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Center for Microtechnologies
Chair Microtechnology

Chair Smart Systems Integration


Prof. Dr. rer. nat Harald Kuhn

Phone +49 (0)371 531 33009
Fax +49 (0) 371 - 531 833009


Main working fields

  • Development of new materials and processes for metallization systems in micro and nanoelectronics
  • Simulation and modeling of equipment and processes for micro and nanoelectronics as well as nano materials and nano structures
  • Development of nanotechnologies, nano components and ultra-thin functional films
  • Development of plasma processes for photovoltaics
  • Development of technologies and components for microsystems and nanosystems (sensors, actuators and arrays)
  • Processes and technology for integration of electronics and micro as well as nanosystem components
  • Prototype fabrication of sensors, actuators and arrays
  • Processing services for customer applications

Special attention is paid to Si-based MEMS technologies:

  • Bulk technology
  • High aspect ratio technologies, e.g. air gap insulated microstructures (AIM technology)
  • Encapsulation by wafer bonding
  • Encapsulation by thin film technology

Education and Research

Education and research is mainly focused on the

  • properties of semiconductors and the
  • fabrication processes for discrete and integrated electronic devices as well as sensors and actuators.

Due to our research activities at the Center for Microtechnologies (ZfM) and the Fraunhofer Institute for Electronic Nano Systems ENAS we offer high quality courses and practical trainings for our students.

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