Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
The Research Center
The ZfM is one of the world's leading research centers in the field of microsystems technology and nano technologies. The aim is research and development of new technologies for the micro and nanosystems of tomorrow.
The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nanosystems. Together with partners from industry and research, we bring the developments into application.
ZfM at a Glance
Research News
Innovative and sustainable semiconductor fabrication processes are the common goal
The center for micro- and nanotechnologies (ZfM) at Chemnitz university of technology takes the lead in the European collaborative project HaloFreeEtch, funded with almost four million Euro by the EU.Read more
MEMS chiplets from Chemnitz provide unclonable individual IP for trustworthy electronics and systems
The project VE-VIDES (2021 – 2025, VE-VIDES — Elektronikforschung connects 12 partners from industry and academics to develop design methods and hardware/software verification for the unique identification of electronic components and systems. The ZfM together with the chair SSE contributed to this project with the development of dedicated MEMS, electronics and fingerprint algorithms for hardware-security. Read more
Towards ecofriendly manufacturing and neuroinspired interfaces for semiconductors
Joint Collaboration with IOM launched: Research on energy-efficient semiconductors for computer chips with polyoxometalates (POMs).Read moreThere is even more. Read all the research news.