ZIM: PermanentBond
Prof. Karla Hiller
Dirk Wünsch, Fraunhofer ENAS
Nano Quarz Wafer GmbH
01.03.2022 to 31.05.2024
The objective is to develop a joining technology
at the wafer level that enables the production of glass/silicon/lithium
tantalate composites with a TTV of less than 5µm in a material-friendly manner.
Additionally, we aim to develop an analysis process for material-specific
process requirements.