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Center for Micro and Nano Technologies
Project Details
Center for Micro and Nano Technologies 

SMWA: Modular measurement system consisting of a tunable FPI and IR sensor - MODUL


Prof. T. Gessner
Infra Tec GmbH Dresden, GEMAC mbh Chemnitz
01.09.2003 to 31.08.2005

Development of layout and technology for a micromachined Fabry-Perot-Interferometer; Fabrication of prototypes