Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
The Research Center
The ZfM is one of the world's leading research centers in the field of microsystems technology and nano technologies. The aim is research and development of new technologies for the micro and nanosystems of tomorrow.
The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nanosystems. Together with partners from industry and research, we bring the developments into application.
ZfM at a Glance
Research News
Best poster award for contribution to sustainable semiconductor technology
We are excited to share the news that our master student Namitha Regunath received the Best Poster Award at the Materials for Advanced Metallization (MAM) Conference in Chemnitz for her contribution "Simulation of Metal-assisted Halogen-Free Etching of Silicon".Read more
Patent für miniaturisierte Ultraschallwandler
Die wissenschaftlichen Mitarbeitenden des Zentrums für Mikro- und Nanotechnologien der TU Chemnitz haben offiziell ihre Urkunde für ein neues Verfahren zur Herstellung von miniaturisierten Ultraschallwandlern erhalten.Read more
Watch the 2nd webinar of the HaloFreeEtch project: Sustainability demands in Microelectronics: Innovations for a Greener Industry
After introducing the HaloFreeEtch project in our very successful first webinar, our second webinar focusses on the sustainability challenges in microelectronics. Two contributions from leading research institutions in Europe will highlight why we need to become more sustainable in electronics production.Read moreThere is even more. Read all the research news.