DFG: Forschergruppe 1713: Sensorische Mikro- und Nanosysteme TP5

Subproject 5 is targeted on the establishment of technological basics for the integration of carbon nanotubes (CNT) in MEMS/NEMS. Therefore the CVD (Chemical Vapor Deposition) method as well as the DEP (Dielectrophoresis) process will be deployed, whereby especially integrative aspects like scalability and reproducibility will be emphasized. Focal point is the specific placement and orientation of semi-conductive CNTs in special test and sensor structures. Thereby vital technological challenges like type selectivity, bonding, and complete integration at wafer-level will be addressed. Progressive simulation and also in situ methods will be applied for the development of the process. The functionalization of CNTs for the modification and extension of the sensor behavior is another main point. New precursors for the production of metallic and semi-conductive functionalizations will be developed and characterized. Processes like ALD (Atomic Layer Deposition) will be applied for their deposition.