Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
The Research Center
The ZfM is one of the world's leading research centers in the field of microsystems technology and nano technologies. The aim is research and development of new technologies for the micro and nanosystems of tomorrow.
The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nanosystems. Together with partners from industry and research, we bring the developments into application.
ZfM at a Glance
Research News
From Quantum Light to Clean Water – GREENER Final Webinar
As part of the GREENER project, we are pleased to announce the upcoming GREENER Final Webinar – Single-Photon Technologies for Environmental Sensing, which will take place on 25 June 2026 online.Read more
Best poster award for contribution to sustainable semiconductor technology
We are excited to share the news that our master student Namitha Regunath received the Best Poster Award at the Materials for Advanced Metallization (MAM) Conference in Chemnitz for her contribution "Simulation of Metal-assisted Halogen-Free Etching of Silicon".Read more
Patent für miniaturisierte Ultraschallwandler
Die wissenschaftlichen Mitarbeitenden des Zentrums für Mikro- und Nanotechnologien der TU Chemnitz haben offiziell ihre Urkunde für ein neues Verfahren zur Herstellung von miniaturisierten Ultraschallwandlern erhalten.Read moreThere is even more. Read all the research news.