Research

The Zentrum für Mikrotechnologien focuses on micro technologies. These are the main research areas:

1D/2D Nanodevices

The research focuses on scalable integration technologies for 1D and 2D nanomaterials such as Carbon Nanotubes and Graphene and their exploration in nanodevices.

Advanced Micro and Nanopatterning

We develop novel processes for nanopatterning, 3D micromachining, and fabricating integrated optical devices.

MEMS Technologies and Devices

We explore and develop technologies for advanced MEMS sensors and actuators, targeting highest performance parameters for leading-edge devices and innovative applications.

Molecular Micro- and Nanosystems

Molecular Micro- and Nanosystems focusses on single-molecule biosensing using nano-plasmonic and nanophotonic approaches for monitoring in the environment, industrial processes and healthcare.

Nanopackaging

To bring active nanoscale structures to system level, it is imperative to offer packaging technologies operating within the same scale.

Photonics and MOEMS

The research field is concerned with preliminary research in the field of photonics, including associated components and systems

Miniaturized Plasma Systems

Our focus is set on the miniaturization of plasma sources and sensors for the investigation of low-pressure plasmas.

Process Models

The development of robust process models tailored specifically for semiconductor manufacturing processes.

Spintronics - XMR sensors and spintronic films stacks

The research area "Spintronics" focuses on spin-dependent transport phenomena.

Sustainability

The research field deals with sustainable and circular processes in cleanrooms and the use of technologies in sustainable applications.