VW-Stiftung: VW-Projekt (Phase 2): Piezoresistive Carbon Nanotubes for condition monitoring and reliability considerations

In the first project phase the fundamentals for the investigation and application of single-walled carbon nanotubes (SWCNTs) as piezoresistive sensing elements have been laid. With this research an actual batch processing compatible CNT/MEMS technology has been demonstrated for the first time. A MEMS test stage has been realized allowing to investigate mechanical and electrical properties of CNTs under mechanical load and to perform reliability studies on the CNT-metal interface. In the project renewal we will intensify those studies with a novel analytical approach on the one hand. With our wafer level technology we will realize a test system to do in situ transmission electron microscopy investigations providing unique insights into the CNT-metal contact physics under well-controllable strained condition. On the other hand we will bring fundamental investigations as well as CNT sensor technology to the next level by focusing on single-walled CNTs with a strongly restricted chiral distribution. This will enable a new class of high sensitive and strongly miniaturized devices allowing to pass from a static application to high frequency CNT-based piezoresistive vibration sensors for condition monitoring.