Photonics and MOEMS
The research area "Photonics and MOEMS" focuses on basic research in photonics and its application-oriented development. It includes the development of devices for spectroscopic applications, as well as the design and manufacturing of components and systems from macroscopic to nanometric scales. Research subjects also encompass the design and production of quantum dot-based photonic emitters and detectors, such as QD-LEDs or single photon sources, and light-forming elements like metalenses based on thin-film technology. The field is further supplemented by the development of MOEMS, such as tunable optical filters (Fabry-Pérot filters), grating couplers, and waveguides for the area of photonic integrated circuits (PICs). Additionally, the research area deals with optical effects at the molecular level for sensory applications.
Research Topics
- Developement of optical devices for spectroscopic applications
- Photonic systems and components in thin-film technology for PICs
- Utilisation of effects at the molecular level for sensory applications
- MOEMS based Fabry-Pérot interferometer (FPI) and AlN-Scanner
Recent Publications
S. Schermer, C. Helke, M. Reinhardt, S. Hartmann, F. Tank, J. Wecker, G. Heldt, A. Voigt, D. Reuter, Characterization of negative tone photoresist mr-EBL 6000.5 for i-line stepper and electron beam lithography for the Intra-Level Mix & Match Approach, Micro and Nano Engineering, Volume 23, 2024, 100264, ISSN 2590-0072, https://doi.org/10.1016/j.mne.2024.100264.
A. Shaporin et al., "High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors," 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Catania, Italy, 2024, pp. 1-5, https://doi.org/10.1109/EuroSimE60745.2024.10491559. https://ieeexplore.ieee.org/abstract/document/10491559
F. Tank, J. Wecker, C. Stöckel, C. Helke, S. Schermer, A. Shaporin, K. Hiller, D. Reuter, "Aluminum-nitride-based modular photonic integrated circuit technology and characterization platform (PIC-TCP)," Proc. SPIE 12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, 128890B (12 March 2024); https://doi.org/10.1117/12.3000807
Langenickel,J.; Rodrıguez,L.P.; Martin,J.; Moebius,M.; Michaelis,D.; Munzert,P.; Weiss,A.; Danz,N.: Fabrication and characterization of quantum dot based LEDs with enhanced emission properties by micro cavities. SPIE OPTO, San Francisco, California, United States, 2024 Jan 25-30; Proceedings Volume 12906, Light-Emitting Devices, Materials, and Applications XXVIII
Helke,C.; Seiler,J.; Meinig,M.; Grossmann,T.D.; Bonitz,J.; Haase,M.; Zimmermann,S.; Ebermann,M.; Kurth,S.; Reuter,D.; Hiller,K.: Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process.. IEEJ Trans Elec Electron Eng.
Helke,C.; Behl,C.; Behlert,R.; Hartmann,S.; Haase,M.; Martin,J.; Reuter,D.; Hiller,K.: Al-SWG reflectors for tuneable VIS filters and spectroscopy applications . Micro and Nano Engineering Conference (MNE) 2023, Berlin, 25.09.-28.09.2023
Langenickel,J.; Selbmann,F.; Meinecke,C.; Weiss,A.; Roscher,F.; Reuter,D.; Kuhn,H.: Fabrication and integration of quantum dot based emitters for smart mechanical watches. Smart Systems Integration Conference (SSI), Bruges (Belgium), 2023 March 28-30