DFG: MEMS-based differential gradiometer (MBDG)

This novel concept eliminates the absolute acceleration (due to gravity) from the measurement signal, thus enabling highly sensitive detection of relative gravity changes. Compared to the state of the art in MEMS technology, an improvement of at least an order of magnitude is targeted. The new, patented multi-mass arrangement will be implemented on 6" wafers using optimized MEMS technology. For motion detection, capacitive detection of relative movements in the MEMS will be installed and tested to demonstrate the functional principle of the new sensor (possibly with the option of motion feedback). The achievable performance will be determined and demonstrated using a suitable measurement setup.