Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
The Research Center
The ZfM is one of the world's leading research centers in the field of microsystems technology and nano technologies. The aim is research and development of new technologies for the micro and nanosystems of tomorrow.
The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nanosystems. Together with partners from industry and research, we bring the developments into application.
ZfM at a Glance
Research News
Patent für miniaturisierte Ultraschallwandler
Die wissenschaftlichen Mitarbeitenden des Zentrums für Mikro- und Nanotechnologien der TU Chemnitz haben offiziell ihre Urkunde für ein neues Verfahren zur Herstellung von miniaturisierten Ultraschallwandlern erhalten.Read more
Watch the 2nd webinar of the HaloFreeEtch project: Sustainability demands in Microelectronics: Innovations for a Greener Industry
After introducing the HaloFreeEtch project in our very successful first webinar, our second webinar focusses on the sustainability challenges in microelectronics. Two contributions from leading research institutions in Europe will highlight why we need to become more sustainable in electronics production.Read more
PESM 2026: International Plasma Etch Workshop Moves to Grenoble – Call for Papers
Following the successful conference in Chemnitz in 2025, the Plasma Etch and Strip in Microtechnology (PESM) workshop series continues its journey across Europe. The 16th edition, PESM 2026, will take place in June 2026 in Grenoble, France.Read moreThere is even more. Read all the research news.