Annual Report 2002
Please select the chapter you are interested in below (all files in Adobe PDF format):
- 1. Preface
- 2. Organization / 3. Memberships / 4. Research activities
- 4.1 Current research activities
- 4.2 Collaborative Research Center No. 379 (Sonderforschungsbereich SFB)
- A1: Design of micromechanical components
- A2: A system level model in VHDL-AMS for a micromechanic vibration sensor array
- A4: Multiple band sensor arrays for vibration monitoring based on near-surfaced silicon bulk micromechanics
- B1: Sensor / Actor Arrays based on PVDF Film Flow measurement in liquids
- B2: Experimental characterisation, modell adaption and reliability: Micromechanical electrostatic field sensor for the detection of remanent charges
- C2: A Novel High Aspect Ratio Technology for MEMS Fabrication Using Standard Silicon Wafers
- C4: Microelectronic compatible scanner arrays of high frequency
- C5: Development and characterisation of a high aspect ratio vertical FET sensor for motion detection
- 4.3 Special reports
- Deposition of Low-kMaterials/Dielectric Barrier by spin-on and CVD on industrial low-k spin-on and CVD-tools
- SiO2-Aerogel Low-k Films: Improved Mechanical Properties as Pre-condition for Successful Integration
- Integration of Plasma Deposited Fluorocarbon Polymer Low k Material in a Copper / Low k Damascene Architecture
- Thermal Conductivity Measurement of Thin Dielectric Films Using the 3omega Technique
- Design of Complex Sensor-Actuator-Systems (EKOSAS)
- CAD for Micromechanical Systems
- Micromechanical Step-by-step Switchgear
- Microactuator with Diffraction Grating
- Electronic compensation of fabrication tolerances demonstrated for a novel micromachined gyroscope
- Interference Microscopic Techniques for Dynamic Testing of MEMS
- Tunable Fabry-Perot-Interferometer for 3 - 4.5 µmWavelength with BulkMicromachined Reflector Carrier
- DFG Teilprojekt: Sensor-actuator measurement system with high resolution
- Influence of Target Texture on the Deposition of Titanium Films by Long Throw Sputtering
- Integrated Circuits for MEMS - Design and Characterisation
- MEMS-Packaging
- Mach-Zehnder-Interferometer realized with silicon-oxynitride waveguides for optoelectronics
- Solar cell processing steps applied on RIE textured silicon surfaces
- KOH-Etching of the Curved Electrode of an In-plane Moving Edge Actuator
- 5. Cooperations with industry and universities / 6. Equipment and service offer / 7. Education
- 8. Colloquia/ Workshops at the Institute
- 9. Scientific publications / 10. Guests and special international relations
