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Center for Micro and Nano Technologies
Project Details
Center for Micro and Nano Technologies 

ZIM: PermanentBond


Prof. Karla Hiller
Dirk Wünsch, Fraunhofer ENAS
Nano Quarz Wafer GmbH
01.03.2022 to 31.05.2024

The objective is to develop a joining technology at the wafer level that enables the production of glass/silicon/lithium tantalate composites with a TTV of less than 5µm in a material-friendly manner. Additionally, we aim to develop an analysis process for material-specific process requirements.