Simulation of Processes, Equipment and Devices for Micro- and Nanoelectronics
Simulation activities at the Center for Microtechnologies are focused on models for nano-devices, nano-materials and the underlying nano-fabrication processes like film deposition and structuring. We aim at linking those aspects in closed digital models of nano-fabrication workflows from processes to materials to devices.
Simulation at the nano-scale requires appropriate nano-scale tools considering the atomistic structure of materials and a quantum mechanical description of electronic transport. Thus we use simulation concepts originating from theoretical physics and chemistry in the field of applied nano-electronics.
Our work is done in close cooperation with the
