EU: Optical Characterisation Methods for MEMS Manufacturing - OCMMM

Local Project Manager

Prof. T. Gessner

Partners

GF Messtechnik GmbH (GFM), FhG.IWU, University of Twente-MESA, Thales Avionique (TH-AV), Yole Développement (YOLE), LioniX (LION), Warsaw University of Technology (WUT)

Duration

01.01.2001 to 30.06.2004

Optical Characterisation Methods for MEMS Manufacturing

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