Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
Center for
Micro and Nano Technologies
One of the world's leading research centers
in the field of microsystems technology and nano technologies
in the field of microsystems technology and nano technologies
Jacob Müller, TU Chemnitz
The Research Center
The ZfM is one of the world's leading research centers in the field of microsystems technology and nano technologies. The aim is research and development of new technologies for the micro and nanosystems of tomorrow.
The focus of the developments is set on miniaturization, energy requirements, performance and resource efficiency of micro and nanosystems. Together with partners from industry and research, we bring the developments into application.
ZfM at a Glance
Research News
Looking back on a succesful PESM 2025 in Chemnitz with a strong contribution from HaloFreeEtch
We are proud to look back on the 15th Plasma Etch and Strip in Microtechnology (PESM) Workshop, where leading experts from science and industry came together in the heart of Saxony. The event focused on advanced plasma etching, vacuum-based removal technologies, and sustainable semiconductor processing.Read more
Outstanding Paper Award 2025 für die Forschung an Nanotechnologien für Photonik und MEMS
Das Team des Projekts OptoMEMS gewann auf der EuroSimE den „Outstanding Paper Award“ mit dem Paper „Optomechanical Inertial Sensors Based on Ring Resonators: Design Approaches and Technology“.Read more
Best paper award to our ALD team for their work on Co-deposition
Our ALD team was recently awarded by the American Vacuum Society for their paper "Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures".Read moreThere is even more. Read all the research news.