DFG: Investigation of intrinsic damping effects and derivation of rules for a robust design of microsystems with high quality factors

MEMS structures will be designed and tested under high vacuum conditions and over temperature in order to distinguish the above mentioned effects from gas damping influences. Therefore, methods for theoretical and numeric modelling as well as test need to be further developed. The goal is to develop a deeper understanding of the causes and influencing factors of the various intrinsic damping effects and to derive design rules and guidelines for the design of high-quality structures and for manufacturing technology. To achieve this, the insights gained from the sub-areas of design, manufacturing, characterization, and numerical modeling must be combined. The results will then be transferred into corresponding design rules and compact models.