BMBF: Electronic compensation of fabrication tolerances of microsystem products demonstrated for a multi sensor for navigation (EKOFEM)
Prof. T. Gessner
LITEF GmbH Freiburg, GEMAC mbh Chemnitz, FhG IZM, Department Chemnitz
01.10.2001 to 31.12.2004
Development of electronic compensation methods of fabrication tolerances and their application for a high precision silicon multisensor (acceleration and angular rate measurement)