Annual Report 2004

1. Preface
2. Organization
3. Memberships & connected institutes: Fraunhofer Institute, Nanotechnology Center of Excellence
4. Research activities
   
   • Current research projects
   • Collaborative Research Center No. 379 (Sonderforschungsbereich) "Arrays of micromechanical sensors and actuators"
     • A1: Design of micromechanical components
     • A2: Examination of the applicability of SystemC-AMS for the description of MEMS
     • A4: Multiple band sensor arrays for vibration monitoring based on near-surface silicon bulk micromechanics
     • B2: Experimental characterization, modell adaption and reliability
     • B5: Development of a spectral imaging technology based on microactuators with a diffraction grating
     • B6: Force-sensor arrays for Atomic Force Microscopy
     • C2: A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers
   • Special reports
     • Different SiH4 treatment of CVD TiN barrier layers for Cu metallization
     • Deposition and characterisation of ultra low k dielectric films for 45 nm node Cu interconnect systems of CMOS logic ICs
     • Polycyanurates - low k materials approach for IC metallization
     • Ultra low-k dielectric etching and stripping processes
     • Interface between porous ultra low-k materials for 45 nm node and diffusion barrier - pore sealing approaches
     • CMP process development for Cu/low-k based interconnect systems
     • Modeling of oxide CMP at chip scale
     • Extraction of keff of multilayer intermetal dielectric stacks by FEM simulation
     • Development of a high resolution acceleration sensor
     • The bonding and deep RIE (BDRIE) technology approach for high aspect ratio sensors and actuators
     • Novel high precision micromachined gyroscope
     • Modeling and simulation of MicroElectroMechanical Systems
     • Model building, control design and practical implementation of a high precision and high dynamical acceleration sensor
     • MEMS scanner for laser projection
     • Tunable Fabry-Perot-Filter for Infrared Radiation
     • Micro mirror spectrometer
     • Laser trimming of silicon micro mirror devices by ultra short pulse lasers
     • Optical characterization methods for MEMS manufacturing (OCMMM): On-chip integrated techniques in combination with micromirrors
     • A novel microactuator based on the working principle of a step-by-step switchgear
     • Fabrication of SOI substrates with buried silicide layers for BICMOS application
     • Micro igniters based on WSix thin films
     • Micro systems applications in biotechnology and health care
     • Bulk micromachined ultrasonic transducers
     • Oscillations of the direct tunneling current in a MOS capacitor (ultra-thin gate)
     • Schrödinger-Poisson solver for half-opened MOS structure
     • Deposition and characterization of amorphous hydrogenated diamond-like carbon films (a-C:H)
     • Results of active power cycling with high temperature swing
     • Using of high end design tools in education
     • Shape and Functional Elements of the Bulk Silicon Microtechnique
5. Cooperations with industry and universities
6. Equipment and service offer
7. Education
   • Lectures
   • Student exchange programmes
   • Project reports / Diploma theses / PhD
8. Colloquia / Workshops at the Institute
9. Scientific publications
10. Guests & special international relations