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Center for Micro and Nano Technologies
Project Details
Center for Micro and Nano Technologies 

Industrial: Fabrication of multi-use acceleration sensors


Prof. T. Gessner
Fara New Technologies, Xi´an, China, GEMAC mbH Chemnitz
01.09.2001 to 31.08.2003

Development of an high precision acceleration sensor system and its fabrication technology; Fabrication of prototypes