the lead in the European collaborative project HaloFreeEtch, funded with almost four million Euro by the EU.Read more
MEMS chiplets from Chemnitz provide unclonable individual IP for trustworthy electronics and systems
The project VE-VIDES (2021 – 2025, VE-VIDES — Elektronikforschung connects 12 partners from industry and academics to develop design methods and hardware/software verification for the unique identification of electronic components and systems. The ZfM together with the chair SSE contributed to this project with the development of dedicated MEMS, electronics and fingerprint algorithms for hardware-security. Read moreThere is even more. Read all the research news.