Jump to main content
Center for Micro and Nano Technologies
About

The Center for Micro and Nanotechnologies ZfM at Chemnitz University of Technology is an institution of the Faculty of Electrical Engineering and Information Technology. It was founded in 1991 and is based on the Microelectronics Technical Center of the former Karl-Marx-Stadt University of Applied Sciences.

Our Mission

Microelectronics, microsystems technologies and nanotechnologies have become an integral part of our modern lives. All sectors and branches of industry are dependent on the innovative power of micro- and nanotechnology. The ZfM explores and develops new methods, materials, components and systems in the field of semiconductor technology together with industry and other research institutions.

Our Vision

The ZfM is one of the world's leading research centers in the field of microsystem technologies and nano technologies. The aim is research and development of new technologies for the micro- and nanosystems of the future. The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nano systems. Together with partners from industry and research, we bring the developments into application.

Professorships

The ZfM is supported by seven professorships, which focus their work on the related topics of

Hereby, the new challenges of advancing miniaturization and, in particular, the use of new materials and operating principles in nano technologies, are addressed. The cooperation is realized in particular in the processing in the ZfM's clean rooms. An extensive portfolio of silicon-based technological processes is available here. The competencies of the ZfM employees range from electrical engineering to physics, materials engineering and chemistry, simulation methods and reliability considerations.

Contribution to the Future

The ZfM contributes to the training of tomorrow's specialists through lectures and seminars in the field of micro- and nanotechnologies, smart systems integration and micro-optical components. In particular, the implementation of internships as well as projects, master and PhD theses in our clean rooms enables both students and doctoral candidates to receive a modern, practice-oriented education. The creativity and motivation of the ZfM's staff, their personal and professional development, the promotion of young scientists, and the attractive working conditions at the ZfM, which are also attractive for top international researchers, are essential in order to fulfill this mission.