Research
The Zentrum für Mikrotechnologien focuses on micro technologies. These are the main research areas:
![1D/2D Nanodevices](nanodevices/nanodevices-index.jpg)
1D/2D Nanodevices
The research focuses on scalable integration technologies for 1D and 2D nanomaterials such as Carbon Nanotubes and Graphene and their exploration in nanodevices.
![Advanced Micro and Nano Patterning](nanopatterning/nanopatterning-index.jpg)
Advanced Micro and Nanopatterning
We develop novel processes for nanopatterning, 3D micromachining, and fabricating integrated optical devices.
![MEMS Technologies and Devices](mems/mems-index.jpg)
MEMS Technologies and Devices
We explore and develop technologies for advanced MEMS sensors and actuators, targeting highest performance parameters for leading-edge devices and innovative applications.
![Molecular Micro- and Nanosystems](molecular/molecular-index.jpg)
Molecular Micro- and Nanosystems
Molecular Micro- and Nanosystems focusses on single-molecule biosensing using nano-plasmonic and nanophotonic approaches for monitoring in the environment, industrial processes and healthcare.
![Nanopackaging](nanopackaging/nanopackaging-index.jpg)
Nanopackaging
To bring active nanoscale structures to system level, it is imperative to offer packaging technologies operating within the same scale.
![Photonics and MOEMS](photonics/photonics-index.jpg)
Photonics and MOEMS
The research field is concerned with preliminary research in the field of photonics, including associated components and systems
![Miniaturized Plasma Systems](plasma/plasma-index.jpg)
Miniaturized Plasma Systems
Our focus is set on the miniaturization of plasma sources and sensors for the investigation of low-pressure plasmas.
![Process Models for Semiconductor Manufacturing](process-models/process-models-index.jpg)
Process Models for Semiconductor Manufacturing
The development of robust process models tailored specifically for semiconductor manufacturing processes.
![Simulation of Nanotechnologies](simulations/simulations-index.jpg)
Simulation of Nanotechnologies
We use simulation techniques from the quantum world, to model nano materials and how they are fabricated using atomically precise nano-fabrication processes.
![Spintronics](spintronics/spintronics-index.jpg)
Spintronics - XMR sensors and spintronic films stacks
The research area "Spintronics" focuses on spin-dependent transport phenomena.