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Center for Micro and Nano Technologies
People | ZfM | TU Chemnitz
TU Chemnitz
ZfM
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Center for Micro and Nano Technologies
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The people of the research center
Jacob Müller, TU Chemnitz
Research Fields
Dr. S. Hermann
Research Field Leader
1D/2D Nanodevices
Dr. D. Reuter
Research Field Leader
Advanced Micro and Nanopatterning
Dr. C. Stöckel
Research Field Leader
MEMS Technologies and Devices
Dr. Chr. Meinecke
Research Field Leader
Molecular Micro- and Nanosystems
Dr. M. Wiemer
Research Field Leader
Nanopackaging
Dr. M. Möbius
Research Field Leader
Photonics and MOEMS
Dr. S. Zimmermann
Research Field Leader
Miniaturized Plasma Systems
Dr. J. Langer
Research Field Leader
Process Models for Semiconductor Manufacturing
Dr. J. Schuster
Research Field Leader
Simulation of Nanotechnologies
Prof. S. E. Schulz
Research Field Leader
Spintronics and Interconnects
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