BMWK / ZIM: Entwicklung eines modularen Freischwingersystems für das induktive Bonden von mikroelektromechanischen Systemen – InduMFG

The initial objective of the project InduMFG is to design and develop a multi-coil system with a novel, segmented architecture embedded in double-sided, ceramic substrates with via interconnections. Additionally, the project aims to develop a new generator system consisting of a cluster of mini RF generators based on the free-running oscillator concept. This system will enable a separate, controlled heating of each coil cluster. Additionally, modules for heating and bonding experiments will be implemented. These modules will comprise the multi-coil system as well as components for applying pressure during the bonding process, coil cooling, establishing electrical connections for the generator system, substrate positioning, and metrology. In a subsequent project phase, the bonding module and generator system will be used to develop and evaluate an inductive wafer bonding process.