Chair Electronic Devices of Micro and Nano Technique

Prof. Dr. John Thomas Horstmann

Phone +49 (0)371 531 37114
john-thomas.horstmann@…

http://www.tu-chemnitz.de/etit/leb

Main research topics

• Integrated circuit design
• Device and circuit characterization on wafer-level
• Modeling of electronic devices

μ-Controller based on the Intel 8051

Extended description of Research topics

• Layout and verification of analog and mixed-signal circuit designs for microsystem technology
• Sensor signal evaluation and actuator control of discrete and integrated micro systems
• Modeling and simulation of electronic devices for microsystem electronics and sub-50nm-MOS-transistors
• Electrical measurement, development of test structures and parameter extraction on wafer-level
• Matching analysis on nano-sized CMOS transistors
• Integrated circuit design for microsystem electronics, especially low-noise, low-power and high-voltage
• Development, analysis and characterization of next generation nanoelectronic devices

The main research topics at the Professorship of Electronical Devices of Micro and Nano Technique are:

• Development of new circuit concepts for nanoelectronic mechanical systems,
• Evaluation of In-Die parameter variations, planning of experiments to reduce parameter deviations and assistance for suitable test structures creation,
• Evaluation and investigation of trench isolations and characterization of the electrical behavior,
• Development of strategies to reduce statistical parameter fluctuations of very small MOS-transistors,
• Development of low-power circuits using the weak-inversion region of MOS-Transistors for autarkic sensors and energy harvesting systems,
• Characterization and simulation of sub-50nm-MOS-transistors,
• Analysis of physical mechanisms of micro- and nanoelectronic devices,
• Evolution of measurement methods for analysis of the electrical parameters of next generation nanoelectronic devices,
• Invention of new materials in the CMOS-process for next generation nano devices.

Main areas of responsibility in the research activities of the “Microsystem Electronics” working group at the Professorship of Electronical Devices of Micro and Nano Technique are the development of integrated electronic micro systems and electronic micro and nano devices and the solution of customer-oriented problems.

The current research projects are:

• In the BMBF project “ModElan” a module platform for customized solutions of compact electrical drives are investigated
• Smart-power applications realized by a trench isolation, which contains the design of integrated high-voltage electronics and characterization of high-voltage isolation structures to optimize the production technology
• Research and development of applications for energy-efficient sensor systems and investigation of weak-inversion circuit techniques are the content of the “nano system integration network of excellence – application of nano technologies for energyefficient sensor systems”
• The DFG-Research Unit 1713 “Sensoric Micro- and Nanosystems” investigates at the integration of different technologies and functionalities in a micro system to transmit signals and information and to interact with the environment
• “SmartFilter – intelligent filter monitoring system” is a further BMBF project. The development of a system for accurate monitoring of the filter contamination level and the temperature is the project objective.
• Design of intellectual properties for the MEMS-technologies, currently for a 1μm-CMOS-technology with monolithic integrated pressure sensors
• Development of next generation electrical drive systems, e.g. electric motors with high efficiency and smart power control concepts
• Development of customized measuring strategies and characterization of In-Die parameter variations for semiconductor structures in nanotechnologies
• Electrical and physical design and characterization of analog and mixed-signal standard circuits for the CMOS-process
• Creation of simulation models for SOI-devices
• Investigation and modeling of isolation structures for high-voltage ICs