SMWA: Modular measurement system consisting of a tunable FPI and IR sensor - MODUL
Prof. T. Gessner
Infra Tec GmbH Dresden, GEMAC mbh Chemnitz
01.09.2003 to 31.08.2005
Development of layout and technology for a micromachined Fabry-Perot-Interferometer; Fabrication of prototypes