Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
The Research Center
The ZfM is one of the world's leading research centers in the field of microsystems technology and nano technologies. The aim is research and development of new technologies for the micro and nanosystems of tomorrow.
The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nanosystems. Together with partners from industry and research, we bring the developments into application.
ZfM at a Glance
Research News
68 Millionen Euro für neuen Reinraum an der TU Chemnitz
Der Freistaat Sachsen plant weitere Investitionen in Wissenschaft und Forschung in Südwestsachsen. Am Zentrum für Mikro- und Nanotechnologien (ZfM) der TU Chemnitz soll ein neuer Reinraum für Forschung und Technologieentwicklung in nachhaltiger Mikroelektronik und Sensortechnik entstehen. Für das rund 68 Millionen Euro umfassende Vorhaben sollen nicht abgerufene EU-Fördermittel eingesetzt werden. Vorbehaltlich der Zustimmung der Europäischen Kommission stärkt das Projekt die Forschungsinfrastruktur der Universität und schafft neue Kooperationsmöglichkeiten mit Forschungseinrichtungen und Unternehmen.Read more
Jubiläums-Symposium "Microsystems for a Smart and Sustainable Future"
Wir feiern 35 Jahre ZfM – Zentrum für Mikro- und NanotechnologienRead more
From Quantum Light to Clean Water – GREENER Final Webinar
As part of the GREENER project, we are pleased to announce the upcoming GREENER Final Webinar – Single-Photon Technologies for Environmental Sensing, which will take place on 25 June 2026 online.Read moreThere is even more. Read all the research news.