Research News
TU Chemnitz erhält Platz auf der Weltkarte für mikromechanische Ultraschallwandler
TUCaktuell berichtet über die aktuellen Entwicklungen im Bereich piezoelektrischer, mikromechanischer Ultraschallwandler Read more
Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures
This work presents the development and implementation of a low-temperature atomic layer deposition (ALD) process for metallic cobalt thin films. Computational analysis identified CoCOhept as the most promising candidate among a series of potential precursors. Simultaneously to the process development with CoCOhept, the chamber geometry has been co-optimized using computational fluid dynamics simulation. By this, the chamber height was identified as a critical factor for a homogenous precursor distribution. The predictions by the model are in good agreement with experiments employing varying chamber geometries. We demonstrate the integration of the process in high aspect-ratio silicon structures and on temperature sensitive 3D-photoresist structures. Read more
Two new publications on novel lightweight conductors based on graphene and graphite
We recently published two new publications on novel lightweight conductors based on graphene and graphite. The paper by Niemann et al. focusses on the improvment of the electrical conductivity of graphitic films by transition metal additives. A second recent paper by Stevens et al. highlights the record conductivity of drop-casted graphen-based films. Read more
PESM 2025 Konferenz in Chemnitz
Internationale Mikroelektronik-Experten treffen sich im Juni 2025 in Chemnitz zur PESM 2025 Konferenz, organisiert von Fraunhofer ENAS und IPMS. Die Veranstaltung behandelt aktuelle Herausforderungen und Innovationen im Bereich des Trockenätzens für die Mikro-, Nano und Bioelektronik. Read more
Habilitation auf dem Fachgebiet der Mikrosystemtechnik
Die Fakultät Elektrotechnik und Informationstechnik befähigt Dr. Chris Stöckel zur universitären Lehre auf dem Fachgebiet der Mikrosystemtechnik. Read more
Statistical Studies on Random Configurations of Silicon Germanium Carbon Alloys Using Density Functional Theory
SiGeC, a random alloy, is studied by means of density functional theory for different Si:Ge ratios across the whole composition range and small C concentrations of 1.6 and 3.2% in Si-rich alloys. The random occupation of lattice sites in SiGeC results in statistical variations of material properties, which we investigate using ≈20,000 random configurations. This is an alternative approach to methods such as the virtual crystal approximation or the special quasi-random structure method because the presented approach allows access to statistical fluctuations. These fluctuations can be seen in the formation energy of the SiGe alloy, and the fluctuations increase with increasing C content. Read more
Cattle Observer - Development of an animal monitoring system for dairy cows
The aim of the project was to develop a system (hardware, software, communication interfaces and antennas) for animal monitoring on dairy cows. For the Center for Microtechnologies, the main focus was on system integration and packaging and thus on the encapsulation or housing of the electronics and the implementation of the antenna directly into the housing using 3D-capable additive manufacturing processes. Read more
Innovative and sustainable semiconductor fabrication processes are the common goal
The center for micro- and nanotechnologies (ZfM) at Chemnitz university of technology takes the lead in the European collaborative project HaloFreeEtch, funded with almost four million Euro by the EU. Read more
MEMS chiplets from Chemnitz provide unclonable individual IP for trustworthy electronics and systems
The project VE-VIDES (2021 – 2025, VE-VIDES — Elektronikforschung connects 12 partners from industry and academics to develop design methods and hardware/software verification for the unique identification of electronic components and systems. The ZfM together with the chair SSE contributed to this project with the development of dedicated MEMS, electronics and fingerprint algorithms for hardware-security. Read more
Towards ecofriendly manufacturing and neuroinspired interfaces for semiconductors
Joint Collaboration with IOM launched: Research on energy-efficient semiconductors for computer chips with polyoxometalates (POMs). Read more
Plastic Waste Recycling─A Chemical Recycling Perspective
We propose the splitting of polymer chains using low-temperature atmospheric pressure plasma as a novel technology. To date, this technology has only been used for the surface treatment of plastic. However, it shows the potential for processing unsorted, low-value plastic waste, especially PE, PP, and mixed waste, which would otherwise be sent for incineration or to landfills. Mechanical recycling is often unsuitable for these waste streams, and competitive chemical recycling methods are not yet established on an industrial scale. Read more
DeDNAed Final Webinar: “Uniting disciplines: How DeDNAed combines physics and biology for novel biosensor development”
The scientists presented the current status and results of their work on an innovative biosensor platform based on DNA origami synthesis, biological recognition elements and their characterisation as well as wafer processing, surface integration and Raman-based sensor characterisation to around 50 interested listeners. Read more.png)
Save the date - training school on the subject of “Physics Meets Biology for a Cleaner Planet” on March 25-27, 2025, Genova, Italy
Save the date. European funded Project GREENER is organising a training school on the subject of “Physics Meets Biology for a Cleaner Planet” and all interested young researchers are cordially invited to attend. This event will take place in Genoa on March 25-27, 2025. Read more
Highly Robust and Heat-Tolerant Carbon-Nanotube-Based Physical Unclonable Functions
Hardware security 144-bit crossbar PUFs based on Carbon NanoTubes were fabricated with a CMOS compatible wafer-level technology and proven to be efficient hardware security primitives. Read more.jpg)
Nanoionic memories and PiezoMEMS for energy-autonomous sensor systems
The ZfM at Chemnitz University of Technology is developing system components for energy-autonomous vibration sensors for machine monitoring as part of the UpFuse ForMikro project. Critical machine vibrations are detected frequency-selectively by piezoelectric acceleration sensors and the measurement signal is stored on a nanoionic component. The ZfM is thus treading the path towards sensor systems without batteries and other electrical storage devices. Read more
The ZfM at the Long Night of Science
Electrical engineering in chip format: a tour of the clean rooms at Chemnitz University of Technology's Center for Micro and Nanotechnologies (ZfM) was one of the many items on the programme for TUC Day and the Long Night of Science on 27.04.24. Read more
ZfM becomes the Center for Micro and Nano Technologies and sets up ten new research fields
Now it is official, the former "Center for Microtechnologies" is from now on called the "Center for Micro and Nano Technologies". Hereby we want to highlight our increasing activites in nano technologies. Along with this we reorganize our research activities into 10 new research fields, each headed by experienced scientists. Read more
New ESF Plus Young Researchers Group investigates transferable knowledge-based process models for flexible manufacturing
The aim of the interdisciplinary ESF Plus Young Researchers Group WiProFlex is to develop knowledge-based process models for flexible manufacturing processes by linking data-based methods with process-specific physics-based simulations and expert knowledge. In order to develop reliable process models even with small amounts of data, WiProFlex is developing improved data science tools and suitable data infrastructures to effectively combine and expand these models in hybrid approaches with existing process-specific knowledge. Read more